Patents by Inventor Ta-Ching Wu

Ta-Ching Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF FABRICATING SEMICONDUCTOR DEVICE WITH REDUCED TRENCH DISTORTIONS
    Publication number: 20240178002
    Abstract: A method includes forming a material layer over a substrate, forming a first hard mask (HM) layer over the material layer, forming a first trench, along a first direction, in the first HM layer. The method also includes forming first spacers along sidewalls of the first trench, forming a second trench in the first HM layer parallel to the first trench, by using the first spacers to guard the first trench. The method also includes etching the material layer through the first trench and the second trench, removing the first HM layer and the first spacers, forming a second HM layer over the material layer, forming a third trench in the second HM layer. The third trench extends along a second direction that is perpendicular to the first direction and overlaps with the first trench. The method also includes etching the material layer through the third trench.
    Type: Application
    Filed: February 5, 2024
    Publication date: May 30, 2024
    Inventors: Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu, Kuei-Shun Chen, Ru-Gun Liu, Shau-Lin Shue, Tsai-Sheng Gau, Yung-Hsu Wu
  • Microcavity carrier with image enhancement for laser ablation
    Patent number: 9352539
    Abstract: A carrier belt for fabricating a device or component such as an anisotropic conductive film. The carrier belt includes a substrate having a sacrificial image enhancing layer. Microcavities are formed in the carrier by laser ablation through the image enhancing layer. After the image enhancement layer is removed, a plurality of conductive particles are distributed into an array of microcavities formed by laser ablation on a surface of a carrier belt and transferred to an adhesive layer. The image enhancing layer enables one to form microcavities with a fine pitch and spacing and partitions having a high aspect ratio.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: May 31, 2016
    Assignee: TRILLION SCIENCE, INC.
    Inventors: Rong-Chang Liang, Chin-Jen Tseng, Ta-Ching Wu, Jia Yen Leong, Zhiyao An, An-Yu Ma, Maung Kyaw Aung
  • MICROCAVITY CARRIER WITH IMAGE ENHANCEMENT FOR LASER ABLATION
    Publication number: 20140261992
    Abstract: A carrier belt for fabricating a device or component such as an anisotropic conductive film. The carrier belt includes a substrate having a sacrificial image enhancing layer. Microcavities are formed in the carrier by laser ablation through the image enhancing layer. After the image enhancement layer is removed, a plurality of conductive particles are distributed into an array of microcavities formed by laser ablation on a surface of a carrier belt and transferred to an adhesive layer. The image enhancing layer enables one to form microcavities with a fine pitch and spacing and partitions having a high aspect ratio.
    Type: Application
    Filed: March 12, 2013
    Publication date: September 18, 2014
    Applicant: Trillion Science Inc.
    Inventors: Rong-Chang Liang, Chin-Jen Tseng, Ta-Ching Wu, Jia Yen Leong, Zhiyao AN, An-Yu Ma, Maung Kyaw Aung