Abstract: Microvalves are composed in a stacked design of a plurality of components comprising at least two housing parts, a membrane clamped between the two housing parts, and an actuator. A plurality of identical components are respectively arranged on a common, individual support plate and positioned next to each other in one plane. The manufacturing method for the microvalves comprises the steps of: providing the support plates with respectively identical components positioned in a grid pattern each having with the same grid dimension, inserting the support plates on top of one another in a retaining device, connecting at least some of the stacked components arranged on the support plates on an outer edge delimiting the components by a joining method, separating the microvalves by punching, and punching the membrane from a membrane support plate during connection of the components.

Abstract: Microvalves are composed in a stacked design of a plurality of components comprising at least two housing parts, a membrane clamped between the two housing parts, and an actuator. A plurality of identical components are respectively arranged on a common, individual support plate and positioned next to each other in one plane. The manufacturing method for the microvalves comprises the steps of: providing the support plates with respectively identical components positioned in a grid pattern each having with the same grid dimension, inserting the support plates on top of one another in a retaining device, connecting at least some of the stacked components arranged on the support plates on an outer edge delimiting the components by a joining method, separating the microvalves by punching, and punching the membrane from a membrane support plate during connection of the components.