Patents by Inventor Tadahisa Shiono

Tadahisa Shiono has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus
    Patent number: 7626180
    Abstract: An ion gun 11 supplies an Ar gas into a main body 111 from a gas inlet 114, causes DC hot cathode discharge between a filament 113 and an anode 112 to generate Ar plasma. Next, a voltage gradient is applied to separated accelerator grids 116a, 116b having a bi-separated configuration in an ion ejecting direction. The each potential of the separated accelerator grids 116a, 116b is independently controlled by independently setting accelerator control switches 121a, 121b on or off to change the potential of that of the separated accelerator grids 116a, 116b which corresponds to an ion beam to be disabled.
    Type: Grant
    Filed: November 28, 2007
    Date of Patent: December 1, 2009
    Assignee: Showa Shinku Co., Ltd.
    Inventors: Yusuke Osada, Tadahisa Shiono, Yutaka Yabe, Makoto Ito
  • CHARGED PARTICLE BEAM APPARATUS, METHOD FOR CONTROLLING CHARGED PARTICLE, AND FREQUENCY ADJUSTMENT APPARATUS
    Publication number: 20080164820
    Abstract: An ion gun 11 supplies an Ar gas into a main body 111 from a gas inlet 114, causes DC hot cathode discharge between a filament 113 and an anode 112 to generate Ar plasma. Next, a voltage gradient is applied to separated accelerator grids 116a, 116b having a bi-separated configuration in an ion ejecting direction. The each potential of the separated accelerator grids 116a, 116b is independently controlled by independently setting accelerator control switches 121a, 121b on or off to change the potential of that of the separated accelerator grids 116a, 116b which corresponds to an ion beam to be disabled.
    Type: Application
    Filed: November 28, 2007
    Publication date: July 10, 2008
    Applicant: SHOWA SHINKU CO., LTD.
    Inventors: Yusuke Osada, Tadahisa Shiono, Yutaka Yabe, Makoto Ito