Abstract: A method for producing a Ta sputtering target including the following steps: (a) a step of forging a Ta ingot, comprising subjecting the Ta ingot to a forging pattern over at least 3 times, wherein each forging pattern is “a cold forging step comprising stamp-forging and upset-forging operations alternatively repeated over at least 3 times; (b) an in-process vacuum heat-treating step carried out between every successive two forging patterns to thus prepare a Ta billet; (c) a step of rolling the Ta billet to obtain a rolled plate; and (d) a step of vacuum heat-treating the rolled plate to obtain a Ta sputtering target. A sputtering target produced by the above method.

Abstract: Provided is a metallic wiring film which is not peeled away even when exposed to a hydrogen plasma. A metallic wiring film is constituted by an adhesion layer containing copper, Ca, and oxygen and a low-resistance metal layer (a layer of a copper alloy or pure copper) having a lower resistance than the adhesion layer. When the adhesion layer is composed of a copper alloy, which contains Ca and oxygen, and a source electrode film and a drain electrode film adhering to an ohmic contact layer are constituted by the adhesion layer, even if the adhesion layer is exposed to the hydrogen plasma, a Cu-containing oxide formed at an interface between the adhesion layer and the ohmic contact layer is not reduced, so that no peeling occurs between the adhesion layer and a silicon layer.

Abstract: A wiper apparatus includes an arm shank pivotably supported at its proximal end portion on a vehicle and an arm piece mounted at its proximal end portion to a distal end portion of the arm shank and having a wiper blade attached to the other end portion remote from the distal end portion of the arm shank. The wiper apparatus also includes an arm piece cover covering the arm piece having an outer peripheral surface flush with an outer peripheral surface of the distal end portion of the arm shank.

Abstract: The optical connector includes a holder unit, a first optical fiber fixedly supported by the holder unit and having an inclined end face, a first collimating lens spaced from the inclined end face, a mounting unit supported relative to the holder unit, a second optical fiber disposed opposite the first collimating lens and having an inclined end face, a second collimating lens disposed between the first collimating lens and the second optical fiber and spaced from the inclined end face of the second optical fiber, wherein an optical transmission system comprising the first optical fiber and the first collimating lens is symmetric to an optical transmission system comprising the second optical fiber and the second collimating lens with respect to a plane perpendicular to the optical axis.

Abstract: A vehicle sliding door structure includes an inner door panel, an outer door panel, a reinforcing bracket and a first bulkhead. The inner door panel has a vertically oriented sash section extending along an outboard facing surface thereof adjacent to a rearward side of an outer peripheral edge thereof. The sash section has a latch mechanism supporting part proximate a mid-region of the rearward side of the outer peripheral edge. The outer door panel is fixed to the outer peripheral edge of the inner door panel. The reinforcing bracket is fixedly attached to the outboard facing surface of the inner door panel along a region of the sash section that extends from below the latch mechanism supporting part to above the latch mechanism supporting part. The first bulkhead is fixedly attached to the reinforcing bracket and extends from the reinforcing bracket toward the outer door panel.

Abstract: A vehicle sliding door structure includes an inner door panel, an outer door panel, a reinforcing bracket and a first bulkhead. The inner door panel has a vertically oriented reinforced section extending along an outboard facing surface thereof adjacent to a rearward side of an outer peripheral edge thereof. The reinforced section has a latch mechanism supporting part proximate a mid-region of the rearward side of the outer peripheral edge. The outer door panel is fixed to the outer peripheral edge of the inner door panel. The reinforcing bracket is fixedly attached to the outboard facing surface of the inner door panel along a region of the reinforced section that extends from below the latch mechanism supporting part to above the latch mechanism supporting part. The first bulkhead is fixedly attached to the reinforcing bracket and extends from the reinforcing bracket toward the outer door panel.

Abstract: A metallic wiring film, which is not exfoliated even when exposed to plasma of hydrogen, is provided. A metallic wiring film is constituted by an adhesion layer in which Al is added to copper and a metallic low-resistance layer which is disposed on the adhesion layer and made of pure copper. When a copper alloy including Al and oxygen are included in the adhesion layer and a source electrode and a drain electrode are formed from it, copper does not precipitate at an interface between the adhesion layer and the silicon layer even when being exposed to the hydrogen plasma, which prevents the occurrence of exfoliation between the adhesion layer and the silicon layer. If the amount of Al increases, since widths of the adhesion layer and the metallic low-resistance layer largely differ after etching, the maximum addition amount for permitting the etching to be performed is the upper limit.

