Abstract: An equipment for inspecting a secondary battery is provided. The equipment includes a loading device on which a secondary battery is loaded in an upright position, and a side portion inspecting device which inspects a side portion of the secondary battery loaded on the loading device, wherein the side portion inspecting device comprises an elevation unit which lifts the secondary battery loaded on the loading device so as to be withdrawn out of the loading device and allows the secondary battery to return to its original position after a first period of time elapses and a side portion inspecting unit which captures an image of the side portion of the secondary battery, which is withdrawn out of the loading device by the elevation unit, thereby inspecting the side portion of the secondary battery.

Abstract: A deposition apparatus including a vaporizer; a chemical supplier; a pipe line coupled between the vaporizer and the chemical supplier; and a solvent supplier coupled to the pipe line. A method of cleaning a deposition apparatus including putting a solvent into a vaporizer; cleaning the vaporizer by impregnating the vaporizer with the solvent; and removing contaminated liquid which remains after cleaning the vaporizer.

Abstract: In a liquid supplying unit liquid is supplied from a buffer vessel to an external unit by pressurizing the liquid present in the buffer vessel using gas supplied to the buffer vessel. A pressure measuring member is provided to measure the pressure inside the buffer vessel, and when the pressure inside the buffer vessel is equal to or greater than a preset reference pressure during refilling of the buffer vessel, gas is discharged from the buffer vessel through a vent line.

Abstract: Embodiments disclosed herein are generally directed to a chemical supplying apparatus, a semiconductor manufacturing equipment having the same and a method for supplying chemicals. The apparatus includes a tank, a first sensor, and a second sensor. The tank is filled with a liquid chemical and includes an outlet for the liquid chemical. The first sensor transmits a signal to a surface of the liquid chemical to detect a level of the liquid chemical within the tank. The probe includes a gap within which the liquid chemical can flow and the second sensor detects whether the liquid chemical are present inside the gap.

Abstract: An apparatus for supplying a chemical solution includes a mother tank storing a chemical solution, an intermediate tank disposed in a higher position than the mother tank with a first height difference (h), and the intermediate tank is adapted to receive a fixed amount of chemical solution from the mother tank. The apparatus further includes a bubbling tank disposed in a higher position than the intermediate tank with a second height difference (h?) and the bubbling tank is adapted to receive the fixed amount of the chemical solution from the intermediate tank.

Abstract: There is provided a WORM type organic optical recording media comprising a recording layer, a reflective layer and a protective layer which are formed in sequence on a substrate, the recording layer consisting of near infrared absorbing dye able to absorb a laser beam and to generate heat and of a thermosetting or photocuring resin. The organic optical recording medium can be prevented from being rewritten by heating up to 50.degree. C. or irradiating with a UV light, said dye being capable of absorbing near infrared rays and generating heat.The medium exhibits stable reading characteristics of at least 45 dB even after irradiating with a light with a short wavelength. In addition, it also has a function of record locking by curing the resin of the recording layer, so that, once recorded, rewrite or additional recording is not allowed therein.