Patents by Inventor Syed Shoaib Zaidi

Syed Shoaib Zaidi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical measurement of device features using interferometric illumination
    Publication number: 20050168753
    Abstract: The properties of features formed in a substrate are measured. Interferometric illumination is used to illuminate regions of a substrate so that the features of interest occupy a greater proportion of the illuminated area. The signal-to-noise ratio of the measurement signal is therefore increased, and the sensitivity of the measurement is thus improved.
    Type: Application
    Filed: February 3, 2004
    Publication date: August 4, 2005
    Applicant: Infineon Technologies North America Corp.
    Inventors: Shahid Butt, Syed Shoaib Zaidi