Patents by Inventor Takaharu Koshimizu

Takaharu Koshimizu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conveyor and deposition apparatus, and maintenance method thereof
    Patent number: 8740205
    Abstract: A conveyor and a deposition apparatus, and a maintenance method thereof are disclosed. The conveyor includes a frame; a lower support mechanism for supporting a carrier on which is longitudinally mounted a substrate and for transferring the carrier; and an upper support mechanism for supporting the carrier, in which the frame comprises a lower frame and an upper frame, and in which the lower support mechanism is provided on the lower frame and the upper support mechanism is provided on the upper frame, the upper frame and the lower frame being configured to be separately movable. Therefore, with the rotational movement of the upper frame, it is possible to arrange a cathode member in a space formed above the lower frame. This can make the spacing between the deposition treatment passage and the carrier transfer passage small. As a result, it is possible to make an inner court of the deposition apparatus narrow.
    Type: Grant
    Filed: April 15, 2008
    Date of Patent: June 3, 2014
    Assignee: Ulvac, Inc.
    Inventors: Koji Ishino, Hajime Nakamura, Mayako Matsuda, Takaaki Shindou, Takaharu Koshimizu
  • CONVEYOR AND DEPOSITION APPARATUS, AND MAINTENANCE METHOD THEREOF
    Publication number: 20100126415
    Abstract: A conveyor and a deposition apparatus, and a maintenance method thereof are disclosed. The conveyor includes a frame; a lower support mechanism for supporting a carrier on which is longitudinally mounted a substrate and for transferring the carrier; and an upper support mechanism for supporting the carrier, in which the frame comprises a lower frame and an upper frame, and in which the lower support mechanism is provided on the lower frame and the upper support mechanism is provided on the upper frame, the upper frame and the lower frame being configured to be separately movable. Therefore, with the rotational movement of the upper frame, it is possible to arrange a cathode member in a space formed above the lower frame. This can make the spacing between the deposition treatment passage and the carrier transfer passage small. As a result, it is possible to make an inner court of the deposition apparatus narrow.
    Type: Application
    Filed: April 15, 2008
    Publication date: May 27, 2010
    Applicant: ULVAC, INC.
    Inventors: Koji Ishino, Hajime Nakamura, Mayako Matsuda, Takaaki Shindou, Takaharu Koshimizu