Patents by Inventor Tadahiro Hashimoto

Tadahiro Hashimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for preparing a mask for use in manufacturing a semiconductor device
    Patent number: 4068018
    Abstract: A process is disclosed for preparing a mask, such as a photo-mask, used in a selective etching process in the manufacture of a semiconductor device or a protective mask for use in a process for selectively providing a porous layer of silicon or for anodic oxidation of a metal layer, in which ions accelerated at a predetermined voltage are implanted into a photo-resist film to a predetermined dose level.
    Type: Grant
    Filed: September 15, 1975
    Date of Patent: January 10, 1978
    Assignee: Nippon Electric Co., Ltd.
    Inventors: Tadahiro Hashimoto, Yasushi Okuyama, Toshio Koguchi, Koji Wada, Mitsuru Sakamoto, Takayuki Yanagawa, Kyoji Yamamoto