Patents by Inventor Szu-Yuan Tsai

Szu-Yuan Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for performing semiconductor processes with coated bell jar
    Patent number: 11939664
    Abstract: A semiconductor process system includes a process chamber. The process chamber includes a wafer support configured to support a wafer. The system includes a bell jar configured to be positioned over the wafer during a semiconductor process. The interior surface of the bell jar is coated with a rough coating. The rough coating can include zirconium.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: March 26, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Meng-Chun Hsieh, Tsung-Yu Tsai, Hsing-Yuan Huang, Chih-Chang Wu, Szu-Hua Wu, Chin-Szu Lee
  • Actuator device including nanoscale fiber films
    Patent number: 8784603
    Abstract: A method for making an actuator capable of dry actuation is provided. The method includes providing a first nanoscale fiber film, providing a second nanoscale fiber film, positioning a solid polymer electrolyte at least partially between and adjacent to the first nanoscale fiber film and the second nanoscale fiber film, and then affixing the solid polymer electrolyte to the first nanoscale fiber film and the second nanoscale fiber film. The nanoscale fiber films may be buckypapers, made of carbon nanotubes. The actuator is capable of dry actuation.
    Type: Grant
    Filed: April 27, 2009
    Date of Patent: July 22, 2014
    Assignee: Florida State University Research Foundation, Inc.
    Inventors: Zhiyong Liang, Ben Wang, Chun Zhang, Szu-Yuan Tsai, Leslie Kramer
  • Actuator Device Including Nanoscale Fiber Films
    Publication number: 20100080975
    Abstract: A method for making an actuator capable of dry actuation is provided. The method includes providing a first nanoscale fiber film, providing a second nanoscale fiber film, positioning a solid polymer electrolyte at least partially between and adjacent to the first nanoscale fiber film and the second nanoscale fiber film, and then affixing the solid polymer electrolyte to the first nanoscale fiber film and the second nanoscale fiber film. The nanoscale fiber films may be buckypapers, made of carbon nanotubes. The actuator is capable of dry actuation.
    Type: Application
    Filed: April 27, 2009
    Publication date: April 1, 2010
    Applicant: FLORIDA STATE UNIVERSITY RESEARCH FOUNDATION
    Inventors: Zhiyong Liang, Ben Wang, Chun Zhang, Szu-Yuan Tsai, Leslie Kramer