Abstract: The present invention relates to an inflammable mat board for an architecture and a method for manufacturing the same, and in particular to a mat board which is characterized in that in an inflammable mat board for architecture, a mat shaped board is manufactured in such a way that a metallic thread made from an iron, a nonferrous metal, a waste can and a waste tin plate, etc. is tangled like a cotton ball in a thin sheet shape, so it is possible to recycle materials, and an inflammability can be enhanced, and a heat insulation effect can be maximized, and a recycling rate can be enhanced in terms of a material management, and the production of wastes can be advantageously minimized, thus contributing a lot to a green growth policy of the world.

Abstract: A substrate processing apparatus, which is designed to prevent the wobbling of a rotational shaft rotating, is provided. The substrate includes a rotation shaft and a connecting member. A unit is disposed between the rotational shaft and the connecting member to make the rotational shaft and the connecting member close-contact each other or a unit is disposed under the rotational shaft to prevent the wobbling of the rotational shaft.

Abstract: An etching apparatus includes a chamber, a substrate support in the chamber, a substrate-screening unit over the substrate support, wherein a diameter of the substrate-screening unit is smaller than as or equals to a substrate, a gas injection means injecting gases onto a periphery of the substrate, a power supply unit providing an RF (radio frequency) power into the chamber, and a plurality of sensors sensing intervals between the substrate support and the substrate-screening unit.

Abstract: A wafer lift pin assembly of an apparatus for manufacturing a semiconductor device comprises a lower lift pin being driven up and down by an external driving means; a lower lift pin guide leading the lower lift pin to move up and down; an upper lift pin contacting the lower lift pin, the upper lift pin being driven up and down by the lower lift pin; and an upper lift pin guide leading the upper lift pin to move up and down.