Abstract: An inspection apparatus for inspecting a resist boundary on a substrate having an outer surrounding portion, includes: an illumination unit which illuminates the outer surrounding portion of the substrate; a detector which detects light reflected from the outer surrounding portion; and a judgment unit which judges, based on light intensity of the detected reflected light, whether a resist removal width is proper.

Abstract: An inspection apparatus for inspecting a resist boundary on a substrate having an outer surrounding portion, includes: an illumination unit which illuminates the outer surrounding portion of the substrate; a detector which detects light reflected from the outer surrounding portion; and a judgment unit which judges, based on light intensity of the detected reflected light, whether a resist removal width is proper.

Abstract: A speed reducing device employs dampers which are provided for power transmission from a worm wheel engaged with a worm gear to an output shaft of the device so as to absorb shocks. The device does not require a metallic plate to which the dampers are adhered nor a bearing which specifically supports the output shaft. A first wheel is engaged with the worm gear and has protrusions on its plate surface facing a second wheel. The second wheel is rigidly connected to the output shaft and has protrusions on its plate surface facing the first wheel. The protrusions of the first and second wheels take complementary positions, in which each protrusion of one wheel is apart from the adjacent protrusion of the other wheel a predetermined distance with respect to the rotational direction. The dampers are provided between neighboring protrusions of the first and second wheels so that the dampers are pressed and contracted to elastically transmit power from the first wheel to the second wheel.