Abstract: An apparatus and method for measuring air currents on the surface of a substrate, which can accurately measure the magnitude and direction of air currents on the surface of a wafer with wafer-type air current measurement sensors, are provided. The apparatus includes: a first air current measurement module measuring a magnitude of air currents on a surface of a first substrate, which is processed in accordance with a semiconductor manufacturing process; a second air current measurement module measuring a movement direction of the air currents; and a power module supplying power to the first and second air current measurement modules, wherein the first air current measurement module, the second air current measurement module, and the power module are mounted on a second substrate, which has the same shape as the first substrate.

Abstract: Disclosed is a multi-core cable fault classification system which includes a reference signal measurement unit configured to measure a core-specific reference signal generated by applying an electromagnetic signal to a multi-core cable having at least two cores, a reflected-signal measurement unit configured to measure a core-specific reflected signal generated by reflecting the generated core-specific reference signal at a point of the multi-core cable, a data processing unit configured to extract, from time-series data for the measured core-specific reflected signal, core-specific partial time-series data based on whether baseline data of the multi-core cable is present, configured to transform the core-specific partial time-series data into a time-frequency distribution, and configured to extract faulty-core determination data, and a faulty core classification unit configured to classify a fault core from the multi-core cable by inputting the extracted faulty-core determination data to a neural network.

Abstract: Disclosed is a multi-core cable fault classification system which includes a reference signal measurement unit configured to measure a core-specific reference signal generated by applying an electromagnetic signal to a multi-core cable having at least two cores, a reflected-signal measurement unit configured to measure a core-specific reflected signal generated by reflecting the generated core-specific reference signal at a point of the multi-core cable, a data processing unit configured to extract, from time-series data for the measured core-specific reflected signal, core-specific partial time-series data based on whether baseline data of the multi-core cable is present, configured to transform the core-specific partial time-series data into a time-frequency distribution, and configured to extract faulty-core determination data, and a faulty core classification unit configured to classify a fault core from the multi-core cable by inputting the extracted faulty-core determination data to a neural network.

Abstract: A reflected-wave processing apparatus according to one embodiment of the present invention may comprise: a reference signal generation unit for applying, to a cable, a first reference signal, the frequency of which increases over time, and a second reference signal, the frequency of which decreases over time; a reflected-signal acquisition unit for acquiring a first reflected signal and a second reflected signal which are reflected from the cable upon applying the first and second reference signals thereto; and a signal analysis unit for analyzing the first and second reflected signals.

Abstract: A reflected-wave processing apparatus according to one embodiment of the present invention may comprise: a reference signal generation unit for applying, to a cable, a first reference signal, the frequency of which increases over time, and a second reference signal, the frequency of which decreases over time; a reflected-signal acquisition unit for acquiring a first reflected signal and a second reflected signal which are reflected from the cable upon applying the first and second reference signals thereto; and a signal analysis unit for analyzing the first and second reflected signals.