Patents by Inventor Steven W. Meeks

Steven W. Meeks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180005364
    Abstract: A dual mode inspector includes an optical inspector configured to detect a defect located at a first location on a sample, a microscope configured to capture an image of the defect at the first location on the sample, and a platform that is configured to support the sample. The sample is not removed from the platform between the detecting of the defect located at the first location on the sample and the capturing of the image of the defect at the first location on the sample. The dual mode optical inspector also includes a controller that causes the optical inspector to detect the defect located at the first location on the sample and causes the microscope to capture the image of the defect at the first location on the sample. The dual mode inspector also performs scanning lens distortion correction to improve the capturing of defect images.
    Type: Application
    Filed: July 1, 2016
    Publication date: January 4, 2018
    Inventors: Steven W. Meeks, Rusmin Kudinar, Ronny Soetarman, Hung P. Nguyen, James Jianguo Xu
  • Publication number: 20170336331
    Abstract: An optical inspector includes a time varying beam reflector, a radiating source that irradiates the time varying beam reflector, a telecentric scan lens configured to direct the radiation reflected by the time varying beam reflector onto a first surface of a transparent sample, a first detector that receives at least a portion of top surface specular reflection, a second detector that receives at least a portion of the bottom surface specular reflection. A turning mirror may also be included. The turning mirror is a switchable mirror that can be adjusted to a first position where the turning mirror reflects the top and bottom surface specular reflection, and can be adjusted to a second position where the turning mirror does not reflect the top or the bottom surface specular reflection. A first and second polarizing element may also be included to detect additional types of defects on either surface.
    Type: Application
    Filed: May 19, 2016
    Publication date: November 23, 2017
    Inventors: Steven W. Meeks, Rusmin Kudinar, Ronny Soetarman, Hung P. Nguyen
  • Publication number: 20170336330
    Abstract: A method for detecting defects includes directing a scanning beam to a location on a surface of a transparent sample, measuring top and bottom surface specular reflection intensity, and storing coordinate values of the first location and the top and bottom surface specular reflection intensity in a memory. The method may further include comparing the top surface specular reflection intensity measured at each location with a first threshold value, comparing the bottom surface specular reflection intensity measured at each location with a second threshold value, and determining if a defect is present at each location and on which surface the defect is present. The method may further include comparing the top surface specular reflection intensity measured at each location with a first intensity range, comparing the bottom surface specular reflection intensity measured at each location with a second intensity range, and determining on which surface the defect is present.
    Type: Application
    Filed: May 19, 2016
    Publication date: November 23, 2017
    Inventors: Steven W. Meeks, Rusmin Kudinar, Ronny Soetarman, Hung P. Nguyen
  • Patent number: 9784691
    Abstract: A method and apparatus to measure specular reflection intensity, specular reflection angle, near specular scattered radiation, and large angle scattered radiation and determine the location and type of defect present in a first and a second transparent solid that have abutting surfaces. The types of defects include a top surface particle, an interface particle, a bottom surface particle, an interface bubble, a top surface pit, and a stain. The four measurements are conducted at multiple locations along the surface of the transparent solid and the measured information is stored in a memory device. The difference between an event peak and a local average of measurements for each type of measurement is used to detect changes in the measurements. Information stored in the memory device is processed to generate a work piece defect mapping indicating the type of defect and the defect location of each defect found.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: October 10, 2017
    Assignee: ZETA INSTRUMENTS, INC.
    Inventors: Steven W. Meeks, Ronny Soetarman
  • Publication number: 20170261440
    Abstract: A method and apparatus to measure specular reflection intensity, specular reflection angle, near specular scattered radiation, and large angle scattered radiation and determine the location and type of defect present in a first and a second transparent solid that have abutting surfaces. The types of defects include a top surface particle, an interface particle, a bottom surface particle, an interface bubble, a top surface pit, and a stain. The four measurements are conducted at multiple locations along the surface of the transparent solid and the measured information is stored in a memory device. The difference between an event peak and a local average of measurements for each type of measurement is used to detect changes in the measurements. Information stored in the memory device is processed to generate a work piece defect mapping indicating the type of defect and the defect location of each defect found.
    Type: Application
    Filed: May 29, 2017
    Publication date: September 14, 2017
    Inventors: Steven W. Meeks, Ronny Soetarman
  • Publication number: 20160033421
    Abstract: A method and apparatus to measure specular reflection intensity, specular reflection angle, near specular scattered radiation, and large angle scattered radiation and determine the location and type of defect present in a first and a second transparent solid that have abutting surfaces. The types of defects include a top surface particle, an interface particle, a bottom surface particle, an interface bubble, a top surface pit, and a stain. The four measurements are conducted at multiple locations along the surface of the transparent solid and the measured information is stored in a memory device. The difference between an event peak and a local average of measurements for each type of measurement is used to detect changes in the measurements. Information stored in the memory device is processed to generate a work piece defect mapping indicating the type of defect and the defect location of each defect found.