Abstract: A metallic wiring film, which is not exfoliated even when exposed to a plasma of hydrogen, is provided. A metallic wiring film 20a is constituted by an adhesion layer 51 in which an additive metal is added to copper and a low-resistance metallic layer 52, which is made of pure copper, is disposed on the adhesion layer 51. When the additive metal made of at least one of Ti, Zr and Cr, and oxygen are included in a copper alloy which is in the adhesion layer 51 and a source electrode and a drain electrode are formed from it, copper does not precipitate at an interface between the adhesion layer 51 and the silicon layer even when being exposed to the hydrogen plasma, which prevents exfoliation from occurring between the adhesion layer 51 and the silicon layer. If the amount of additive metal increases, the adhesion layer 51 cannot be etched with an etching liquid for etching the low-resistance metallic layer 52, so that the maximum additional amount to permit the etching to be performed is the upper limit.

Abstract: A wiring film having excellent adhesion and barrier property and a low resistance value is formed. An oxygen gas is introduced into a vacuum chamber in which an object to be film formed is disposed; a sputtering target is sputtered in a vacuum ambience containing oxygen; and a first metallic film is formed on a surface of the object to be film formed. The first sputtering target includes copper as a major component and at least one kind of additive elements selected from an additive element group consisting of Mg, Al, Si, Be, Ca, Sr, Ba, Ra, Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb and Dy. Thereafter, a second metallic film is formed on a surface of the first metallic film by sputtering the sputtering target in a state in which the introduction of the oxygen gas into a vacuum ambience is stopped, and then a wiring film is formed by etching the first and second metallic films.

Abstract: The optical rotary adapter is used with an optical tomographic imaging system for acquiring an optical tomographic image of an object under measurement. The adapter includes a fixed sleeve, a stationary optical fiber supported by the fixed sleeve and having an inclined end face, a stationary collimating lens spaced a given distance from the inclined end face, a mounting cylinder carried rotatably with respect to the fixed sleeve, a rotary optical fiber mounted to the mounting cylinder and having an inclined end face, a rotary collimating lens mounted to the mounting cylinder and disposed with a given distance from the inclined end face, and a rotation actuating device for rotating said mounting cylinder. The central axes of the stationary and rotary optical fibers are offset from or inclined with respect to a central axis of rotation of the mounting cylinder to reduce attenuation of returning light from the object.

Abstract: A wiring film having excellent adhesion and a low resistance is formed. A barrier film having copper as a main component and containing oxygen is formed on an object to form a film thereon by introducing an oxygen gas into a vacuum chamber in which the object to form a film thereon and sputtering a pure copper target. Then, after the introduction of the oxygen gas is stopped, a low-resistance film made of pure copper is formed by sputtering the pure copper target. Since the barrier film and the low-resistance film have copper as the main component, they can be patterned at a time. Since the low-resistance film has a resistance lower than that of the barrier film, the resistance of the entire wiring film is reduced. Since the barrier layer has high adhesion to glass and silicon, the entire wiring film has high adhesion.

Abstract: An optical tomographic image production apparatus includes an optical probe, in which a light-transmitting area that transmits measurement light and a light-blocking area that blocks the measurement light are formed. The light-blocking area is provided at a start position and an end position of the light-transmitting area. A tomographic image processing means detects an interference signal or tomographic information when the light-blocking area is irradiated with the measurement light. Further, the tomographic image processing means detects, based on the detected interference signal or tomographic information, interference signals or tomographic information obtained when the light-transmitting area is irradiated with the measurement light to produce a tomographic image in the light-transmitting area.

Abstract: An OCT optical probe to be inserted into a subject includes: a cylindrical sheath to be inserted into a subject; an optical fiber disposed in the internal space of the sheath; a rotatably-supporting portion fixed to the optical fiber in the vicinity of a distal end of the optical fiber; a distal optical system to deflect light emitted from the distal end of the optical fiber toward the subject; a holding portion to hold the distal optical system such that the optical system is rotatably supported by the rotatably-supporting portion; and a flexible shaft covering the optical fiber in the internal space, wherein the holding portion is fixed to a distal end of the flexible shaft. Using the OCT optical probe of the invention, the problem of degradation of measurement accuracy due to optical insertion loss and optical reflection loss at a rotary joint can be eliminated inexpensively and safely.

