Patents by Inventor Subramaniam V. Iyer

Subramaniam V. Iyer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for purging a substrate carrier at a factory interface
    Patent number: 10903102
    Abstract: A method of purging a substrate carrier at a load port includes: opening a door of a substrate carrier that is delivered to a load port; spraying the substrate carrier with a gas flow responsive to the opening the door; mapping substrates within the substrate carrier to generate a substrate map; determining a process purge state based on the substrate map; and activating one or more inter-substrate nozzle arrays and one or more curtain nozzle arrays using a predefined spray status configuration for the process purge state.
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: January 26, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter, Naveen Kumar, Vivek R. Rao, Patrick Pannese
  • METHODS FOR PURGING A SUBSTRATE CARRIER AT A FACTORY INTERFACE
    Publication number: 20200066560
    Abstract: A method of purging a substrate carrier at a load port includes: opening a door of a substrate carrier that is delivered to a load port; spraying the substrate carrier with a gas flow responsive to the opening the door; mapping substrates within the substrate carrier to generate a substrate map; determining a process purge state based on the substrate map; and activating one or more inter-substrate nozzle arrays and one or more curtain nozzle arrays using a predefined spray status configuration for the process purge state.
    Type: Application
    Filed: October 29, 2019
    Publication date: February 27, 2020
    Inventors: Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter, Naveen Kumar, Vivek R. Rao, Patrick Pannese
  • Systems, apparatus, and methods for purging a substrate carrier at a factory interface
    Patent number: 10510570
    Abstract: Embodiments of the present invention provide systems, apparatus, and methods for purging a substrate carrier. Embodiments include a frame configured to sit proximate to a load port door without interfering with operation of a factory interface or equipment front end module robot; one or more inter-substrate nozzle arrays supported by the frame and configured to spray gas into a substrate carrier; and one or more curtain nozzle arrays supported by the frame and configured to spray gas across an opening of the substrate carrier. Numerous additional aspects are disclosed.
    Type: Grant
    Filed: October 22, 2015
    Date of Patent: December 17, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter, Naveen Kumar, Vivek R. Rao, Patrick Pannese
  • SYSTEMS, APPARATUS, AND METHODS FOR PURGING A SUBSTRATE CARRIER AT A FACTORY INTERFACE
    Publication number: 20160118279
    Abstract: Embodiments of the present invention provide systems, apparatus, and methods for purging a substrate carrier. Embodiments include a frame configured to sit proximate to a load port door without interfering with operation of a factory interface or equipment front end module robot; one or more inter-substrate nozzle arrays supported by the frame and configured to spray gas into a substrate carrier; and one or more curtain nozzle arrays supported by the frame and configured to spray gas across an opening of the substrate carrier. Numerous additional aspects are disclosed.
    Type: Application
    Filed: October 22, 2015
    Publication date: April 28, 2016
    Inventors: Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter, Naveen Kumar, Vivek R. Rao, Patrick Pannese