Abstract: There is provided a touch panel that displays an image in which a plurality of functional buttons are arranged. The plurality of buttons include a long-touch button a function of which can be rendered active after the button is continuously touched for a predetermined time period, and attendant on the long-touch button, a count-down signal notifying a time period remaining before a timing at which the function can be rendered active is displayed.

Abstract: There is provided a processing apparatus including a holding table having a holding surface for holding thereon a workpiece with a plurality of devices formed in respective areas demarcated on a face side of the workpiece by a plurality of projected dicing lines, a processing unit that processes the workpiece held on the holding table, an image capturing unit that captures an image of the workpiece held on the holding table, a moving unit that moves the holding table relatively to the processing unit and the image capturing unit in horizontal directions along the holding surface, a touch panel that displays thereon the image captured by the image capturing unit, and a control unit. The control unit detects a line in an image positioned within an allowable region based on a contact line traced on the image displayed on the touch panel and registers the detected line.

Abstract: A voltage application device includes a voltage application circuit. The voltage application circuit applies application voltage between discharge electrode and counter electrode which face each other with a clearance left from each other to generate a discharge. The voltage application device forms discharge path partially and dielectrically broken between discharge electrode and counter electrode when a discharge is generated. Discharge path includes first dielectric breakdown region formed around discharge electrode, and second dielectric breakdown region formed around counter electrode.

Abstract: A control unit of processing apparatus includes a processing condition storing section that stores processing condition data of the processing apparatus and a display control section that causes a display part to display a processing condition screen relating to the processing condition data. The display control section causes the processing condition screen to display function objects that allow identification of functions to be executed on the basis of the processing condition data by the processing apparatus.

Abstract: Voltage application device includes voltage application circuit. Voltage application circuit applies a voltage to load including discharge electrode that holds liquid, voltage application circuit generating discharge in discharge electrode. During a drive period, voltage application circuit periodically changes a magnitude of the voltage applied to load at a drive frequency within a predetermined range including a resonance frequency of liquid, voltage application circuit mechanically vibrating liquid.

Abstract: A discharge device according to the present disclosure includes a discharge electrode and a voltage applicator that applies a voltage to the discharge electrode and thus causes discharge that is further developed from corona discharge at the discharge electrode. The discharge is discharge in which a discharge path is intermittently formed by dielectric breakdown so as to stretch from the discharge electrode to a surrounding. This discharge can be called leader discharge. This makes it possible to increase an amount of generated active component while keeping an increase of ozone small.

Abstract: There is provided a touch panel that displays an image in which a plurality of functional buttons are arranged. The plurality of buttons include a long-touch button a function of which can be rendered active after the button is continuously touched for a predetermined time period, and attendant on the long-touch button, a count-down signal notifying a time period remaining before a timing at which the function can be rendered active is displayed.

Abstract: An electric discharge device according to the present disclosure includes a discharge electrode, a counter electrode, a voltage application circuit, and a liquid supply unit. The discharge electrode is a columnar electrode. The counter electrode faces the discharge electrode. The voltage application circuit applies an application voltage between the discharge electrode and the counter electrode. The liquid supply unit supplies liquid to the discharge electrode. The liquid extends and contracts along a central axis of the discharge electrode by discharge. The counter electrode includes a peripheral electrode part and a projecting electrode part. In a direction along the central axis of the discharge electrode, a tip of the liquid in a state in which the liquid extends is located at the same position as an outer peripheral edge of the peripheral electrode part or located closer to the discharge electrode than the outer peripheral edge.

Abstract: A processing apparatus includes a holding table for holding a workpiece thereon, a processing unit for processing the workpiece held on the holding table, an image capturing unit for capturing an image of the workpiece held on the holding table, and a control unit. The control unit includes a wider image displaying section for combining images of a plurality of adjacent areas that are captured by the image capturing unit into a wider image representing an area wider than the field of vision of the image capturing unit, and displaying the wider image on a display unit, and a target registering section for registering any pattern on each of the devices that is specified in the wider image, as a target for detecting one of the projected dicing lines.

