Patents by Inventor Steven T. Larsen

Steven T. Larsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layer
    Patent number: 4234361
    Abstract: The invention relates to thin silicon membranes formed in layers of silicon such as are normally utilized as substrates in the manufacture of integrated electronic circuits. The thin membranes constructed in accordance with the invention are capable of deformation by electrostatic forces and are applicable to a wide range of uses including the manufacture of solid state pressure sensors, resonant, and antenna structures, as well as electro-optical display elements. A processing technique is disclosed which is particularly adapted to forming membranes in silicon substrates in a manner which is compatible with the construction thereon of other integrated circuit components.
    Type: Grant
    Filed: July 5, 1979
    Date of Patent: November 18, 1980
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Henry Guckel, Steven T. Larsen
  • Electrostatically deformable thin silicon membranes
    Patent number: 4203128
    Abstract: The invention relates to thin silicon membranes formed in layers of silicon such as are normally utilized as substrates in the manufacture of integrated electronic circuits. The thin membranes constructed in accordance with the invention are capable of deformation by electrostatic forces and are applicable to a wide range of uses including the manufacture of solid state pressure sensors, resonant, and antenna structures, as well as electro-optical display elements. A processing technique is disclosed which is particularly adapted to forming membranes in silicon substrates in a manner which is compatible with the construction thereon of other integrated circuit components.
    Type: Grant
    Filed: September 21, 1978
    Date of Patent: May 13, 1980
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Henry Guckel, Steven T. Larsen