Patents by Inventor Sylvain Perrot
Sylvain Perrot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11454543Abstract: An apparatus for measuring surface temperature of a substrate being illuminated by a pulsed light beam configured to heat the substrate and by a beam of probing light, wherein the heated substrate emits a radiated beam of thermal radiation, wherein the apparatus includes an optical system configured to collect the radiated beam and a reflected beam of probing light propagating in substantially close directions, wherein the collected radiated beam and the collected reflected beam are separately routed to a respective detector via a respective routing element, the respective detectors being configured to measure the intensity of the collected radiated beam and collected reflected beam simultaneously and at the same wavelength, wherein the surface temperature is calculated based on the collected radiated beam and on the collected reflected beam.Type: GrantFiled: December 3, 2018Date of Patent: September 27, 2022Assignee: LASER SYSTEMS & SOLUTIONS OF EUROPEInventor: Sylvain Perrot
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Publication number: 20220088714Abstract: A method for uniformly irradiating a frame of a processed substrate, the processed substrate including a plurality of frames, two consecutive frames being separated by an intermediate zone, the method includes steps of: determining an initial position of the processed substrate using a detecting unit; comparing the detected initial position with a first predetermined position associated with a first frame of the processed substrate; irradiating the first frame of the processed substrate by an irradiation beam emitted by a source unit and scanned by a scanning unit based on the first predetermined position, the irradiation beam being adapted to cover uniformly the whole first frame. A system for uniformly irradiating a frame of a processed substrate is also described.Type: ApplicationFiled: September 16, 2021Publication date: March 24, 2022Inventors: Fulvio MAZZAMUTO, Sylvain PERROT, Nabil DOURI, Guillaume Vincent THEBAULT, Karim Mikaël HUET, Guillermo Abraham GONZALEZ TRUJILLO
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Publication number: 20220093421Abstract: The present invention relates to a process for irradiating a processed surface (5) of a processed substrate (1) so as to obtain a predefined temperature profile, the processed surface (5) comprising a first area (11) and a second area (13), said first area (11) having a first combination of optical properties and thermal properties, and said second area (13) having a second combination of optical properties and thermal properties, said first combination and second combination being different. A further object of the invention is a system (21) for irradiating a processed surface (5) of a processed substrate (1) so as to obtain a predefined temperature profile, the processed surface (5) comprising a first area (11) and a second area (13), said first area (11) having a first combination of optical properties and thermal properties, and said second area (13) having a second combination of optical properties and thermal properties, said first combination and second combination being different.Type: ApplicationFiled: September 15, 2021Publication date: March 24, 2022Inventors: Fulvio MAZZAMUTO, Sylvain PERROT, Nabil DOURI, Guillaume Vincent THEBAULT, Karim Mikaël HUET, Martin HEINTZMANN
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Publication number: 20200292390Abstract: An apparatus for measuring surface temperature of a substrate being illuminated by a pulsed light beam configured to heat the substrate and by a beam of probing light, wherein the heated substrate emits a radiated beam of thermal radiation, wherein the apparatus includes an optical system configured to collect the radiated beam and a reflected beam of probing light propagating in substantially close directions, wherein the collected radiated beam and the collected reflected beam are separately routed to a respective detector via a respective routing element, the respective detectors being configured to measure the intensity of the collected radiated beam and collected reflected beam simultaneously and at the same wavelength, wherein the surface temperature is calculated based on the collected radiated beam and on the collected reflected beam.Type: ApplicationFiled: December 3, 2018Publication date: September 17, 2020Inventor: Sylvain PERROT
