Patents by Inventor Syed Hasan Zaidi

Syed Hasan Zaidi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask and method for using the mask in lithographic processing
    Publication number: 20050082559
    Abstract: A method and mask to improve measurement of alignment marks is disclosed. An exemplary embodiment of the invention includes a resist mask with a patterned alignment mark comprising an assemblage of features whose spacing is smaller than the wavelength of light used to measure the alignment. In a preferred embodiment, an alignment mark patterning process alters the appearance of the alignment mark and renders an enhanced contrast with the substrate background.
    Type: Application
    Filed: October 15, 2003
    Publication date: April 21, 2005
    Inventors: Syed Hasan Zaidi, Alois Gutmann, Gary Williams