    Type: Application
    Filed: July 31, 2014
    Publication date: February 4, 2016
    Applicant: Zeta Instruments, Inc.
    Inventors: Steven W. Meeks, Ronny Soetarman
  • Patent number: 9163987
    Abstract: A system for defect detection and photoluminescence measurement of a sample may include a radiation source configured to target radiation to the sample. The system may also include an optics assembly positioned above the sample to receive a sample radiation. The system may also include a filter module configured to receive the sample radiation collected by the optics assembly. The filter module may separate the sample radiation collected by the optics assembly into a first radiation portion and a second radiation portion. The system may also include a defect detection module configured to receive the first radiation portion from the filter module. The system may further include a photoluminescence measurement module configured to receive the second radiation portion from the filter module. The defect detection module and the photoluminescence measurement module may be configured to receive the respective first radiation portion and the second radiation portion substantially simultaneously.
    Type: Grant
    Filed: August 24, 2010
    Date of Patent: October 20, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Roman Sappey, Steven W. Meeks
  • Patent number: 8896825
    Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second lens, a field stop, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. The first lens focuses scattered radiation from the sample to generate multiple scan lines at a first focal plane. The field stop is positioned at the first focal plane to block one or more scan lines at the first focal plane. The scan line not blocked by the field stop propagates to the second lens. The second lens de-scans the scan line and generates a point of scattered radiation at a second focal plane where the detector input is located.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: November 25, 2014
    Assignee: Zeta Instruments, Inc.
    Inventors: Steven W. Meeks, Rusmin Kudinar, Hung P. Nguyen
  • Publication number: 20140307255
    Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second waveplate, a polarizing beam splitter, a first detector, a focusing lens, a blocker, and a second detector. The radiating source irradiates the first waveplate generating circularly polarized source beam that irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. Reflected radiation from a sample is directed to the second waveplate generating linearly polarized beam that irradiates the polarizing beam splitter which directs a portion of the reflected radiation to the first detector. Scattered radiation from the sample is directed by the focusing lens to the second detector. Contemporaneous measurements by the first and second detectors are compared to differentiate.
    Type: Application
    Filed: April 12, 2013
    Publication date: October 16, 2014
    Applicant: Zeta Instruments, Inc.
    Inventors: Steven W. Meeks, Rusmin Kudinar, Hung P. Nguyen
  • Patent number: 8848181
    Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second waveplate, a polarizing beam splitter, a first detector, a focusing lens, a blocker, and a second detector. The radiating source irradiates the first waveplate generating circularly polarized source beam that irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. Reflected radiation from a sample is directed to the second waveplate generating linearly polarized beam that irradiates the polarizing beam splitter which directs a portion of the reflected radiation to the first detector. Scattered radiation from the sample is directed by the focusing lens to the second detector. Contemporaneous measurements by the first and second detectors are compared to differentiate.
    Type: Grant
    Filed: April 12, 2013
    Date of Patent: September 30, 2014
    Assignee: Zeta Instruments, Inc.
    Inventors: Steven W. Meeks, Rusmin Kudinar, Hung P. Nguyen
  • Patent number: 8836935
    Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a blocker, a focusing lens, an aperture, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a transparent sample. A portion of the source beam travels through the transparent sample to another surface. The blocker blocks scattered radiation originating at the other surface. Scattered radiation originating from the transparent sample is not redirected by the blocker and is focused by the focusing lens to a first focal plane. The focused scattered radiation passes through the aperture before irradiating the detector. The detector output an intensity measurement of the scattered radiation that irradiates the detector.
    Type: Grant
    Filed: April 12, 2013
    Date of Patent: September 16, 2014
    Assignee: Zeta Instruments, Inc.
    Inventors: Steven W. Meeks, Rusmin Kudinar, Hung P. Nguyen
  • Patent number: 8830457
    Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first waveplate, a second waveplate, a polarizing beam splitter, and a detector. The radiating source irradiates the first waveplate with a linearly polarized source beam generating a circularly polarized source beam, which irradiates a first position of on the time varying beam reflector. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a transparent sample. The reflected radiation from the transparent sample is directed via the telecentric lens and the time varying beam reflector to the second waveplate, which converts circularly polarized reflected radiation to linearly polarized reflected radiation including radiation that is vertically polarized and radiation that is horizontally polarized.
    Type: Grant
    Filed: April 12, 2013
    Date of Patent: September 9, 2014
    Assignee: Zeta Instruments, Inc.
