Patents by Inventor Takahide Ikeda
Takahide Ikeda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11976872Abstract: An axial flow fan includes a hub driven to rotate and configured to serve as a rotation axis of the axial flow fan and a blade connected to the hub. The blade has a leading edge and a trailing edge. The trailing edge has an indentation indenting toward the leading edge. The indentation narrows from the trailing edge to the leading edge, and has an apex being a point closest to the leading edge from among the points constituting the indentation. The blade has, at the indentation, a maximum thickness portion at which a thickness of the blade is maximum, and which is positioned radially inside of the apex.Type: GrantFiled: June 25, 2019Date of Patent: May 7, 2024Assignee: Mitsubishi Electric CorporationInventors: Takahide Tadokoro, Katsuyuki Yamamoto, Takashi Ikeda
-
Patent number: 7238582Abstract: The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline silicon layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.Type: GrantFiled: December 1, 2004Date of Patent: July 3, 2007Assignees: Hitachi, Ltd., Hitachi Device Engineering Co., Ltd.Inventors: Hiromi Shimamoto, Takashi Uchino, Takeo Shiba, Kazuhiro Ohnishi, Yoichi Tamaki, Takashi Kobayashi, Toshiyuki Kikuchi, Takahide Ikeda
-
Publication number: 20050101097Abstract: The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline silicon layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.Type: ApplicationFiled: December 1, 2004Publication date: May 12, 2005Inventors: Hiromi Shimamoto, Takashi Uchino, Takeo Shiba, Kazuhiro Ohnishi, Yoichi Tamaki, Takashi Kobayashi, Toshiyuki Kikuchi, Takahide Ikeda
-
Patent number: 6864559Abstract: Disclosed is a semiconductor device, such as a semiconductor memory device, having structure wherein invasion of minority carriers from the semiconductor substrate into components of the device, formed on the substrate, can be avoided. The semiconductor memory device can be an SRAM or DRAM, for example, and includes a memory array and peripheral circuit on a substrate. In one aspect of the present invention, a buried layer of the same conductivity type as that of the substrate, but with a higher impurity concentration than that of the substrate, is provided beneath at least one of the peripheral circuit and memory array. A further region can extend from the buried layer, for example, to the surface of the semiconductor substrate, the buried layer and further region in combination acting as a shield to prevent minority carriers from penetrating to the device elements.Type: GrantFiled: March 4, 2003Date of Patent: March 8, 2005Assignee: Renesas Technology Corp.Inventors: Shinji Nakazato, Hideaki Uchida, Yoshikazu Saito, Masahiro Yamamura, Yutaka Kobayashi, Takahide Ikeda, Ryoichi Hori, Goro Kitsukawa, Kiyoo Itoh, Nobuo Tanba, Takao Watanabe, Katsuhiro Shimohigashi, Noriyuki Homma
-
Patent number: 6835632Abstract: The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline silicon layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.Type: GrantFiled: June 13, 2003Date of Patent: December 28, 2004Assignees: Hitachi, Ltd., Hitachi Device Engineering Co., Ltd.Inventors: Hiromi Shimamoto, Takashi Uchino, Takeo Shiba, Kazuhiro Ohnishi, Yoichi Tamaki, Takashi Kobayashi, Toshiyuki Kikuchi, Takahide Ikeda
-
Patent number: 6740958Abstract: Disclosed is a semiconductor device, such as a semiconductor memory device, having structure wherein invasion of minority carriers from the semiconductor substrate into components of the device, formed on the substrate, can be avoided. The semiconductor memory device can be an SRAM or DRAM, for example, and includes a memory array and peripheral circuit on a substrate. In one aspect of the present invention, a buried layer of the same conductivity type as that of the substrate, but with a higher impurity concentration than that of the substrate, is provided beneath at least one of the peripheral circuit and memory array. A further region can extend from the buried layer, for example, to the surface of the semiconductor substrate, the buried layer and further region in combination acting as a shield to prevent minority carriers from penetrating to the device elements.Type: GrantFiled: April 4, 2002Date of Patent: May 25, 2004Assignee: Renesas Technology Corp.Inventors: Shinji Nakazato, Hideaki Uchida, Yoshikazu Saito, Masahiro Yamamura, Yutaka Kobayashi, Takahide Ikeda, Ryoichi Hori, Goro Kitsukawa, Kiyoo Itoh, Nobuo Tanba, Takao Watanabe, Katsuhiro Shimohigashi, Noriyuki Homma
