Abstract: Methods and structures for modulating an inner spacer profile include providing a fin having an epitaxial layer stack including a plurality of semiconductor channel layers interposed by a plurality of dummy layers. In some embodiments, the method further includes removing the plurality of dummy layers to form a first gap between adjacent semiconductor channel layers of the plurality of semiconductor channel layers. Thereafter, in some examples, the method includes conformally depositing a dielectric layer to substantially fill the first gap between the adjacent semiconductor channel layers. In some cases, the method further includes etching exposed lateral surfaces of the dielectric layer to form an etched-back dielectric layer that defines substantially V-shaped recesses. In some embodiments, the method further includes forming a substantially V-shaped inner spacer within the substantially V-shaped recesses.

Abstract: Disclosed is a device including a distributed controller and a common controller. The distributed controller includes a first circuit to generate an output voltage according to a control signal. The common controller includes a common feedback loop coupled to the distributed controller. The common feedback loop includes an amplifier circuit to generate the control signal, and a second circuit coupled to the amplifier circuit. The second circuit replicates the first circuit and stabilizes the control signal.

Abstract: Disclosed is a device including a selected distributed driver, a first feedback control circuit, and a second feedback control circuit. The first feedback control circuit is coupled to the selected distributed driver. The first feedback control circuit is configured to maintain an output of the selected distributed driver within a first predetermined range. The second feedback control circuit is selectively coupled to the selected distributed driver and is configured to maintain the output of the selected distributed driver to be within a second predetermined range. The second predetermined range is within the first predetermined range.

Abstract: A leakage detection circuit is configured to generate a regulated voltage at a node and supply the regulated voltage to one or more word lines. The leakage detection circuit may adjust a source current used to regulate the voltage in response to leakage current sourced to the node. The leakage detection circuit may control an adjustable current sink connected to the node in order to maintain the source current within a target range. The leakage detection circuit may measure the amount of the leakage current by determining how much it had to adjust the leakage current amount to keep the source current within the target range.

Abstract: A memory system includes a leakage current detection circuit to detect for leakage current flowing in a bias line, such as due to a short or a breakdown of dielectric. A leakage sense circuit senses the leakage current, and generates a common mode voltage in response to the sensing. A tracking circuit tracks the common mode voltage, and a leakage current measurement circuit measures the leakage current based on the common mode voltage tracking. The leakage current detection circuit may be an on-the-fly leakage current detection circuit that detects leakage current as part of another operation, such as a memory operation.

Abstract: Disclosed is a device including a distributed controller and a common controller. The distributed controller includes a first circuit to generate an output voltage according to a control signal. The common controller includes a common feedback loop coupled to the distributed controller. The common feedback loop includes an amplifier circuit to generate the control signal, and a second circuit coupled to the amplifier circuit. The second circuit replicates the first circuit and stabilizes the control signal.

Abstract: Disclosed is a device including a selected distributed driver, a first feedback control circuit, and a second feedback control circuit. The first feedback control circuit is coupled to the selected distributed driver. The first feedback control circuit is configured to maintain an output of the selected distributed driver within a first predetermined range. The second feedback control circuit is selectively coupled to the selected distributed driver and is configured to maintain the output of the selected distributed driver to be within a second predetermined range. The second predetermined range is within the first predetermined range.

Abstract: Techniques are presented for determining current levels based on the behavior of a charge pump system while driving a load under regulation. Rather than diving the load directly, a fixed pump output voltage is used to supply a step-down regulator, which it turn drives the load at the selected voltage. While driving the load under regulation, the number of pump clocks during a set interval is counted. This can be compared to a reference that can be obtained, for example, from the numbers of cycles needed to drive a known load current over an interval of the duration. By comparing the counts, the amount of current being drawn by the load can be determined. This technique can be applied to determining leakage from circuit elements, such as word lines in a non-volatile memory.

Abstract: Techniques and apparatuses for identifying weak charge pumps and for setting an optimal clock period for charge pumps to minimize variations in a current-voltage characteristic. A current sink which absorbs a specified current is connected to an output node of a charge pump. In one approach, a success or fail status is set for a charge pump by driving it with a specified clock period in a constantly pumping mode and determining if the output voltage reaches a specified output voltage. In another approach, a success or fail status is set for a charge pump by driving it with a specified clock period in a regulation mode and determining if the period in which the output voltage cycles is a specified multiple, e.g., 2×, of a period of the clock signal. In another approach, an optimal clock period is determined.

Abstract: A circuit for providing a plurality of clock signals of differing frequencies includes: a phase locked loop section including a first voltage controller oscillator, connected to receive a reference clock value and generate therefrom a first voltage level, wherein the first voltage controller oscillator receives the first voltage level and generates therefrom a first clock signal; and one or more second voltage controller oscillators, each connected to receive the first voltage level, a corresponding trim value and a corresponding control voltage and derive therefrom a corresponding second clock signal.

