Abstract: A physical quantity measurement device includes a physical quantity measurement sensor and a metal block that is a holding member that includes block surfaces that serve as a plurality of holding portions for holding the physical quantity measurement sensor, and the block surface has a groove formed in a region facing the physical quantity measurement sensor.

Abstract: A physical quantity detection device which made of a quartz crystal substrate having a plane including a Z?-axis and a Y?-axis, includes a base, a movable portion connected to the base, a physical quantity detection element connected to the base and the movable portion and detecting a physical quantity, and a supporter connected to the base and provided in a region opposite to the base side, and an outer edge of an inner side of a surface of a connection region to which the first portion along the Y?-axis and the second portion along an +X-direction of an X-axis includes a corner portion inclined with respect to the X-axis and 25°??1?35° is satisfied, where ?1 is an inclination angle of the corner portion with respect to the X-axis.

Abstract: A substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section; a first gap portion having a protrusion portion in which one of the movable section and the arm portion protrudes toward the other of the movable section and the arm portion, and having a predetermined gap between the protrusion portion on one side and the other of the movable section and the support portion; and a second gap portion which is located further toward the base section side than the first gap portion has a gap wider than the predetermined gap, in which in the first gap portion, one of the movable section and the arm portion has a ridge portion on the side facing the first gap portion.

Abstract: A physical quantity measurement device includes a physical quantity measurement sensor and a metal block that is a holding member that includes block surfaces that serve as a plurality of holding portions for holding the physical quantity measurement sensor, and the block surface has a groove formed in a region facing the physical quantity measurement sensor.

Abstract: A resonator device includes a base including a fixed section and a movable section connected to the fixed section, a resonator element including a first base section, a second base section, and a vibration arm, one end of which is connected to the first base section and the other end of which is connected to the second base section, the first base section being fixed to the fixed section and the second base section being fixed to the movable section, a weight section connected onto the movable section, and a stress relaxing section provided between a connection region of the weight section and the vibration arm.

Abstract: A substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section; a first gap portion having a protrusion portion in which one of the movable section and the arm portion protrudes toward the other of the movable section and the arm portion, and having a predetermined gap between the protrusion portion on one side and the other of the movable section and the support portion; and a second gap portion which is located further toward the base section side than the first gap portion has a gap wider than the predetermined gap, in which in the first gap portion, one of the movable section and the arm portion has a ridge portion on the side facing the first gap portion.

Abstract: A resonator device includes a base including a fixed section and a movable section connected to the fixed section, a resonator element including a first base section, a second base section, and a vibration arm, one end of which is connected to the first base section and the other end of which is connected to the second base section, the first base section being fixed to the fixed section and the second base section being fixed to the movable section, a weight section connected onto the movable section, and a stress relaxing section provided between a connection region of the weight section and the vibration arm.

Abstract: A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

Abstract: An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.

Abstract: An acceleration detector includes: a plate-like flexible portion which has piezoelectricity and can flex by an inertial force (base portion, joint portion, moving portion); an acceleration detection element loaded on a main surface of the base portion and the moving portion; an electrically conductive mass portion loaded on the moving portion; and a package accommodating the base portion, the joint portion, the moving portion, the acceleration detection element and the mass portion. The acceleration detection element is provided with wirings through which detected acceleration is taken out as an electrical signal, and the mass portion can be maintained at a desired electric potential.

Abstract: A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

Abstract: An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.

Abstract: A vibratory sensor includes a resonator element including (i) a first base portion and a second base portion, each ot the first and the second base portions having an upper main surface and a lower main surface, (ii) a resonating arm extended in a beam shape between the first and the second base portions to be vibrated at a predetermined resonance frequency, (iii) a first narrow portion formed by reducing a width of a portion extended from the first base portion to be smaller than a width of the first base portion in a direction orthogonal to an extending direction of the resonating arm, (iv) a second narrow portion formed by reducing a width of a portion extended from the second base portion to be smaller than a width of the second base portion in the direction orthogonal to the extending direction of the resonating arm, (v) a first support portion extended from the first narrow portion in a direction opposite to the first base portion, and (vi) a second support portion extended from the second narrow portio

Abstract: A vibratory sensor includes a resonator element including (i) a first base portion and a second base portion, each of the first and the second base portions having an upper main surface and a lower main surface, (ii) a resonating arm extended in a beam shape between the first and the second base portions to be vibrated at a predetermined resonance frequency, (iii) a first narrow portion formed by reducing a width of a portion extended from the first base portion to be smaller than a width of the first base portion in a direction orthogonal to an extending direction of the resonating arm, (iv) a second narrow portion formed by reducing a width of a portion extended from the second base portion to be smaller than a width of the second base portion in the direction orthogonal to the extending direction of the resonating arm, (v) a first support portion extended from the first narrow portion in a direction opposite to the first base portion, and (vi) a second support portion extended from the second narrow portio