Patents by Inventor Taichi Koizumi
Taichi Koizumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230345982Abstract: The present invention relates to a seasoning from malted rice used as a raw material containing 0.3 ppm or more of maltol and/or 0.25 ppm or more of methional, and 10% (w/v) or more of glucose.Type: ApplicationFiled: August 18, 2021Publication date: November 2, 2023Inventors: Yusuke Ito, Taichi Koizumi, Takeharu Nakahara, Izumi Kobayashi
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Patent number: 6977133Abstract: A photomask is used for transferring a mask pattern onto a semiconductor substrate. The mask pattern includes a junction at which two line patterns are connected to each other with one line pattern being orthogonal to the other line pattern so as to form a T-shape, or a proximity portion at which two line patterns are located close to each other with one line pattern being substantially orthogonal to the other line pattern so as to form a T-shape. A small pattern is formed on a side edge of the line pattern in the vicinity of the junction or the proximity portion so as to form a wide portion of the line pattern. The small pattern is provided within the range between 0.79 and 1.8 ?/(NA·K) of a distance from the neighboring side edge of the other line pattern, where ? is the wavelength of exposure illumination light, NA is the numerical aperture of a lens used, and K is a transfer reduction ratio.Type: GrantFiled: March 17, 2003Date of Patent: December 20, 2005Assignee: Matsushita Electric Industrial Co., LtdInventors: Taichi Koizumi, Akio Misaka
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Publication number: 20030199124Abstract: A photomask is used for transferring a mask pattern onto a semiconductor substrate. The mask pattern includes a junction at which two line patterns are connected to each other with one line pattern being orthogonal to the other line pattern so as to form a T-shape, or a proximity portion at which two line patterns are located close to each other with one line pattern being substantially orthogonal to the other line pattern so as to form a T-shape. A small pattern is formed on a side edge of the line pattern in the vicinity of the junction or the proximity portion so as to form a wide portion of the line pattern. The small pattern is provided within the range between 0.79 and 1.8 &lgr;/(NA·K) of a distance from the neighboring side edge of the other line pattern, where &lgr; is the wavelength of exposure illumination light, NA is the numerical aperture of a lens used, and K is a transfer reduction ratio.Type: ApplicationFiled: March 17, 2003Publication date: October 23, 2003Applicant: Matsushita Electric Industrial Co., Ltd.Inventors: Taichi Koizumi, Akio Misaka
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Patent number: 5773174Abstract: A first correlation is obtained which is a correlation between latent image height produced after exposure on a resist layer, and resist pattern linewidth for a given length of develop time. Additionally, a second correlation is obtained which is a correlation between develop time for each exposure energy dose and resist pattern linewidth. The height of a latent image produced on an actually exposed resist layer is determined. From the first correlation, an estimated resist pattern linewidth, which is a resist pattern linewidth corresponding to a latent image height and to a given length of develop time, is found. From the second correlation, an estimated exposure energy dose, which is an exposure energy dose corresponding to a given length of develop time and to an estimated resist patten linewidth, is found.Type: GrantFiled: July 9, 1997Date of Patent: June 30, 1998Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Taichi Koizumi, Takahiro Matsuo, Masayuki Endo
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Patent number: 5763124Abstract: A first correlation is obtained which is a correlation between latent image height produced after exposure on a resist layer, and resist pattern linewidth for a given length of develop time. Additionally, a second correlation is obtained which is a correlation between develop time for each exposure energy dose and resist pattern linewidth. The height of a latent image produced on an actually exposed resist layer is determined. From the first correlation, an estimated resist pattern linewidth, which is a resist pattern linewidth corresponding to a latent image height and to a given length of develop time, is found. From the second correlation, an estimated exposure energy dose, which is an exposure energy dose corresponding to a given length of develop time and to an estimated resist pattern linewidth, is found.Type: GrantFiled: July 9, 1997Date of Patent: June 9, 1998Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Taichi Koizumi, Takahiro Matsuo
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Patent number: 5756242Abstract: A first correlation is obtained which is a correlation between latent image height produced after exposure on a resist layer, and resist pattern linewidth for a given length of develop time. Additionally, a second correlation is obtained which is a correlation between develop time for each exposure energy dose and resist pattern linewidth. The height of a latent image produced on an actually exposed resist layer is determined. From the first correlation, an estimated resist pattern linewidth, which is a resist pattern linewidth corresponding to a latent image height and to a given length of develop time, is found. From the second correlation, an estimated exposure energy dose, which is an exposure energy dose corresponding to a given length of develop time and to an estimated resist patten linewidth, is found.Type: GrantFiled: November 13, 1995Date of Patent: May 26, 1998Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Taichi Koizumi, Takahiro Matsuo, Masayuki Endo
