Abstract: A dynamic quantity sensor includes a force receiving portion, a first movable portion that rotates in a first rotational direction around a first rotational axis according to dynamic quantity in a first direction that the force receiving portion receives, and rotates in the first rotational direction around the first rotational axis according to dynamic quantity in a second direction different from the first direction that the force receiving portion receives; and a second movable portion that rotates in a second rotational direction around a second rotational axis according to the dynamic quantity in the first direction that the force receiving portion receives, and rotates in an opposite direction to the second rotational direction around the second rotational axis according to the dynamic quantity in the second direction that the force receiving portion receives.

Abstract: A retro-focus type imaging-optical system is disclosed. The imaging-optical system comprises, in order from an object side to an image side a first lens group, an aperture stop, and a second lens group. The first lens group includes, in order from the object side, a positive first F lens group and a negative first R lens group. The first F lens group includes a positive meniscus lens having a convex surface on the object side. The first R lens group includes a negative meniscus lens having a convex surface on the object side and a positive lens. The second lens group includes, in order from the object side, a positive second F lens group and a second R lens group, and the second F lens group includes a positive lens element having a convex meniscus shape on the image side.

Abstract: An imaging optical system including, in order from an object side to an image side, a first lens group having a negative refractive power, an aperture stop, a second lens group having a positive refractive power, is provided. The first lens group includes in order from the object side a first lens having a positive refractive power and a meniscus shape turning a convex surface to the object side, a second lens having a negative refractive power, and a third lens having a positive refractive power. A lens surface positioned closest to the image side in the first lens group is a concave surface to the image side, and a lens surface positioned closest to the object side in the second lens group is a concave surface to the object side.

Abstract: A semiconductor device includes a first interconnect, a porous dielectric layer formed over the first interconnect, a second interconnect buried in the porous dielectric layer and electrically connected to the first interconnect, and a carbon-containing metal film that is disposed between the porous dielectric layer and the second interconnect and isolates these layers.

Abstract: A getting-on/off determination apparatus determines rider's getting-on/off for an inverted two-wheel vehicle that travels while maintaining the inverted state. The getting-on/off determination apparatus includes an optical fiber laid in a step portion that a rider gets on/off, a light emitting unit that emits detection light and is connected to one end of the optical fiber, a light receiving unit that receives the detection light emitted from the light emitting unit and is connected to another end of the optical fiber, at least one transmitted light varying portion that varies an amount of transmitted light of the detection light passing through the optical fiber in conjunction with a vertical displacement of the step portion that occurs when the rider gets on/off the inverted two-wheel vehicle, and a determination unit that determines getting-on/off of the rider based on an amount of the detection light received by the light receiving unit.

Abstract: A zoom lens includes a first lens group having a positive refractive power, a second lens group having a negative refractive power, an aperture stop, a third lens group having a positive refractive power, and a fourth lens group having a positive refractive power, which are disposed in order from an object side. The first lens group has a negative lens and a positive lens having a convex surface at an object side, which are disposed in order from the object side. An interval between the first lens group and the second lens group is increased and an interval between the second lens group and the third lens group is decreased when changing a magnification of the zoom lens from a wide angle end to a telephoto end. The first lens group and the third lens group are moved from positions at the wide angle end toward positions, which are at object sides thereof, at the telephoto end, respectively.

Abstract: In a rotary electric machine, wound wires are connected to a first terminal and a second terminal. Circuit terminals that are configured from a conductive metal other than aluminum, and the first terminal and the second terminal that are configured from a metal with a principal component of aluminum are joined together inside a circuit chamber that has high water resistant properties. Corrosion is accordingly suppressed at join sites of the circuit terminals with the first terminal and the second terminal. There is therefore no need to coat the join sites with for example a sealing material in order to suppress corrosion at the join sites. Good electrical continuity is accordingly enabled between the circuit terminals and the wound wires whilst suppressing an increase in costs, even when the wound wire is configured from a metal with a principal component of aluminum.

Abstract: Provided is a technique for packaging a sensor structure having a contact sensing surface and a signal processing LSI that processes a sensor signal. The sensor structure has the contact sensing surface and sensor electrodes. The signal processing integrated circuit is embedded in a semiconductor substrate. The sensor structure and the semiconductor substrate are bonded by a bonding layer, forming a sensor device as a single chip. The sensor electrodes and the integrated circuit are sealed inside the sensor device, and the sensor electrodes and external terminals of the integrated circuit are led out to the back surface of the semiconductor substrate through a side surface of the semiconductor substrate.

Abstract: An image forming lens including an aperture stop, a first lens group, and a second lens group having a positive power, the first lens group including a first F lens group having a negative power and a first R lens group having a positive power, the first F lens group including at least two negative lenses, the first R lens group including at least one positive lens, the second lens group including a second F lens group having a positive power and a second R lens group, the second F lens group including a first positive lens, a first negative lens, a second negative lens, and a second positive lens, and the second R lens group including at least one lens.

Abstract: An imaging optical system, includes: in the order from an object side to an image plane side, a first lens group having a first lens which is formed as a negative lens; a second lens group having a second lens which is formed as a plano-concave lens, a third lens which is formed as a negative meniscus lens, and a fourth lens which is formed as a biconvex lens; an aperture stop; a third lens group having a fifth lens which is formed as a biconvex lens, and a sixth lens which is formed as a biconcave lens; and a fourth lens group having a seventh lens which is formed as a negative meniscus lens.

