Patents by Inventor Syunji Maeda

Syunji Maeda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Image detection method and its apparatus and defect detection method and its apparatus
    Patent number: 7127098
    Abstract: The present invention provides an image detection system capable of picking up a high resolution image of the surface condition of a circuit pattern-formed wafer without being affected by steep pattern steps, discontinuous reflectance distributions and optically transparent substances which are formed after resist patterns are formed and removed. A defect detection apparatus using such an image detection apparatus is also provided by the invention.
    Type: Grant
    Filed: September 13, 2002
    Date of Patent: October 24, 2006
    Assignee: Hitachi, Ltd.
    Inventors: Atsushi Shimoda, Masahiro Watanabe, Syunji Maeda, Hiroshi Goto, Tadashi Suzuki
  • Image detection method and its apparatus and defect detection method and its apparatus
    Publication number: 20030053676
    Abstract: The present invention provides an image detection system capable of picking up a high resolution image of the surface condition of a circuit pattern-formed wafer without being affected by steep pattern steps, discontinuous reflectance distributions and optically transparent substances which are formed after resist patterns are formed and removed. A defect detection apparatus using such an image detection apparatus is also provided by the invention.
    Type: Application
    Filed: September 13, 2002
    Publication date: March 20, 2003
    Inventors: Atsushi Shimoda, Masahiro Watanabe, Syunji Maeda, Hiroshi Goto, Tadashi Suzuki