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Patent number: 5306601Abstract: Herein is provided a fine pattern forming method which is prevented from the charging-up phenomenon at the time of electric charged beam writing owing to the use of a polyalkylthiophene type conductive polymeric substance or a quaternary ammonium ion type polymeric substance in a monolayer or multilayer resist.Type: GrantFiled: July 19, 1993Date of Patent: April 26, 1994Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Kazuhiko Hashimoto, Taichi Koizumi, Kenji Kawakita, Noboru Nomura
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Patent number: 5275921Abstract: In a pattern forming process using a chemical amplification type resist, a good pattern with high contrast between exposed portions and non-exposed portions due to photobleach of a dye and a large process latitude can be obtained by adding a dye such as Sudan Orange, or a dye having a reducing absorption by exposure to light such as naphthoquinonediazide sulfonic acid ester to a chemical amplification type resist for ultraviolet rays, particularly i-line of 365 nm or ultraviolet rays of 365 nm or less.Type: GrantFiled: March 21, 1991Date of Patent: January 4, 1994Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Taichi Koizumi, Yoshiyuki Tani, Masaru Sasago
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Patent number: 5169494Abstract: The present invention provides a method of forming a fine pattern comprising the steps of forming on a semiconductor substrate an organic polymer film and heat treating it, forming on the organic polymer film an inorganic film and heat treating it, forming on the inorganic film an electron beam resist film and heat treating it, drawing a pattern on the resist film, developing it to form a resist pattern, and etching the inorganic film and the organic polymer film using the resist pattern as a mask, wherein the improvement comprises using one substance selected from the group consisting of a polyphenylene sulfide, a derivative thereof, and a polymer represented by the formula (I): ##STR1## where n is a positive integer, for forming at least one of the organic polymer film and the electron beam resist film.Type: GrantFiled: August 8, 1991Date of Patent: December 8, 1992Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Kazuhiko Hashimoto, Taichi Koizumi, Kenji Kawakita, Noboru Nomura
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Patent number: 5057689Abstract: A scanning electron microscope is disclosed in which an objective lens includes a first pole piece and a second pole piece. The first pole piece is provided with a hole through which an electron beam passes, and is disposed between an electron gun for emitting the electron beam and the second pole piece. The second pole piece has a planar portion on which a specimen is placed, and the second pole piece being mounted on a supporting block movable in a plane substantially perpendicular to the projecting direction of the electron beam.Type: GrantFiled: September 17, 1990Date of Patent: October 15, 1991Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Noboru Nomura, Hideo Nakagawa, Taichi Koizumi, Kenji Harafuji, Mitsuhiro Okuni, Norimichi Anazawa
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Patent number: 5030549Abstract: Provided is a method for forming fine pattern free from shear of pattern caused by charging and high in dry etch resistance by using a high molecular organic film containing an organometallic complex or a metallic salt in single-layer or multi-layer resist process and treating the surface of this film with a reducing agent to form a metallic layer on the surface.Type: GrantFiled: June 26, 1989Date of Patent: July 9, 1991Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Kazuhiko Hashimoto, Taichi Koizumi, Kenji Kawakita, Noboru Nomura
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Patent number: 4976818Abstract: A fine pattern forming method capable of forming an accurate fine pattern without charge-up at the time of electron beam or focus ion beam exposure, by treating the bottom layer or intermediate layer or silicon containing resist of a multi-layer resist with ion shower irradiation or reducing solvent.Type: GrantFiled: April 24, 1990Date of Patent: December 11, 1990Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Kazuhiko Hashimoto, Taichi Koizumi, Kenji Kawakita, Noboru Nomura
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Patent number: 4936951Abstract: A fine pattern forming method capable of forming an accurate fine pattern without charge-up at the time of electron beam or focus ion beam exposure is provided by treating the bottom layer or intermediate layer or silicon containing resist of a multi-layer resist with ion shower irradiation or reducing solvent.Type: GrantFiled: October 26, 1988Date of Patent: June 26, 1990Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Kazuhiko Hashimoto, Taichi Koizumi, Kenji Kawakita, Noboru Nomura