-
Patent number: 6727152Abstract: A semiconductor device having a field effect transistor formed in a semiconductor layer provided on an insulating layer is provided with a body electrode electrically connected to a channel forming region of the field effect transistor, and a back gate electrode provided below the insulating layer so as to be opposed to the channel forming region of the field effect transistor. A potential for controlling carriers of conduction type opposite to a channel formed in an upper portion of the channel forming region of the field effect transistor is applied to each of the body electrode and the back gate electrode. Thus, the withstand voltage for the drain of the field effect transistor can be increased. It is also possible to stabilize the threshold voltage of the field effect transistor. Furthermore, the threshold voltage of the field effect transistor can be changed in a stable state.Type: GrantFiled: February 28, 2002Date of Patent: April 27, 2004Assignee: Renesas Technology CorporationInventors: Shinichiro Mitani, Takahide Ikeda, Kazutaka Mori, Hisayuki Higuchi
-
Publication number: 20030207544Abstract: The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline silicon layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.Type: ApplicationFiled: June 13, 2003Publication date: November 6, 2003Inventors: Hiromi Shimamoto, Takashi Uchino, Takeo Shiba, Kazuhiro Ohnishi, Yoichi Tamaki, Takashi Kobayashi, Toshiyuki Kikuchi, Takahide Ikeda
-
Publication number: 20030178699Abstract: Disclosed is a semiconductor device, such as a semiconductor memory device, having structure wherein invasion of minority carriers from the semiconductor substrate into components of the device, formed on the substrate, can be avoided. The semiconductor memory device can be an SRAM or DRAM, for example, and includes a memory array and peripheral circuit on a substrate. In one aspect of the present invention, a buried layer of the same conductivity type as that of the substrate, but with a higher impurity concentration than that of the substrate, is provided beneath at least one of the peripheral circuit and memory array. A further region can extend from the buried layer, for example, to the surface of the semiconductor substrate, the buried layer and further region in combination acting as a shield to prevent minority carriers from penetrating to the device elements.Type: ApplicationFiled: March 4, 2003Publication date: September 25, 2003Inventors: Shinji Nakazato, Hideaki Uchida, Yoshikazu Saito, Masahiro Yamamura, Yutaka Kobayashi, Takahide Ikeda, Ryoichi Hori, Goro Kitsukawa, Kiyoo Itoh, Nobuo Tanba, Takao Watanabe, Katsuhiro Shimohigashi, Noriyuki Homma
-
Patent number: 6610569Abstract: The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the polycrystalline first silicon layer has a positive in temperature dependence of resist while the second polycrystalline layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.Type: GrantFiled: August 28, 2000Date of Patent: August 26, 2003Assignees: Hitachi, Ltd., Hitachi Device Engineering Co., Ltd.Inventors: Hiromi Shimamoto, Takashi Uchino, Takeo Shiba, Kazuhiro Ohnishi, Yoichi Tamaki, Takashi Kobayashi, Toshiyuki Kikuchi, Takahide Ikeda
-
Patent number: 6524924Abstract: The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistances while the second polycrystalline layer has a negative temperature dependance of resistance, or vise versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.Type: GrantFiled: July 28, 1998Date of Patent: February 25, 2003Assignees: Hitachi, Ltd., Hitachi Device EngineeringInventors: Hiromi Shimamoto, Takashi Uchino, Takeo Shiba, Kazuhiro Ohnishi, Yoichi Tamaki, Takashi Kobayashi, Toshiyuki Kikuchi, Takahide Ikeda
-
