Abstract: In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

Abstract: The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image.

Abstract: A charged particle beam apparatus facilitating adjusting a beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a first processing step for measuring the sensitivity of the aligner and a second processing step for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus determines the aligner set values, using the aligner sensitivity measured in the first processing step and the amount of deviation detected in the second processing step, such that the primary charged particle beam passes through the center of the objective aperture and controls the aligner using the aligner set values.

Abstract: A discharge test device including: a head that includes a plurality of nozzles discharging liquid to a medium, a temperature obtaining section that obtains a temperature related to the head, a detection electrode that faces the head with a predetermined distance therebetween, an identification section that applies a predetermined voltage to the detection electrode and identifies an abnormal nozzle on the basis of voltage change of the detection electrode generated by liquid discharge from the nozzles, and a control section that controls the head and the identification section so that: when the temperature obtained by the temperature obtaining section is within a first temperature range, the head discharges the liquid to the medium after the identification section identifies the abnormal nozzle, when the temperature obtained by the temperature obtaining section is outside the first temperature range and within a second temperature range that is larger than the first temperature range, the head discharges the l

Abstract: The printing apparatus includes: a head which discharges liquid from a nozzle and is grounded; a detection electrode which is opposed to the nozzle at a predetermined interval and is sealed by an insulating member; a power source which ensures the detection electrode is at a predetermined potential; a determining unit which detects a change in potential of the detecting electrode that is caused by the discharge of the liquid from the nozzle and determines a nozzle that does not normally discharge the liquid to the head on the basis of the change in potential of the detection electrode; and a cap portion which abuts the head during non-printing and accommodates the detection electrode.

Abstract: A small-sized module configured of a detection electrode and a determination unit is provided. An ejection examination apparatus is disclosed, including: a head that ejects a liquid from a nozzle; a detection electrode that faces the nozzle with a predetermined interval between the detection electrode and the nozzle; a power source that sets the detection electrode to a predetermined potential; a determination unit that detects a potential change in the detection electrode arising due to ejection of the liquid from the nozzle and determines a nozzle in the head that does not eject liquid based on the potential change in the detection electrode; and a cap portion that makes contact with the head when printing is not being performed and that houses the detection electrode and the determination unit, the determination unit being sealed by an insulator.

Abstract: In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.

Abstract: A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.

Abstract: A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.

Abstract: In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

Abstract: A liquid jet head includes: a pressure generation chamber 11 communicating with a nozzle opening 13 ejecting a liquid; a piezoelectric element 17 causing pressure change inside the pressure generation chamber 11; a case head 20 having an accommodation portion 19 accommodating the piezoelectric element 17; and a flexible printed board 50 having a driving circuit 60 mounted thereon and connected to the piezoelectric element 17 to drive the piezoelectric element 17. The accommodation portion 19 of the case head 20 is provided with a flow passage member 21 holding a base end portion of the piezoelectric element 17 and being connected to the driving circuit 60 in a thermally conductive manner, the case head 20 is provided with a liquid introduction passage 30 for supplying the liquid to the pressure generation chamber 11, and the flow passage member 21 partitions a part of at least a wall surface of the liquid introduction passage 30.

Abstract: An ink jet recording head 10 is provided which includes: piezoelectric elements 17 as a pressure generation unit that causes pressure change in pressure generation chambers 11 which are communicated with nozzle openings 13 that eject liquid; a driving circuit 60 as a driving unit that generates a driving signal for driving the pressure generation unit; a case head 20 that accommodates therein the driving unit; and a thermally conductor 35 that is in contact with the driving unit and the case head 20, in which the thermally conductor 35 and the case head 20 are fixed to each other via an thermally conductive adhesive layer 72 as a thermally conductive layer.

Abstract: A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.

Abstract: A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.

Abstract: A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.

Abstract: In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.

Abstract: A charged particle beam apparatus facilitating adjusting the beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a processing step (1) for measuring the sensitivity of the aligner and a processing step (2) for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus has means for determining the aligner set values, using the aligner sensitivity measured in the processing step (1) and the amount of deviation detected in the processing step (2), such that the primary charged particle beam passes through the center of the objective aperture and controlling the aligner using the aligner set values.

Abstract: A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.

Abstract: A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.

Abstract: A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.