Abstract: The liquid source vaporization apparatus comprises a tank inside of which a liquid source is stored, a heater that applies heat to the liquid source in the tank, a plurality of liquid surface detecting bodies wherein each of liquid surface detecting points is arranged in a predetermined height range in the tank with a set height regarded as the reference, a reference detecting body arranged above the predetermined height range in the tank, and a liquid surface discriminator that discriminates whether or not there is the liquid source at the set height on a basis of a threshold value set based on a change in electrical resistance of the reference detecting body and a change in electrical resistance of a plurality of the liquid surface detecting bodies.

Abstract: The present invention is intended to improve response property and accuracy of temperature control of a liquid sample, and is provided with a vaporization tank that retains the liquid sample, one or more heaters that are provided in the vaporization tank and respectively have heating parts that come into contact with the liquid sample to heat the liquid sample, a temperature detection part that is provided in contact with an outer surface including the heating part of any of the heaters and detects a temperature of the outer surface, and a control part that receives a temperature detection signal from the temperature detection part to control electric power supplied to the heaters.

Abstract: The present invention is intended to improve response property and accuracy of temperature control of a liquid sample, and is provided with a vaporization tank that retains the liquid sample, one or more heaters that are provided in the vaporization tank and respectively have heating parts that come into contact with the liquid sample to heat the liquid sample, a temperature detection part that is provided in contact with an outer surface including the heating part of any of the heaters and detects a temperature of the outer surface, and a control part that receives a temperature detection signal from the temperature detection part to control electric power supplied to the heaters.