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Patent number: 10074172Abstract: An imaging device is provided for localizing structures through the surface of an object such as a wafer, with a view to positioning a measuring sensor relative to the structures, includes: (i) an imaging sensor; (ii) an optical imager able to produce, on the imaging sensor, an image of the object in a field of view; and (iii) an illuminator for generating an illuminating beam and lighting the field of view in reflection, in which the illuminating beam and lighting the field of view in reflection, in which the illuminator is able to generate an illuminating beam the spectral content of which is adapted to the nature of the object, such that the light of the beam is able to essentially penetrate into the object. Also provided is a system and a method for carrying out dimensional measurements on an object such as a wafer.Type: GrantFiled: August 16, 2013Date of Patent: September 11, 2018Assignee: UNITY SEMICONDUCTORInventors: Gilles Fresquet, Sylvain Perrot
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Patent number: 10043266Abstract: An imaging method and device is provided for inspecting for the presence, in an object like a wafer, of enclosed structures, such as vias, employing: an imaging sensor; an optical imager able to produce, on the imaging sensor, an object image in a field of view; and an illuminator for generating an illuminating beam and lighting the field of view in reflection, including: acquiring a first image of the object by illuminating the object with a first illuminating beam adapted to the object, such that the light of the beam penetrates the object; acquiring a second image of the object by illuminating the object with a second illuminating beam adapted to the object, such that the light of the beam is reflected by the surface of the object; and comparing the first and second images to identify structures that appear in the first image but not in the second image.Type: GrantFiled: August 20, 2013Date of Patent: August 7, 2018Assignee: UNITY SEMICONDUCTORInventors: Gilles Fresquet, Sylvain Perrot
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Publication number: 20180059032Abstract: A measurement device is provided for inspecting a bonding zone between samples, including a low-coherence interferometer illuminated by a polychromatic light source having a measurement arm crossing the connection zone and a reference arm, at least one optical detector and optical and/or mechanical conditioning apparatus arranged to enable the acquisition of at least two interference measurements having different phase conditions between a measurement optical beam coming from the measurement arm and a reference optical beam coming from the reference arm; and calculation apparatus provided to calculate contrast information relating to the interference and to search, on the basis of the contrast information, for defects in the bonding zone.Type: ApplicationFiled: March 10, 2016Publication date: March 1, 2018Applicant: FOGALE NANOTECHInventor: Sylvain PERROT
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Patent number: 9162870Abstract: A linear fluidic actuator comprising an upper actuation deformable surface suitable to induce a displacement in an actuation direction L and a wall delimiting an internal cavity wherein the shape of the actuator is a pillar; the wall, the cavity and the upper surface of a base form the lower part of said pillar, where h1 is the highest dimension of the internal cavity at rest according to the actuation direction L; a part forms the upper part of said pillar where the upper surface of said upper part is the upper actuation deformable surface, the bottom surface of said upper part closes the upper part of the cavity so as to form an upper surface of said cavity and where h2 is the distance at rest from the top of the upper surface of the internal cavity to the upper actuation deformable surface; the height ratio h1/h2 is comprised between 0.2 and 10; a fluidic inlet is provided and suitable for introducing a fluid in the internal cavity.Type: GrantFiled: July 24, 2009Date of Patent: October 20, 2015Assignee: ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D'OPTIQUE)Inventors: Benjamin Rousseau, Thierry Bonnin, Jean Taboury, Raymond Mercier, Sylvain Perrot
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Publication number: 20150243024Abstract: An imaging device is provided for localizing structures through the surface of an object such as a wafer, with a view to positioning a measuring sensor relative to the structures, includes: (i) an imaging sensor; (ii) an optical imager able to produce, on the imaging sensor, an image of the object in a field of view; and (iii) an illuminator for generating an illuminating beam and lighting the field of view in reflection, in which the illuminating beam and lighting the field of view in reflection, in which the illuminator is able to generate an illuminating beam the spectral content of which is adapted to the nature of the object, such that the light of the beam is able to essentially penetrate into the object. Also provided is a system and a method for carrying out dimensional measurements on an object such as a wafer.Type: ApplicationFiled: August 16, 2013Publication date: August 27, 2015Inventors: Gilles Fresquet, Sylvain Perrot
