Abstract: X- and y-axis moving mechanisms are provided for positioning a sample table in the x-axis and the y-axis directions. A yT-axis moving mechanism for moving those moving mechanisms in a direction along a tilting direction of a X-ray camera is provided separately from the x- and y-axes moving mechanisms. When the X-ray camera is tilted, the sample table is moved by the yt axis moving mechanism and a z-axis moving mechanism, whereby a viewpoint of the sample and a fluoroscopic magnification factor set before the X-ray camera is tilted are left unchanged. The coordinates on the sample table by the moving mechanisms before the X-ray camera is tilted can be used as they are even after the camera is tilted.

Abstract: As the operator sets a direction of moving a turn table, a view field FOV (z) of an X-ray detector in the rotation axis direction of the turn table, and the number of imaging times n and gives a continuous imaging command, the imaging operation of collecting X-ray fluoroscopic data while rotating the turn table and the operation of moving the turn table in the setup direction by FOV (z) are repeated and imaging is conducted n times. Then, the provided data is reconstructed to provide tomograms. It is possible to provide a continuous tomogram even if a high imaging magnification is set to provide high-resolution three-dimensional data and a necessary region for the three-dimensional data cannot be covered in the field of view of the X-ray detector.

Abstract: X- and y-axis moving mechanisms are provided for positioning a sample table in the x-axis and the y-axis directions. A yT-axis moving mechanism for moving those moving mechanisms in a direction along a tilting direction of a X-ray camera is provided separately from the x- and y-axes moving mechanisms. When the X-ray camera is tilted, the sample table is moved by the yt axis moving mechanism and a z-axis moving mechanism, whereby a viewpoint of the sample and a fluoroscopic magnification factor set before the X-ray camera is tilted are left unchanged. The coordinates on the sample table by the moving mechanisms before the X-ray camera is tilted can be used as they are even after the camera is tilted.

Abstract: As the operator sets a direction of moving a turn table, a view field FOV (z) of an X-ray detector in the rotation axis direction of the turn table, and the number of imaging times n and gives a continuous imaging command, the imaging operation of collecting X-ray fluoroscopic data while rotating the turn table and the operation of moving the turn table in the setup direction by FOV (z) are repeated and imaging is conducted n times. Then, the provided data is reconstructed to provide tomograms. It is possible to provide a continuous tomogram even if a high imaging magnification is set to provide high-resolution three-dimensional data and a necessary region for the three-dimensional data cannot be covered in the field of view of the X-ray detector.

Abstract: A data processor for fluorescent x-ray spectroscopy calculates theoretical x-ray intensity which is theoretically expected to be obtained by a fluorescent x-ray spectroscopy measurement of a standard sample with known composition by taking into account the effects of x-ray attenuation by the possible presence of an environmental gas along the optical path of the x-rays between the x-ray tube and the sample and between the sample and the detector. The element sensitivity for each of elements in the standard sample is obtained from this calculated x-ray intensity and the intensity actually measured and is stored in a memory. When a fluorescent x-ray spectroscopy measurement is carried out on an unknown sample, the sample is quantitatively analyzed, a theoretically calculated x-ray intensity obtained also by taking into account the effects of x-ray attenuation by an environmental gas is used together with the actually measured x-ray intensity and the element sensitivities stored in the memory.