Patents by Inventor Suvi Päivikki Haukka

Suvi Päivikki Haukka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of depositing transition metal nitride thin films
    Patent number: 6863727
    Abstract: This invention concerns a method for depositing transition metal nitride thin films by an Atomic Layer Deposition (ALD) type process. According to the method vapor-phase pulse of a source material, a reducing agent capable of reducing metal source material, and a nitrogen source material capable of reacting with the reduced metal source material are alternately and sequentially fed into a reaction space and contacted with the substrate. According to the invention as the reducing agent is used a boron compound which is capable of forming gaseous reaction byproducts when reacting with the metal source material.
    Type: Grant
    Filed: October 13, 2000
    Date of Patent: March 8, 2005
    Assignee: ASM International N.V.
    Inventors: Kai-Erik Elers, Suvi Päivikki Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Juha Soininen