Abstract: In non-volatile memories, bit lines and word lines commonly to driving and decoding circuitry on a single end. Techniques are presented for determining the time constant associated with charging the far end of such lines from the near end, at which the circuitry is connected. While driving a discharged line from the near end, the number of clock cycles for the current to drop from a first level to a second level can be used to estimate the time constant for the far end. Alternately, the line can be initially charged up, after which the current is monitored at the near end. The differences in time constants for different word lines can be used to vary the time used when accessing a selected word line.

Abstract: To maintain stability of memory array operations, a supplemental current can supply a common source line of a memory array so that the combined current from the memory array and supplemental current is at least a minimum regulation current level. When enabled for sensing operations, a driver circuit maintains the common source line's voltage level. A current subtractor circuit determines the difference between a reference current and a current proportional to the current flowing from the array, where the reference current is proportional to the minimum regulation current. The difference current is then mirrored by a self-adjusting current loop and supplied to the common source line to maintain its current level.

Abstract: In non-volatile memories, bit lines and word lines commonly to driving and decoding circuitry on a single end. Techniques are presented for determining the time constant associated with charging the far end of such lines from the near end, at which the circuitry is connected. While driving a discharged line from the near end, the number of clock cycles for the current to drop from a first level to a second level can be used to estimate the time constant for the far end. Alternately, the line can be initially charged up, after which the current is monitored at the near end. The differences in time constants for different word lines can be used to vary the time used when accessing a selected word line.

Abstract: To maintain stability of memory array operations, a current source supplies a common source line of a memory. The magnitude of the regulation current from the source is dynamically determined based on the amount of current from the array itself through use of a feedback control signal provided by a current comparator circuit. The current comparison circuit can use either a digital or an analog implementation.

Abstract: An LDO/HDO circuit adds a supplementary current source to supply the output node. The current boosting section includes a digital comparator with a first input connected to the LDO's feedback loop and a second input connected to a reference level. The comparator then generates a digital output used to control the supplementary current source. This approach also can be used in a far-side implementation, where the local supply level for the load is boosted by the current source based a comparison of this local level and the output of the LDO. Miller capacitive compensation is also considered. Current in shunted to ground from a node in the Miller loop, where the level is controlled by the output of a digital comparator base on a comparison of the circuit's output voltage and a reference level.

Abstract: To maintain stability of memory array operations, a supplemental current can supply a common source line of a memory array so that the combined current from the memory array and supplemental current is at least a minimum regulation current level. When enabled for sensing operations, a driver circuit maintains the common source line's voltage level. A current subtractor circuit determines the difference between a reference current and a current proportional to the current flowing from the array, where the reference current is proportional to the minimum regulation current. The difference current is then mirrored by a self-adjusting current loop and supplied to the common source line to maintain its current level.

Abstract: A circuit for providing a plurality of clock signals of differing frequencies includes: a phase locked loop section including a first voltage controller oscillator, connected to receive a reference clock value and generate therefrom a first voltage level, wherein the first voltage controller oscillator receives the first voltage level and generates therefrom a first clock signal; and one or more second voltage controller oscillators, each connected to receive the first voltage level, a corresponding trim value and a corresponding control voltage and derive therefrom a corresponding second clock signal.

Abstract: Techniques are presented for improving the efficiency of charge pumps. A charge pump, or a stage of a charge pump, provides its output through a pass gate. For example, this could be a charge pump of a voltage doubler type, where the output is supplied through pass gate transistors whose gates are connected to receive the output of an auxiliary section, also of a voltage doubler type of design. The waveforms provided to the gates of the pass gate transistors are modified so that their low values are offset to a higher value to take into account the threshold voltage of the pass gate transistors. In a voltage doubler based example, this can be implemented by way of introducing diodes into each leg of the auxiliary section.

Abstract: Techniques are presented for improving the efficiency of charge pumps. A charge pump, or a stage of a charge pump, provides its output through a pass gate. For example, this could be a charge pump of a voltage doubler type, where the output is supplied through pass gate transistors whose gates are connected to receive the output of an auxiliary section, also of a voltage doubler type of design. The waveforms provided to the gates of the pass gate transistors are modified so that their low values are offset to a higher value to take into account the threshold voltage of the pass gate transistors. In a voltage doubler based example, this can be implemented by way of introducing diodes into each leg of the auxiliary section.

Abstract: To maintain stability of memory array operations, a current source supplies a common source line of a memory. The magnitude of the regulation current from the source is dynamically determined based on the amount of current from the array itself through use of a feedback control signal provided by a current comparator circuit. The current comparison circuit can use either a digital or an analog implementation.