    Inventors: Steven W. Meeks, Rusmin Kudinar, Hung P. Nguyen
  • Patent number: 8830456
    Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a separating mirror, and a first and second detector. The radiating source is configured to irradiate a first position on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. The telecentric scan lens directs specular reflection and near specular scattered radiation to the time varying beam reflector. The specular reflection is directed by the separating mirror to the first detector. The near specular scattered radiation is not reflected by the separating mirror and propagates to the second detector. In response, the optical inspector determines the total reflectivity, the surface slope, or the near specular scattered radiation intensity of the sample.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: September 9, 2014
    Assignee: Zeta Instruments, Inc.
    Inventors: Steven W. Meeks, Rusmin Kudinar, Hung P. Nguyen
  • Patent number: 8823935
    Abstract: A system to detect and classify defects on a surface of a substrate. A first targeting assembly directs radiation in a first beam onto the substrate. A first collecting assembly collects first radiation specularly reflected from the substrate and produces first signals, a second collecting assembly collects first radiation scattered from the surface of the substrate by defects and not micro-roughness and produces second signals, and a third collecting assembly collects first radiation scattered from the surface of the substrate by defects and micro-roughness and produces third signals. A second targeting assembly directs radiation in a second beam onto the substrate. A fourth collecting assembly collects second radiation scattered from the substrate and produces fourth signals. A processor receives the first, second, third, and fourth signals.
    Type: Grant
    Filed: September 10, 2009
    Date of Patent: September 2, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Steven W. Meeks, Xiaoqian Xu, Hung P. Nguyen, Alireza Shahdoost Moghadam, Mahendra Prabhu Ramachandran
  • Publication number: 20140218724
    Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a separating minor, and a first and second detector. The radiating source is configured to irradiate a first position on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. The telecentric scan lens directs specular reflection and near specular scattered radiation to the time varying beam reflector. The specular reflection is directed by the separating mirror to the first detector. The near specular scattered radiation is not reflected by the separating minor and propagates to the second detector. In response, the optical inspector determines the total reflectivity, the surface slope, or the near specular scattered radiation intensity of the sample.
    Type: Application
    Filed: February 1, 2013
    Publication date: August 7, 2014
    Applicant: ZETA INSTRUMENTS, INC.
    Inventors: Steven W. Meeks, Rusmin Kudinar, Hung P. Nguyen
  • Publication number: 20140218722
    Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second lens, a field stop, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. The first lens focuses scattered radiation from the sample to generate multiple scan lines at a first focal plane. The field stop is positioned at the first focal plane to block one or more scan lines at the first focal plane. The scan line not blocked by the field stop propagates to the second lens. The second lens de-scans the scan line and generates a point of scattered radiation at a second focal plane where the detector input is located.
    Type: Application
    Filed: February 1, 2013
    Publication date: August 7, 2014
    Applicant: Zeta Instruments, Inc.
    Inventors: Steven W. Meeks, Rusmin Kudinar, Hung P. Nguyen
  • Patent number: 8736831
    Abstract: Various embodiments for substrate inspection are provided.
    Type: Grant
    Filed: May 15, 2012
    Date of Patent: May 27, 2014
    Assignee: KLA-Tencor Corp.
    Inventors: Mahendra Prabhu Ramachandran, Steven W. Meeks, Romain Sappey
  • Publication number: 20130308124
    Abstract: Various embodiments for substrate inspection are provided.
    Type: Application
    Filed: May 15, 2012
    Publication date: November 21, 2013
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Mahendra Prabhu Ramachandran, Steven W. Meeks, Romain Sappey
  • Patent number: 8325334
    Abstract: An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.
    Type: Grant
    Filed: August 18, 2010
    Date of Patent: December 4, 2012
    Assignee: KLA-Tencor Corporation
    Inventors: Mahendra P. Ramachandran, Steven W. Meeks, Alireza S. Moghadam, Hung P. Nguyen
  • Publication number: 20120049085
    Abstract: A system for defect detection and photoluminescence measurement of a sample may include a radiation source configured to target radiation to the sample. The system may also include an optics assembly positioned above the sample to receive a sample radiation. The system may also include a filter module configured to receive the sample radiation collected by the optics assembly. The filter module may separate the sample radiation collected by the optics assembly into a first radiation portion and a second radiation portion. The system may also include a defect detection module configured to receive the first radiation portion from the filter module. The system may further include a photoluminescence measurement module configured to receive the second radiation portion from the filter module. The defect detection module and the photoluminescence measurement module may be configured to receive the respective first radiation portion and the second radiation portion substantially simultaneously.
    Type: Application
    Filed: August 24, 2010
    Publication date: March 1, 2012
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Roman Sappey, Steven W. Meeks