Publication number: 20020153591Abstract: Disclosed is a semiconductor device, such as a semiconductor memory device, having structure wherein invasion of minority carriers from the semiconductor substrate into components of the device, formed on the substrate, can be avoided. The semiconductor memory device can be an SRAM or DRAM, for example, and includes a memory array and peripheral circuit on a substrate. In one aspect of the present invention, a buried layer of the same conductivity type as that of the substrate, but with a higher impurity concentration than that of the substrate, is provided beneath at least one of the peripheral circuit and memory array. A further region can extend from the buried layer, for example, to the surface of the semiconductor substrate, the buried layer and further region in combination acting as a shield to prevent minority carriers from penetrating to the device elements.Type: ApplicationFiled: April 4, 2002Publication date: October 24, 2002Inventors: Shinji Nakazato, Hideaki Uchida, Yoshikazu Saito, Masahiro Yamamura, Yutaka Kobayashi, Takahide Ikeda, Ryoichi Hori, Goro Kitsukawa, Kiyoo Itoh, Nobuo Tanba, Takao Watanabe, Katsuhiro Shimohigashi, Noriyuki Homma
-
Publication number: 20020096718Abstract: A semiconductor device having a field effect transistor formed in a semiconductor layer provided on an insulating layer is provided with a body electrode electrically connected to a channel forming region of the field effect transistor, and a back gate electrode provided below the insulating layer so as to be opposed to the channel forming region of the field effect transistor. A potential for controlling carriers of conduction type opposite to a channel formed in an upper portion of the channel forming region of the field effect transistor is applied to each of the body electrode and the back gate electrode. Thus, the withstand voltage for the drain of the field effect transistor can be increased. It is also possible to stabilize the threshold voltage of the field effect transistor. Furthermore, the threshold voltage of the field effect transistor can be changed in a stable state.Type: ApplicationFiled: February 28, 2002Publication date: July 25, 2002Inventors: Shinichiro Mitani, Takahide Ikeda, Kazutaka Mori, Hisayuki Higuchi
-
Patent number: 6392277Abstract: A semiconductor device having a field effect transistor formed in a semiconductor layer provided on an insulating layer is provided with a body electrode electrically connected to a channel forming region of the field effect transistor, and a back gate electrode provided below the insulating layer so as to be opposed to the channel forming region of the field effect transistor. A potential for controlling carriers of conduction type opposite to a channel formed in an upper portion of the channel forming region of the field effect transistor is applied to each of the body electrode and the back gate electrode. Thus, the withstand voltage for the drain of the field effect transistor can be increased. It is also possible to stabilize the threshold voltage of the field effect transistor. Furthermore, the threshold voltage of the field effect transistor can be changed in a stable state.Type: GrantFiled: May 19, 2000Date of Patent: May 21, 2002Assignee: Hitachi, Ltd.Inventors: Shinichiro Mitani, Takahide Ikeda, Kazutaka Mori, Hisayuki Higuchi
-
Patent number: 6208010Abstract: Disclosed is a semiconductor device, such as a semiconductor memory device, having structure wherein invasion of minority carriers from the semiconductor substrate into components of the device, formed on the substrate, can be avoided. The semiconductor memory device can be an SRAM or DRAM, for example, and includes a memory array and peripheral circuit on a substrate. In one aspect of the present invention, a buried layer of the same conductivity type as that of the substrate, but with a higher impurity concentration than that of the substrate, is provided beneath at least one of the peripheral circuit and memory array. A further region can extend from the buried layer, for example, to the surface of the semiconductor substrate, the buried layer and further region in combination acting as a shield to prevent minority carriers from penetrating to the device elements.Type: GrantFiled: December 18, 1995Date of Patent: March 27, 2001Assignee: Hitachi, Ltd.Inventors: Shinji Nakazato, Hideaki Uchida, Yoshikazu Saito, Masahiro Yamamura, Yutaka Kobayashi, Takahide Ikeda, Ryoichi Hori, Goro Kitsukawa, Kiyoo Itoh, Nobuo Tanba, Takao Watanabe, Katsuhiro Shimohigashi, Noriyuki Homma
