Abstract: A film bulk acoustic resonator (FBAR) configured as a coplanar transmission line structure. A film resonator formed over an opening in a substrate is connected to associated circuitry by one or more transmission lines formed on the substrate. The coplanar ground plane of this structure provides a simple mechanism for providing a true ground connection to the resonator without the need for vias passing through the substrate. The transmission line connection eliminates the need for wirebonds, thus simplifying fabrication, allowing the device to be more easily modified for computer simulation, and facilitating the operation of the device at microwave frequencies. Embodiments for standard, stacked, and 3-port FBAR's as well as a filter bank consisting of a plurality of coplanar 3-port FBAR's, are described.

Abstract: A diode switched microwave phase shifter network consists of a series of alternate path, phase increment stages. The diodes which control direction of current through the alternate paths are all commonly poled so that a single D.C. diode forward biased source applied between the ends of the network operates all the diodes. The alternate paths of each phase increment stage are controlled by the series connection therein of a collector-emitter internal circuit of a low frequency transistor.

Abstract: Drivers (PNP transistors) are switched to ground by NPN transistors which e triggered by logic inputs. The drivers are connected in series with diodes so as to bias the diode to an on or off condition.