Abstract: A dynamic quantity sensor includes a force receiving portion, a first movable portion that rotates in a first rotational direction around a first rotational axis according to dynamic quantity in a first direction that the force receiving portion receives, and rotates in the first rotational direction around the first rotational axis according to dynamic quantity in a second direction different from the first direction that the force receiving portion receives; and a second movable portion that rotates in a second rotational direction around a second rotational axis according to the dynamic quantity in the first direction that the force receiving portion receives, and rotates in an opposite direction to the second rotational direction around the second rotational axis according to the dynamic quantity in the second direction that the force receiving portion receives.

Abstract: The present invention provides a drawing apparatus for performing drawing on a substrate using a plurality of charged particle beams, the apparatus including an aperture array including an opening region including a region in which a plurality of openings are formed to generate the plurality of charged particle beams, and a peripheral region surrounding the opening region, wherein the aperture array has a shielding structure for shielding at least part of an electric field generated by charging of a contaminant in the peripheral region with respect to the plurality of charged particle beams passing through the plurality of openings.

Abstract: An exposure apparatus which projects exposure light from a pattern of an illuminated original onto a substrate, comprises a projection system including an optical element and configured to project the exposure light onto the substrate, an enclosure configured to enclose the projection system, and a cleaning mechanism configured to clean the optical element by irradiating the optical element with ultraviolet light under an environment in which oxygen is present within the enclosure, the cleaning mechanism including a light source configured to generate ultraviolet light, a tubular member including an exit window and configured to partially enclose an optical path between the light source and the optical element, and a regulating device configured to regulate an environment of a space inside the tubular member so that a partial pressure of oxygen becomes lower in the space inside the tubular member than in a space which is outside the tubular member.

Abstract: The present invention provides an exposure apparatus for exposing a shot on a substrate to first pulsed light, the apparatus including an optical element for guiding the first pulsed light to the substrate, an irradiation device configured to irradiate the optical element with second pulsed light having an infrared wavelength which the first pulsed light has less than the second pulsed light has, and a controller configured to control the irradiation device in a process of exposing the shot to the first pulsed light plural times, such that the irradiation device irradiates the optical element with the second pulsed light during at least one period of non-irradiation periods in which the shot is not irradiated with the first pulsed light.

Abstract: Provided are multiple normal stress detection sensor units capable of detecting a normal stress, and a sheet layer portion. The sheet layer portion includes an exterior sheet layer portion, a force detection sheet layer portion incorporating normal stress detection units, and an intermediary layer sandwiched between the exterior sheet layer portion and the force detection sheet layer portion. The exterior sheet layer portion and the force detection sheet layer portion include multiple protrusions protruding in directions opposed to each other, and are disposed such that the protrusions engage each other with the intermediary layer interposed therebetween. Each normal stress detection sensor unit includes a central portion detection sensor device disposed immediately below a central portion of the protrusion provided on the force detection sheet portion, and at least two edge detection sensor devices disposed immediately below edge portions of the protrusion provided on the force detection sheet portion.

Abstract: A semiconductor device includes: a first porous layer that is formed over a substrate and includes a SiO2 skeleton; a second porous layer that is formed immediately above the first porous layer and includes a SiO2 skeleton; a via wiring that is provided in the first porous layer; and a trench wiring that is buried in the second porous layer. The first porous layer has a pore density x1 of 40% or below and the second porous layer has a pore density x2 of (x1+5) % or above.

Abstract: An energy beam drawing apparatus includes a member, positioned between an energy beam source and a substrate, on which a deposit is deposited and a removing unit which removes the deposit. The removing unit includes a catalyst for generating, from a gas, an active species for decomposing the deposit by irradiation with the energy beam, a supplying mechanism for supplying the gas to a position where the active species is generated, and a moving mechanism for moving, when executing processing of removing the deposit, the catalyst to a first position which is irradiated with the energy beam, and moving, when executing drawing processing on the substrate, the catalyst to a second position which is not irradiated with the energy beam.

Abstract: An image forming lens including an aperture stop, a first lens group, and a second lens group having a positive power, the first lens group including a first F lens group having a negative power and a first R lens group having a positive power, the first F lens group including at least two negative lenses, the first R lens group including at least one positive lens, the second lens group including a second F lens group having a positive power and a second R lens group, the second F lens group including a first positive lens, a first negative lens, a second negative lens, and a second positive lens, and the second R lens group including at least one lens.

Abstract: A porous silica precursor composition is herein provided and the precursor composition comprises an organic silane represented by the following chemical formula 1: R1m(R2—O)4-mSi (in the formula, R1 and R2 may be the same or different and each represent an alkyl group, and m is an integer ranging from 0 to 3); water; an alcohol; and a quaternary ammonium compound represented by the following chemical formula 2: R3N(R4)3X (in the formula, R3 and R4 may be the same or different and each represent an alkyl group and X represents a halogen atom). The composition is prepared by a method comprising the step of blending the foregoing components. The porous silica precursor composition is coated on a substrate and then fired to thus form a porous silica film. Also disclosed herein include a semiconductor element, an apparatus for displaying an image and a liquid crystal display, each having the foregoing porous silica film.

Abstract: To provide an illumination device in which a point light source and a reflective member based on a light weight, cheap resin material is used, the illumination device has high precision and is strong to environmental variations when in a state assembled as a unit and is easily moldable as a part, a plurality of point light sources (111) is arrayed, a first reflective member (112b, 112c, 112d) is disposed along an outgoing direction of light of the point light sources, a second reflective member (112e) is disposed in a surface opposed to a light emitting surface of the point light source in an orthogonal direction, the point light sources are moved integrally with a part or a whole of the first and the second reflective member, the illumination device irradiates an irradiation surface by light from the point light sources, rib shaped bodies (112a) are disposed in a light passageway side of the first reflective member, the rib shaped bodies includes a reflective surface and is situated at a position of an appro