Patents by Inventor Takahide Kamiyama

Takahide Kamiyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support structure and exposure apparatus
    Publication number: 20100171022
    Abstract: A support structure supports support objects. The support structure comprises a resonance apparatus that resonates with air vibrations transmitted from the exterior to damp the air vibrations.
    Type: Application
    Filed: July 24, 2009
    Publication date: July 8, 2010
    Applicant: NIKON CORPORATION
    Inventors: Norihiko Fujimaki, Takahide Kamiyama, Hideaki Sakamoto
  • Deformation measuring apparatus, exposure apparatus, jig for the deformation measuring apparatus, position measuring method and device fabricating method
    Publication number: 20100165309
    Abstract: A piezoelectric device is provided at a base member. Regulating apparatus is provided that regulate, of deformations transmitted via the base member to the piezoelectric device, the transmission of a deformation in second directions, which intersect first directions.
    Type: Application
    Filed: July 10, 2009
    Publication date: July 1, 2010
    Applicant: NIKON CORPORATION
    Inventors: Takahide Kamiyama, Norihiko Fujimaki