Abstract: A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.

Abstract: The present invention relates to a method and a system for operating a semiconductor factory. The factory comprises equipment (8) for processing semiconductor wafers, and an automated material handling system (12). The invention comprises clamping a wafer carrier (16) while a wafer is processed by a particular tool (10), continuing clamping the wafer carrier (16) after processing, and unclamping the wafer carrier (16) when the automated material handling system (12) is ready for removing the wafer carrier (16) from the tool (10).

Abstract: A container for wafer like objects includes a container body and a door closing the container body and which is provided with a device for locking and unlocking the door, including locking elements and holding elements in which the locking elements that lock the door engage. At least one locking element includes a first signal element which is operatively connected to a second signal element arranged at a position important for the engagement of the locking element in the holding element.

Abstract: A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.

Abstract: A transportation system (100/200) has a wafer container (100), such as a FOUP, to rest on a support surface (200). The container has kinematic coupling grooves, and the support surface has kinematic coupling pins. Grooves and pins are at least partially electrically conductive and allow coupling an electric device (150) associated with the container to an electrical circuit (250) associated with the support surface. Device and circuit in combination allow to perform a variety of functions, such as monitoring the correct position of the container, and exchanging signals.