Patents by Inventor Tadataka Noguchi
Tadataka Noguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11804391Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: GrantFiled: June 15, 2022Date of Patent: October 31, 2023Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
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Publication number: 20220310423Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: ApplicationFiled: June 15, 2022Publication date: September 29, 2022Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
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Patent number: 11417550Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: GrantFiled: December 10, 2020Date of Patent: August 16, 2022Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
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Publication number: 20210242052Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: ApplicationFiled: December 10, 2020Publication date: August 5, 2021Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
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Publication number: 20140090507Abstract: A robot arm includes a first arm having a base end portion rotatably connected to an arm base, and a second arm having a base end portion rotatably connected to a tip end portion of the first arm and a tip end portion to which a robot hand is rotatably connected. Further, the robot arm includes a link unit having a base end portion rotatably supported with respect to the arm base and a tip end portion inserted into the first arm at an intermediate portion of the first arm and supported to make relative rotation with respect to the first arm. The link unit rotates the second arm with respect to the first arm by transmitting the relative rotation to the base end portion of the second arm.Type: ApplicationFiled: September 25, 2013Publication date: April 3, 2014Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Kazutoshi IMAI, Nobuyuki FURUKAWA, Tadataka NOGUCHI
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Publication number: 20110236162Abstract: A processing-object-supporting mechanism includes at least three devices each including a lift pin, a motor, and a drive controller. The lift pin contacts a processing object to support the processing object. The processing object is transferred between a conveying arm and the processing-object-supporting mechanism. The motor lifts and lowers the lift pin. The drive controller is configured to control the motor. The drive controller of each of the at least three devices is configured to control the motor of each of the at least three devices independently.Type: ApplicationFiled: February 24, 2011Publication date: September 29, 2011Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Toru Shikayama, Tadataka Noguchi, Akihito Toyota, Yoshihiro Kusama
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Patent number: 7950890Abstract: A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being configured to transfer the work by causing a rotational movement of the arm portion by the motor portion. The motor portion comprises a rotor portion connected to the arm portion, a stator portion disposed at an external periphery of the rotor portion, a housing disposed under an atmospheric pressure environment, and a thin cylindrical can disposed in an electromagnetic gap formed between the rotor portion and the stator portion and secured to the housing so that the stator portion is air-tightly encapsulated in a space formed by the housing and the can. The space is maintained in a depressurized state by a seal.Type: GrantFiled: June 1, 2007Date of Patent: May 31, 2011Assignee: Kabushiki Kaisha Yaskawa DenkiInventors: Takayuki Nakamura, Tadataka Noguchi, Yoshihiro Kusama
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Publication number: 20070280813Abstract: A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being configured to transfer the work by causing a rotational movement of the arm portion by the motor portion. The motor portion comprises a rotor portion connected to the arm portion, a stator portion disposed at an external periphery of the rotor portion, a housing disposed under an atmospheric pressure environment, and a thin cylindrical can disposed in an electromagnetic gap formed between the rotor portion and the stator portion and secured to the housing so that the stator portion is air-tightly encapsulated in a space formed by the housing and the can. The space is maintained in a depressurized state by a seal.Type: ApplicationFiled: June 1, 2007Publication date: December 6, 2007Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Takayuki NAKAMURA, Tadataka NOGUCHI, Yoshihiro KUSAMA
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Patent number: 7129606Abstract: In a vacuuming motor used by being attached to a peripheral edge of a motor attaching hole provided at a vacuum chamber, an end portion on a load side of a motor main body is attached with a reduction gear main body having an attaching flange fixed to the motor attaching hole to interpose an O-ring therebetween and the attaching flange is fixed with vacuum seals and constituted by a resin and brought into contact with an output shaft of the reduction gear main body for partitioning an inner space of the reduction gear main body and the motor main body and an inner space of the vacuum chamber.Type: GrantFiled: September 12, 2003Date of Patent: October 31, 2006Assignee: Kabushiki Kaisha Yaskawa DenkiInventors: Kenichi Tachibana, Tadataka Noguchi, Toshio Omata
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Publication number: 20040061392Abstract: In a vacuuming motor used by being attached to a peripheral edge of a motor attaching hole provided at a vacuum chamber, an end portion on a load side of a motor main body is attached with a reduction gear main body having an attaching flange fixed to the motor attaching hole to interpose an O-ring therebetween and the attaching flange is fixed with vacuum seals and constituted by a resin and brought into contact with an output shaft of the reduction gear main body for partitioning an inner space of the reduction gear main body and the motor main body and an inner space of the vacuum chamber.Type: ApplicationFiled: September 12, 2003Publication date: April 1, 2004Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Kenichi Tachibana, Tadataka Noguchi, Toshio Omata
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Patent number: 5388944Abstract: A wafer loading and unloading chamber is provided at the bottom of a reaction tube of a heat treatment section, a robot chamber and cassette chamber are coupled via gate valves to the wafer loading and unloading chamber, the robot chamber comprises a first load lock chamber while the wafer loading and unloading chamber comprises a second load lock chamber. These first and second load lock chambers are mutually connected by a pressure balancing gas conduit via pressure balancing valves. During heat treatment of the target objects, the wafer loading and unloading chamber and robot chamber are first set to inert gas atmospheres, then the pressure balancing gas conduit valves are opened to balance the pressures of the robot and cassette chambers. Gate valves between these chambers are then opened, and the cassette is conveyed via the robot chamber to a wafer boat in the wafer loading and unloading chamber.Type: GrantFiled: February 4, 1993Date of Patent: February 14, 1995Assignee: Tokyo Electron Tohoku Kabushiki KaishaInventors: Eiichiro Takanabe, Takeo Suzuki, Tadataka Noguchi