-
Patent number: 6133094Abstract: The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.Type: GrantFiled: July 28, 1998Date of Patent: October 17, 2000Assignees: Hitachi Ltd, Hitachi Device Engineering Co.Inventors: Hiromi Shimamoto, Takashi Uchino, Takeo Shiba, Kazuhiro Ohnishi, Yoichi Tamaki, Takashi Kobayashi, Toshiyuki Kikuchi, Takahide Ikeda
-
Patent number: 6063686Abstract: A method of fabricating a semiconductor device is provided wherein a first semiconductor substrate is prepared with a first insulating film formed over a first main surface of the first semiconductor substrate, s semiconductor film of n-type conductivity formed over the first insulating film, and a second insulating film formed over the semiconductor film so as to cover the first main surface. A second semiconductor substrate is also prepared with a third insulating film formed over the second semiconductor substrate. Next, the second insulating film and third insulating films are bonded together by thermal processing to join the first semiconductor substrate and the second semiconductor substrate. A portion of a second main surface of said first semiconductor substrate, opposite to said first main surface of the first semiconductor substrate is then removed to expose a portion of the first semiconductor substrate, thereby providing a semiconductor layer.Type: GrantFiled: February 13, 1998Date of Patent: May 16, 2000Inventors: Hiroo Masuda, Hisako Sato, Takahide Nakamura, Katsumi Tsuneno, Kimiko Aoyama, Takahide Ikeda, Nobuyoshi Natsuaki, Shinichiro Mitani
-
Patent number: 5793097Abstract: The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.Type: GrantFiled: August 24, 1995Date of Patent: August 11, 1998Assignees: Hitachi, Ltd., Hitachi Device Engineering Company, Ltd.Inventors: Hiromi Shimamoto, Takashi Uchino, Takeo Shiba, Kazuhiro Ohnishi, Yoichi Tamaki, Takashi Kobayashi, Toshiyuki Kikuchi, Takahide Ikeda
-
Patent number: 5726488Abstract: A semiconductor device has a well region formed in the surface of a substrate, and has functional portions such as MOSFET and bipolar transistor formed in the well region. The carrier concentration profile of the well region assumes the shape of a valley in the direction of depth thereof, and a minimum point thereof has a concentration of smaller than 5.times.10.sup.15 cm.sup.-3 and is located at a position within 1.6 .mu.m from the surface of the substrate. Preferably, the minimum point should have a concentration of greater than 5.times.10.sup.14 cm.sup.-3 but smaller than 5.times.10.sup.15 cm.sup.-3, and more preferably a concentration of greater than 1.times.10.sup.15 cm.sup.-3 but smaller than 5.times.10.sup.15 cm.sup.-3.Type: GrantFiled: May 16, 1994Date of Patent: March 10, 1998Assignee: Hitachi, Ltd.Inventors: Atsuo Watanabe, Yoshiaki Yazawa, Atsushi Hiraishi, Masataka Minami, Takahiro Nagano, Takahide Ikeda, Naohiro Momma
-
Patent number: 5672897Abstract: An improved arrangement is provided for forming a bipolar transistor on a substrate with CMOS elements. All of the transistors (i.e., the bipolar, P-MOS and N-MOS) are formed in regions having gradually decreasing impurity concentrations from the surface toward the substrate. In addition, a buried layer is provided under each of the regions of decreasing impurity concentration in which the transistors are formed. These buried layers have a significantly higher impurity concentration than the portion of the region of decreasing impurity concentration which they are respectively adjacent to. Using this arrangement, punch-through is prevented and excellent electrical operating characteristics are provided for both the bipolar transistors and the CMOS elements.Type: GrantFiled: June 5, 1995Date of Patent: September 30, 1997Assignee: Hitachi, Ltd.Inventors: Atsuo Watanabe, Takahide Ikeda, Kiyoshi Tsukuda, Mitsuru Hirao, Touji Mukai, Tatsuya Kamei