Patents by Inventor Susan W. Kung

Susan W. Kung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer handling apparatus and method
    Patent number: 4507078
    Abstract: A wafer handling method and apparatus insures proper centering of a wafer at a work station and controls the heat transferred to the wafer in a baking operation. The amount of heat transferred and the rate at which the heat is transferred to the wafer are regulated by controlling the distance between the wafer and a hot plate. The hot plate is maintained at a constant temperature higher than the bake out or equilibrium temperature to which the wafer is to be heated.
    Type: Grant
    Filed: March 28, 1983
    Date of Patent: March 26, 1985
    Assignee: Silicon Valley Group, Inc.
    Inventors: Johann Tam, Jalal Ashjaee, Nobuo B. Kuwaki, Tuan M. Ngo, Susan W. Kung