Abstract: A control unit of processing apparatus includes a processing condition storing section that stores processing condition data of the processing apparatus and a display control section that causes a display part to display a processing condition screen relating to the processing condition data. The display control section causes the processing condition screen to display function objects that allow identification of functions to be executed on the basis of the processing condition data by the processing apparatus.

Abstract: An imaging unit of a processing apparatus includes a microscope, and an imaging element connected to the microscope and including a plurality of pixels that capture an image. A control unit has a target pattern storage section that stores a target pattern for performing pattern matching, and a rectilinear region detection section that detects a rectilinear region on the basis of an image from the imaging element, calculates a deviation angle between a direction of the rectilinear region detected by the rectilinear region detection section and a processing feeding direction, and adjusts a relative angle between the target pattern stored in the target pattern storage section and a characteristic pattern on a wafer, to perform the pattern matching.

Abstract: A processing apparatus includes a cutting blade mounted on a spindle, the cutting blade having a cutting edge for cutting a workpiece held on a holding table, a measuring portion for measuring an edge projection amount of the cutting edge at a predetermined frequency, and a data processing portion. The data processing portion includes a lower limit recording portion for recording a lower limit of the edge projection amount of the cutting edge as an allowable limit for use of the cutting blade, a storing portion for storing blade information including the edge projection amount measured by the measuring portion and a cutting distance traveled by the cutting blade at the time of measurement of the edge projection amount.

Abstract: A control unit of a processing apparatus includes an abnormality detecting section configured to detect an abnormality in the processing apparatus, a processing stopping section configured to stop cutting processing by a cutting unit when an abnormality is detected, and a data collecting section configured to collect data related to the processing apparatus, during a standby time period between stopping of the processing and performing of an operation of recovery from the abnormality by an operator.

Abstract: There is provided a processing apparatus including a holding table having a holding surface for holding thereon a workpiece with a plurality of devices formed in respective areas demarcated on a face side of the workpiece by a plurality of projected dicing lines, a processing unit that processes the workpiece held on the holding table, an image capturing unit that captures an image of the workpiece held on the holding table, a moving unit that moves the holding table relatively to the processing unit and the image capturing unit in horizontal directions along the holding surface, a touch panel that displays thereon the image captured by the image capturing unit, and a control unit. The control unit detects a line in an image positioned within an allowable region based on a contact line traced on the image displayed on the touch panel and registers the detected line.

Abstract: A processing apparatus includes a chuck table for holding a workpiece thereon, a processing unit for processing the workpiece held on the chuck table, a touch panel for entering processing conditions, and a control unit for controlling the touch panel. The control unit controls the touch panel to display a plurality of input fields corresponding to a plurality of items included in the processing conditions, and controls the touch panel to display a copy processing key and a paste processing key when one of the input fields is selected. The control unit copies information entered in the selected one of the input fields when the copy processing key is selected, and enters information that has been copied in advance into the selected one of the input fields when the paste processing key is selected.

Abstract: A method of adjusting the brightness of an illuminator in a processing apparatus includes, by a first processing apparatus, storing a sample image obtained by photographing a workpiece with a brightness specified by a first control value, together with the first control value, copying the sample image, the first control value and a processing condition to a second processing apparatus, by the second processing apparatus, storing a plurality of comparative images obtained by photographing the workpiece with brightnesses specified by a plurality of different control values, identifying a control value at a time of photographing a comparative image having a minimum difference in brightness from the sample image as a second control value, by comparing the sample image with the plurality of comparative images, and setting a difference between the first and second control values as a correction value of the control value of the second processing apparatus.

Abstract: A voltage application device includes a voltage application circuit. The voltage application circuit applies application voltage between discharge electrode and counter electrode which face each other with a clearance left from each other to generate a discharge. The voltage application device forms discharge path partially and dielectrically broken between discharge electrode and counter electrode when a discharge is generated. Discharge path includes first dielectric breakdown region formed around discharge electrode, and second dielectric breakdown region formed around counter electrode.