Abstract: A method of fabricating a semiconductor device include; seating a substrate having a substrate radius on an electrostatic chuck, applying first radio-frequency power to the electrostatic chuck to induce plasma in a region at least above the electrostatic chuck, and generating a magnetic field in the region at least above the electrostatic chuck using a magnet having a ring-shape and disposed above the electrostatic chuck by applying second radio-frequency power to the magnet, wherein the magnet has an inner radius ranging from about one-half to about one-fourth of the substrate radius.

Abstract: A system for detecting a connection between two devices includes a first device and a second device. The first device includes a first connection terminal and a first reactance element connected to the first connection terminal. The second device includes a second connection terminal; a first resistance element, and a first frequency generator for allowing a signal to pass through the first resistance element and be applied to the first device via the second connection terminal. The second device further includes a first comparator having both input terminals connected to both ends of the first resistance element, and comparing and outputting a signal of both ends of the first resistance element, and a first control unit for determining whether or not the first connection terminal of the first device is connected to the second connection terminal by means of the output signal of the first comparator.

Abstract: A diagnostic device for diagnosing distribution of a radical in a plasma processing chamber, the diagnostic device, may include a spectrometer receiving an optical signal through at least one optical channel connected to the plasma processing chamber, and performing spectral analysis on the optical signal in response to a synchronization signal corresponding to each of states of a multi-level pulse applied to the plasma processing chamber and a synchronizer generating the synchronization signal corresponding to each of the states of the multi-level pulse.

Abstract: A brush for cleaning a wafer includes a core extending lengthwise in a first direction, a brushing roller arranged on an outer circumferential surface of the core and having a first region and a second region defined at an outer circumferential surface of the brushing roller, a plurality of first brushing bristles extending from the first region in a radial direction of the brushing roller, wherein the radial direction of the brushing roller is perpendicular to the first direction, and a plurality of second brushing bristles extending from the second region in the radial direction of the brushing roller. Each of the plurality of first brushing bristles has a first shape, and each of the plurality of second brushing bristles has a second shape different from the first shape.

Abstract: An electronic device is provided. An electronic device includes at least one antenna module, a first communication circuit configured to provide first communication via the at least one antenna module, a plurality of temperature sensor, at least one processor operationally connected to the first communication circuit and the plurality of temperature sensors, and a memory.

Abstract: A Li-metal or metal alloy based batteries with a multilayer structure and the method of manufacturing the same are provided herein. The method includes a preparation step, a stacking step, a pressing step, a cutting step and a termination plating step. Further, a sintering step may be performed prior to the termination plating step. The multilayer structure includes multiple unit battery structures and each battery structure is configured to include an anode layer including a Li-metal or metal allow with a two-dimensional (2D) material coated on the Li-metal or Li-metal alloy, a cathode layer including carbon-sulfur composites and solid or polymer electrolytes between the anode layer and the cathode layer. The 2D material include MoS2 and the carbon-sulfur composites include carbon nanotubes, sulfur, carbon wires, carbon powder, or Li2S powder.

Abstract: A substrate processing apparatus includes a table in an exposure chamber that is configured to perform an exposure process on a semiconductor substrate, a guiding device including a first horizontal driving body slidably movable in a first horizontal direction and a guide rail on the first horizontal driving body and having a trench extending in a second horizontal direction, a positioning device connected to the guiding device, the positioning device including a slider, a second horizontal driving body and a substrate stage, the slider configured to slidably move in the second horizontal direction along the trench, the second horizontal driving body connected or fixed to the slider, the substrate stage on the second horizontal driving body and configured to support the semiconductor substrate, and a blocking member between the guide rail and the substrate stage to block an inflow of foreign substances onto the substrate stage.

Abstract: Methods and systems for ascertaining factors contributing to the temperature of a device. A method includes monitoring a plurality of parameters that are contributing to a temperature of the device. The method also includes estimating a degree of contribution of internal factors to the temperature of the device based on the monitored plurality of parameters and a battery temperature of a battery of the device. The method further includes estimating a degree of contribution of external factors to the temperature of the device, based on the monitored plurality of parameters and a battery temperature of a battery of the device. A neural network can be used for estimating the temperature of the ambience of the device and the impacts of internal and external factors on temperature of the device.

Abstract: A display device according to an embodiment includes a display, a first power module that outputs a first power, and a second power module that outputs a second power. The first power and the second power are supplied to the display.

