Patents by Inventor Ta-Tien Hsiang

Ta-Tien Hsiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6280696
    Abstract: A method for removing high boiling point volatile organic compounds from an exhaust gas and an apparatus for performing such operation are described. In the method, a wet scrubber is provided which is equipped with a spent water reservoir at the bottom of the scrubber for collecting spent water that contains the volatile organic compounds dissolved in water used to wash the exhaust gas. An ozone gas at a preset concentration is then flown into the spent water to oxidize the dissolved volatile organic compounds contained in the water. The exhaust gas after being washed in the wet scrubber can be released to the atmosphere together with carbon dioxide generated in the oxidation reaction. In the apparatus, an ozone detector is further provided on the exhaust gas outlet in the wet scrubber chamber to verify a content of ozone in the released exhaust gas which is an indication that all the volatile organic compounds have been oxidized in the spent water reservoir.
    Type: Grant
    Filed: April 5, 2000
    Date of Patent: August 28, 2001
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
    Inventors: Hua-Ching Hsu, Ta-Tien Hsiang