Patents by Inventor Tai-Kweon Lim

Tai-Kweon Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method of sensing leakage of chemical liquid
    Patent number: 7944363
    Abstract: An apparatus and method of sensing leakage of chemical liquid is provided. The apparatus for sensing leakage of chemical liquid, includes a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber, a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal, and an equipment control unit receiving an input of the control signal and controlling an operation of equipment.
    Type: Grant
    Filed: September 16, 2008
    Date of Patent: May 17, 2011
    Assignee: Semes Co., Ltd.
    Inventors: Hee-Suk Kim, Tai-Kweon Lim
  • APPARATUS AND METHOD OF SENSING LEAKAGE OF CHEMICAL LIQUID
    Publication number: 20090091461
    Abstract: An apparatus and method of sensing leakage of chemical liquid is provided. The apparatus for sensing leakage of chemical liquid, includes a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber, a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal, and an equipment control unit receiving an input of the control signal and controlling an operation of equipment.
    Type: Application
    Filed: September 16, 2008
    Publication date: April 9, 2009
    Inventors: Hee-Suk Kim, Tai-Kweon Lim