Patents by Inventor Sudhir Ram Gondhalekar

Sudhir Ram Gondhalekar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Directing a flow of gas in a substrate processing chamber
    Patent number: 6450117
    Abstract: A substrate processing chamber 30 comprising a first gas distributor 65 adapted to provide a process gas into the chamber 30 to process the substrate 25, a second gas distributor 215 adapted to provide a cleaning gas into the chamber 30 to clean the chamber, and an exhaust 90 to exhaust the process gas or cleaning gas from the chamber 30.
    Type: Grant
    Filed: August 7, 2000
    Date of Patent: September 17, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Laxman Murugesh, Padmanaban Krishnaraj, Michael Cox, Canfeng Lai, Narendra Dubey, Tom K. Cho, Sudhir Ram Gondhalekar, Lily L. Pang