Patents by Inventor Tadafumi Sato

Tadafumi Sato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication method of semiconductor integrated circuit device including inspecting using probe card
    Patent number: 7271014
    Abstract: A probe card is formed of a main board and a sub-board located above the principal surface of the main board. The sub-board is located inside of an internal circumferential pad region of the main board. Relays are arranged in a line along the external circumference of the upper surface of the sub-board. Electrical components, such as the relays, a capacitor, a crystal-controlled oscillator, and an IC, are selected from components which are reduced in size as much as possible. The circuit for inspection is formed of the electrical components provided over the sub-board and the wiring layers within the sub-board. As a result, the yield of the probe card can be improved.
    Type: Grant
    Filed: December 21, 2004
    Date of Patent: September 18, 2007
    Assignee: Renesas Technology Corp.
    Inventor: Tadafumi Sato
  • Fabrication method of semiconductor integrated circuit device
    Publication number: 20050142697
    Abstract: A probe card is formed of a main board and a sub-board located above the principal surface of the main board. The sub-board is located inside of an internal circumferential pad region of the main board. Relays are arranged in a line along the external circumference of the upper surface of the sub-board. Electrical components, such as the relays, a capacitor, a crystal-controlled oscillator, and an IC, are selected from components which are reduced in size as much as possible. The circuit for inspection is formed of the electrical components provided over the sub-board and the wiring layers within the sub-board. As a result, the yield of the probe card can be improved.
    Type: Application
    Filed: December 21, 2004
    Publication date: June 30, 2005
    Inventor: Tadafumi Sato