Abstract: A ZQ calibration circuit included in a semiconductor memory device includes a reference voltage selector configured to output a reference voltage selected from among a first reference voltage and a second reference voltage generated based on a first supply voltage and a second supply voltage, in response to a selection signal, a ZQ engine configured to generate a pull-up code and a pull-down code based on the selected reference voltage, and a loop selector configured to output the selection signal according to whether each of the pull-up code and the pull-down code is toggled. Levels of the first and second reference voltages are different from each other, smaller than a level of the first supply voltage, and greater than a level of the second supply voltage.

Abstract: A storage device includes at least one processor. The at least one processor is configured to acquire a surface scan image in an image tile format of a set size, bind a set number of image tiles in one segment, and store a plurality of segments as files, respectively, instead of storing the image tiles without modification.

Abstract: A semiconductor memory device includes a memory cell array including a plurality of memory cell rows, a row hammer management circuit and a refresh control circuit. The row hammer management circuit counts the number of times of access associated with each of the plurality of memory cell rows in response to an active command from an external memory controller to store the counted values in each of the plurality of memory cell rows as count data, determines a hammer address associated with at least one of the plurality of memory cell rows, which is intensively accessed more than a predetermined reference number of times, based on the counted values, and performs an internal read-update-write operation. The refresh control circuit receives the hammer address and to perform a hammer refresh operation on victim memory cell rows which are physically adjacent to a memory cell row corresponding to the hammer address.

Abstract: A battery module includes a module including a series of cell stacks, each having a series of unit cells arranged in a first direction, and an insulation member insulating at least one unit cell. The battery module also includes a module housing and a series of receiving parts in the module housing accommodating the cell stacks. Each receiving part includes a fixed wall around a respective cell stack and having a portion in contact with the cell stack. The fixed wall includes a pair of end walls at opposite ends of the receiving part in the first direction. The pair of end walls are configured to engage respective end surfaces of the corresponding cell stack in the first direction. The battery module also includes a cooling channel below a floor surface of the module housing for a coolant to flow to cool the receiving parts and the cells stacks.

Abstract: A battery module includes: a plurality of cell stacks, each of the cell stacks including: a plurality of unit cells arranged in a first direction; and an insulation member around the plurality of unit cells; and a module housing, in which a plurality of receiving parts are provided, ones of the cell stacks from among the plurality of cell stacks being located in a receiving part from among the plurality of receiving parts, and each of the receiving parts includes a fixing wall, the fixing wall being around the cell stack received therein and being in contact with the cell stack, and the module housing includes end walls at respective sides of each of the receiving parts in the first direction to engage end surfaces of respective sides of the cell stack received in the respective receiving part in the first direction.

Abstract: An apparatus for sensing a touch includes: a sensor array including a plurality of sensor groups, each of the plurality of sensor groups including sensors adjacent to each other; a first switch circuit configured to connect each of the plurality of sensor groups to a first channel or a second channel according to a first control signal; and a second switch circuit configured to select one of the first channel and the second channel according to a second control signal, wherein the first channel includes first signal lines connected to respective sensors included in a first sensor group of the plurality of sensor groups by the first switch circuit, and the second channel includes a second signal line commonly connected to the sensors included in the first sensor group by the first switch circuit.

Abstract: Provided is a transmitting device for enlarging the size of a data eye of a transmission signal. The transmitting device includes an output driver including a plurality of driver circuits that drive a plurality of multi-level signals onto an output node, and a logic circuit configured to detect a direction of a pull-up or pull-down operation of each of the plurality of driver circuits by transitions of the plurality of driver control signals and generate pulse signals. The plurality of multi-level signals are driven based on a plurality of driver control signals and pulse signals, respectively, and the logic circuit provides a pulse signal to at least one static driver circuit connected to a driver control signal that does not transition, from among the plurality of driver circuits.

Abstract: A display device according to an embodiment includes a display, a first power module that outputs a first power, and a second power module that outputs a second power. The first power and the second power are supplied to the display. The first power module is configured to cut off the first power when an amount of input current exceeds an overload criterion, to identify whether the second power module is abnormal based on the second power, and to change the overload criterion from a first threshold current amount to a second threshold current amount that exceeds the first threshold current amount, in an abnormal state of the second power module.