Abstract: A gas treatment method includes: a process (a) of allowing gas to be treated in which a target substance to be treated is mixed with air to pass through inside a housing, the target substance to be treated exhibiting volatility at room temperature and belonging to at least one substance selected from a group consisting of carbon compounds, nitrogen compounds, and sulfur compounds; a process (b) of introducing ozone into a space through which the gas to be treated flows inside the housing at 200° C. or lower; a process (c) of stirring the gas to be treated after the process (b); and a process (d) of heating the gas to be treated to 300° C. or higher after executing the process (c).

Abstract: A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.

Abstract: An extreme ultraviolet light source device includes a raw material supplying mechanism. The raw material supplying mechanism includes a disk-shaped rotor, a motor for causing the rotor to rotate, a cover-shaped structure surrounding the rotor via a gap, and a first reservoir provided inside the cover-shaped structure for reserving a liquid high temperature plasma raw material. When the rotor rotates, a portion of the surface on the rotor becomes coated with the liquid high temperature plasma raw material. A portion of the cover-shaped structure has an aperture exposing that surface of the rotor which coated with the high temperature plasma raw material. The high temperature plasma raw material is irradiated with an energy beam from an energy beam supply device through the aperture, and generates EUV radiation.

Abstract: An extreme ultraviolet light source device includes a raw material supplying mechanism. The raw material supplying mechanism includes a disk-shaped rotor, a motor for causing the rotor to rotate, a cover-shaped structure surrounding the rotor via a gap, and a first reservoir provided inside the cover-shaped structure for reserving a liquid high temperature plasma raw material. When the rotor rotates, a portion of the surface on the rotor becomes coated with the liquid high temperature plasma raw material. A portion of the cover-shaped structure has an aperture exposing that surface of the rotor which coated with the high temperature plasma raw material. The high temperature plasma raw material is irradiated with an energy beam from an energy beam supply device through the aperture, and generates EUV radiation.

Abstract: An extreme ultraviolet light source device includes a raw material supplying mechanism. The raw material supplying mechanism includes a disk-shaped rotor, a motor for causing the rotor to rotate, a cover-shaped structure surrounding the rotor via a gap, and a first reservoir provided inside the cover-shaped structure for reserving a liquid high temperature plasma raw material. When the rotor rotates, a portion of the surface on the rotor becomes coated with the liquid high temperature plasma raw material. A portion of the cover-shaped structure has an aperture exposing that surface of the rotor which coated with the high temperature plasma raw material. The high temperature plasma raw material is irradiated with an energy beam from an energy beam supply device through the aperture, and generates EUV radiation.

Abstract: An extreme ultraviolet light source device includes a raw material supplying mechanism. The raw material supplying mechanism includes a disk-shaped rotor, a motor for causing the rotor to rotate, a cover-shaped structure surrounding the rotor via a gap, and a first reservoir provided inside the cover-shaped structure for reserving a liquid high temperature plasma raw material. When the rotor rotates, a portion of the surface on the rotor becomes coated with the liquid high temperature plasma raw material. A portion of the cover-shaped structure has an aperture exposing that surface of the rotor which coated with the high temperature plasma raw material. The high temperature plasma raw material is irradiated with an energy beam from an energy beam supply device through the aperture, and generates EUV radiation.

Abstract: A method for controlling a discharge plasma-based radiation source for stabilizing a radiation dose emitted in a pulsed manner is disclosed. A calibration function is determined from a relationship between values of an input quantity and values of an operating parameter of the source by applying different values of the input quantity to the source. Reference value selected from the values of the operating parameter is brought about during a pulse of the source. The value of a test quantity is acquired at each pulse. Any quantity influencing the emitted radiation dose can be selected as test quantity. A statistical value is formed from a defined quantity of values of the test quantity. A deviation between the statistical value and the reference value is determined. A result of a comparison of the deviation with a predefined tolerance range determines whether the method is repeated.

Abstract: A method for controlling a discharge plasma-based radiation source for stabilizing a radiation dose emitted in a pulsed manner is disclosed. A calibration function is determined from a relationship between values of an input quantity and values of an operating parameter of the source by applying different values of the input quantity to the source. Reference value selected from the values of the operating parameter is brought about during a pulse of the source. The value of a test quantity is acquired at each pulse. Any quantity influencing the emitted radiation dose can be selected as test quantity. A statistical value is formed from a defined quantity of values of the test quantity. A deviation between the statistical value and the reference value is determined. A result of a comparison of the deviation with a predefined tolerance range determines whether the method is repeated.

Abstract: The lamp lighting circuit prevents a malfunction in which a lamp is tuned on momentarily during an initial stage of the power input. When the power source is lit, the malfunction prevention circuit prevents the activation of the oscillation circuit and/or the driving circuit 3a until when the output control circuit 5 starts normal operation and outputs the output control signal that controls the lighting/non-lighting of the lamp. When a lamp lighting command is input to the output control circuit, the output of the oscillation circuit is transmitted to the power control element via a driving circuit, and the power control element is driven. Consequently a voltage is generated on the secondary side coil of a boosting transformer so that the lamp 1 is lit.

Abstract: An external electrode type discharge lamp comprises a glass tube enclosing rare gas, a first electrode having a first end portion and a second electrode having a second end portion disposed on an surface of the glass tube in an axis direction the glass tube, wherein while the first end portion of the first electrode does not face the second electrode, the second end portion of the second electrode 2b does not face the first electrode.

