Patents by Inventor Tadashi Obigane

Tadashi Obigane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer probing test machine
    Patent number: 5278494
    Abstract: A wafer probing test machine including a loading/unloading section defined by a first frame to enclose plurality of cassette stages therein, a test section defined by a second frame for enclosing a test stage therein, an elevator for moving at least one of the cassette stages up and down, and a wafer transfer system having a multi-jointed arm for taking out the wafer from a cassette and transferring the wafer onto the test stage.
    Type: Grant
    Filed: February 19, 1992
    Date of Patent: January 11, 1994
    Assignee: Tokyo Electron Yamanashi Limited
    Inventor: Tadashi Obigane