Abstract: A conductive film having high adhesion and low specific resistance is formed. A target containing copper as a main component is sputtered in vacuum ambience while an oxygen gas introduced, and then, a conductive film containing copper as a main component and additive metals, such as Ti or Zr, is formed. Such a conductive film has high adhesion to a silicon layer and a glass substrate and is hardly peeled off from the substrate. Furthermore, the specific resistance is low and the contact resistance to a transparent conductive film is also low. Thus, no deterioration in the electric characteristics occurs even when the conductive film is used for an electrode film. Accordingly, the conductive film formed by the present invention suited for TFT, and electrode films and barrier films of semiconductor elements, in particular.

Abstract: The optical connector includes a holder unit, a first optical fiber fixedly supported by the holder unit and having an inclined end face, a first collimating lens spaced from the inclined end face, a mounting unit supported relative to the holder unit, a second optical fiber disposed opposite the first collimating lens and having an inclined end face, a second collimating lens disposed between the first collimating lens and the second optical fiber and spaced from the inclined end face of the second optical fiber, wherein an optical transmission system comprising the first optical fiber and the first collimating lens is symmetric to an optical transmission system comprising the second optical fiber and the second collimating lens with respect to a plane perpendicular to the optical axis.

Abstract: The optical tomographic imaging system includes a main body for acquiring an optical tomographic image, an optical probe having a rotary optical fiber for guiding the measuring and returning light, a measuring unit, and a sheath rotatably holding the rotary optical fiber and the measuring unit, a rotary drive unit for rotatably coupling the rotary optical fiber to a stationary optical fiber connected with the main body, an extra length handling mechanism for winding the optical probe into a loop having at least a minimum diameter and an attaching unit removably attaching the optical probe. The extra length handling mechanism winds an extra length of the optical probe by a length depending upon a length up to the location to be examined. The system eliminates the need to change the optical probe depending upon the location to be examined and the need to adjust the optical path length of reference light.

Abstract: A wiper apparatus includes an arm shank pivotably supported at its proximal end portion on a vehicle and an arm piece mounted at its proximal end portion to a distal end portion of the arm shank and having a wiper blade attached to the other end portion remote from the distal end portion of the arm shank. The wiper apparatus also includes an arm piece cover covering the arm piece having an outer peripheral surface flush with an outer peripheral surface of the distal end portion of the arm shank.

Abstract: Wiper apparatus for wiping a window glass of a vehicle includes: an arm shank pivotably supported at its proximal end portion on a vehicle near a window glass and having an opening portion opposed to the window glass and an inner space located inwardly of the opening portion; an arm piece mounted to a distal end portion of the arm shank and having a wiper blade attached thereto; and a wind-noise preventing device provided between the arm piece and the proximal end portion of the arm shank and having a portion protruding through the opening portion toward the window glass so as to prevent traveling wind from entering the inner space through the opening portion.

Abstract: To provide a speaker system in which arrival times of sounds radiated from each speaker are aligned, sound pressures of speakers other than a woofer are enhanced as in a horn-type speaker, and each speaker unit, which disperses with a conventional horn, is gathered to integrate functions of each speaker and present a balanced appearance. Two or more types of speakers 3, 4, 5 including a reference speaker 4 for reproducing a high frequency range next to a reproduction range of a woofer 3 are arranged in line and a pair of enhanced walls 10a is disposed on a front face of a baffle board 2 to pass by left and right sides of a radiating face of the reference speaker 4, vertically extend along the front face of the baffle board 2, and open left and right toward forward. Accordingly, the radiated sound from the reference speaker 4 is enhanced by an inside space of the pair of enhanced walls 10a without enhancing the radiated sound from the woofer 3.

Abstract: The optical scanning apparatus includes a light amount reducing filter such as a neutral density filter which has transmittance ?nd satisfying an expression ?nd=(W1/W0)/(?AOM×?ref×?tra) and a light amount reducing function using absorption or reflection and which is disposed between a laser light source and an AOM on an optical path of laser light beam. In the expression, W0 denotes the amount of light emitted from the laser light source, W1 denotes the amount of light required for recording on a recording medium, ?AOM denotes diffraction efficiency in the AOM, ?ref denotes a sum of reflectances of reflective optical elements located between the laser light source and a surface to be scanned, of the recording medium, and ?tra denotes a sum of transmittances of transmissive optical elements located between the laser light source and the surface to be scanned, other than transmittance of the neutral density filter.