Abstract: When a control unit is operated by a lighting control signal, when a reference voltage source unit outputs the reference voltage, voltage inputted into an error amplifier from a time constant circuit increases gradually with passage of time so as to reach the reference voltage. The error amplifier compares the voltage, which gradually increases with a power to be impressed to a lamp. An inverter circuit controls power to be supplied to the lamp according to the error signal. Thereby, the lamp power is controlled at time immediately after the lamp lighting signal is inputted. In addition, by providing a thermo-sensitive element for detecting circumference environmental temperature, it is possible to reduce influence to the light intensity due to the circumference environmental temperature. Further, the time constant circuit and the thermo-sensitive element may be provided in the detecting circuit.

Abstract: When a control unit is operated by a lighting control signal, when a reference voltage source unit outputs the reference voltage, voltage inputted into an error amplifier from a time constant circuit increases gradually with passage of time so as to reach the reference voltage. The error amplifier compares the voltage, which gradually increases with a power to be impressed to a lamp. An inverter circuit controls power to be supplied to the lamp according to the error signal. Thereby, the lamp power is controlled at time immediately after the lamp lighting signal is inputted. In addition, by providing a thermo-sensitive element for detecting circumference environmental temperature, it is possible to reduce influence to the light intensity due to the circumference environmental temperature. Further, the time constant circuit and the thermo-sensitive element may be provided in the detecting circuit.

Abstract: An image reader of the stepping image reading type, by time division using a fluorescent lamp using a dielectric barrier discharge, in which for each divided image uniform lamp emission is always enabled and which can react advantageously especially when the image read rate increases is achieved by providing an image reader having a lighting part with a fluorescent lamp which use a dielectric barrier discharge and produces pulse emission and an inverter circuit which feeds this fluorescent lamp; a CCD line sensor which continuously receives the reflection light reflected by a manuscript and emitted by this fluorescent lamp, time-divided; and a controller which resets a divided image which is recognized by this CCD line sensor and which controls the timing of the start of recognition of the next divided image and which sends this timing signal to the inverter circuit as well, where the controller, within a given time in which the CCD line sensor recognizes a divided image of the manuscript, sends a flashing si

Abstract: A lighting apparatus comprising a branch circuit wherein a light receiving cycle signal branches into a synchronizing signal and a light controlling signal, a frequency recognizing circuit which wherein a lighting frequency is calculated from the light controlling signal and a light intensity controlling signal is outputted, and an inverter circuit which receives the light intensity controlling signal and turns on a lamp based on the light intensity controlling signal.

Abstract: The lamp lighting circuit prevents a malfunction in which a lamp is tuned on momentarily during an initial stage of the power input. When the power source is lit, the malfunction prevention circuit prevents the activation of the oscillation circuit and/or the driving circuit 3a until when the output control circuit 5 starts normal operation and outputs the output control signal that controls the lighting/non-lighting of the lamp. When a lamp lighting command is input to the output control circuit, the output of the oscillation circuit is transmitted to the power control element via a driving circuit, and the power control element is driven. Consequently a voltage is generated on the secondary side coil of a boosting transformer so that the lamp 1 is lit.

Abstract: A rare gas discharge lamp lighting apparatus has a power supply, a transformer, a switching element which is in series connected to the power supply and a primary side of the transformer, a rare gas discharge lamp connected on a secondary side of the transformer, and an input terminal for inputting a lamp lighting signal, a controlling circuit for outputting a controlling signal to the switching circuit by calculating at least one of output voltage, output current and output power, and an operating voltage input terminal to which voltage is impressed to initiate an operation of the controlling circuit based on the lamp lighting signal, wherein a delay element is provided between the input terminal and the operating voltage input terminal.

Abstract: A lighting apparatus comprising a branch circuit wherein a light receiving cycle signal branches into a synchronizing signal and a light controlling signal, a frequency recognizing circuit which wherein a lighting frequency is calculated from the light controlling signal and a light intensity controlling signal is outputted, and an inverter circuit which receives the light intensity controlling signal and turns on a lamp based on the light intensity controlling signal.

Abstract: A device for operating a dielectric barrier discharge lamp in which not only the efficiency is maintained, but in which a reduction of the irradiance over the course of use is advantageously prevented. The device includes a dielectric barrier discharge lamp and a feed device for applying a high voltage to this dielectric barrier discharge lamp, wherein the feed device via a set-up transformer applies a high voltage with an essentially periodic waveform to the barrier discharge lamp. Moreover, the applied high voltage first produces a steep rising waveform and then ringing, wherein the ratio of the difference between a second extreme value point and a third extreme value point to the difference between a first extreme value point and the second extreme value point of the ringing is less than or equal to 30%. It is a further object of an embodiment of the present invention to reduce or eliminate the ringing.

Abstract: A rare gas discharge lamp lighting apparatus has a power supply, a transformer, a switching element which is in series connected to the power supply and a primary side of the transformer, a rare gas discharge lamp connected on a secondary side of the transformer, and an input terminal for inputting a lamp lighting signal, a controlling circuit for outputting a controlling signal to the switching circuit by calculating at least one of output voltage, output current and output power, and an operating voltage input terminal to which voltage is impressed to initiate an operation of the controlling circuit based on the lamp lighting signal, wherein a delay element is provided between the input terminal and the operating voltage input terminal.

Abstract: A light source device for a dielectric barrier discharge lamp including a dielectric barrier discharge lamp having a discharge space, the discharge space being filled with a discharge gas which produces excimers by a dielectric barrier discharge; first and second electrodes, a dielectric positioned between at least one of the first and second electrodes for inducing a discharge in the discharge gas, and a feed device for applying an essentially periodic AC high voltage to the first and second electrodes of the dielectric barrier discharge lamp. The feed device includes a setting mechanism for adjusting both the control frequency of the essentially periodic AC high voltage and the amplitude of the essentially periodic AC high voltage in accordance with a set control frequency.