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Publication number: 20150228069Abstract: An imaging method and device is provided for inspecting for the presence, in an object like a wafer, of enclosed structures, such as vias, employing: an imaging sensor; an optical imager able to produce, on the imaging sensor, an object image in a field of view; and an illuminator for generating an illuminating beam and lighting the field of view in reflection, including: acquiring a first image of the object by illuminating the object with a first illuminating beam adapted to the object, such that the light of the beam penetrates the object; acquiring a second image of the object by illuminating the object with a second illuminating beam adapted to the object, such that the light of the beam is reflected by the surface of the object; and comparing the first and second images to identify structures that appear in the first image but not in the second image.Type: ApplicationFiled: August 20, 2013Publication date: August 13, 2015Inventors: Gilles Fresquet, Sylvain Perrot
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Patent number: 8995063Abstract: An adjustable optical device comprising at least a deformable optical surface activated by linear fluidic actuators comprising: a material layer comprising an upper surface on which the optical surface is provided and a bottom surface; an actuator layer comprising a plurality of linear fluidic actuators separated by at least one cavity, where at least one linear fluidic actuator is a pillar extending in the actuation direction (L) which is non parallel to the bottom surface of the material layer, said pillar comprising a wall delimiting an internal cavity and where an upper surface of said pillar is continuously linked to a zone of the bottom surface of the material layer; fluidic inlets suitable for introducing a fluid in at least one internal cavity of a pillar linear fluidic actuator.Type: GrantFiled: July 24, 2009Date of Patent: March 31, 2015Assignee: Essilor International (Compagnie Generale D'Optique)Inventors: Benjamin Rousseau, Thierry Bonnin, Jean Taboury, Raymond Mercier, Sylvain Perrot
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Publication number: 20140071541Abstract: An adjustable optical device comprising at least a deformable optical surface activated by linear fluidic actuators comprising: a material layer comprising an upper surface on which the optical surface is provided and a bottom surface; an actuator layer comprising a plurality of linear fluidic actuators separated by at least one cavity, where at least one linear fluidic actuator is a pillar extending in the actuation direction (L) which is non parallel to the bottom surface of the material layer, said pillar comprising a wall delimiting an internal cavity and where an upper surface of said pillar is continuously linked to a zone of the bottom surface of the material layer; fluidic inlets suitable for introducing a fluid in at least one internal cavity of a pillar linear fluidic actuator.Type: ApplicationFiled: July 24, 2009Publication date: March 13, 2014Applicant: ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D' OPTIQUEInventors: Benjamin Rousseau, Thierry Bonnin, Jean Taboury, Raymond Mercier, Sylvain Perrot
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Publication number: 20110192998Abstract: A linear fluidic actuator comprising an upper actuation deformable surface suitable to induce a displacement in an actuation direction L and a wall delimiting an internal cavity wherein the shape of the actuator is a pillar; the wall, the cavity and the upper surface of a base form the lower part of said pillar, where h1 is the highest dimension of the internal cavity at rest according to the actuation direction L; a part forms the upper part of said pillar where the upper surface of said upper part is the upper actuation deformable surface, the bottom surface of said upper part closes the upper part of the cavity so as to form an upper surface of said cavity and where h2 is the distance at rest from the top of the upper surface of the internal cavity to the upper actuation deformable surface; the height ratio h1/h2 is comprised between 0.2 and 10; a fluidic inlet is provided and suitable for introducing a fluid in the internal cavity.Type: ApplicationFiled: July 24, 2009Publication date: August 11, 2011Inventors: Benjamin Rousseau, Thierry Bonnin, Jean Taboury, Raymond Mercier, Sylvain Perrot
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Publication number: 20100177013Abstract: The present invention relates to a mixed antenna. The antenna comprises a wire-plate antenna and a PIFA antenna, a first antenna being connectable to an electric generator and the second antenna being coupled to the first by capacitive coupling.Type: ApplicationFiled: March 11, 2008Publication date: July 15, 2010Applicant: TRIXELLInventors: Thibaut Wirth, Sylvain Perrot, Cyril Decroze