Patents by Inventor Takahiro ONUMA

Takahiro ONUMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230335392
    Abstract: In accordance with some embodiments herein, methods and apparatuses for flowable deposition of thin films are described. Some embodiments relate to cyclical processors for gap-fill in which deposition is followed by a thermal anneal and ultraviolet treatment and repeated. In some embodiments, the deposition, thermal anneal, and ultraviolet treatment are carried out in separate stations. In some embodiments, a second station is heated to a higher temperature than a first station. In some embodiments, a separate module is used for curing.
    Type: Application
    Filed: April 13, 2023
    Publication date: October 19, 2023
    Inventors: Shinya Yoshimoto, Jhoelle Roche Guhit, Makoto Igarashi, Hideaki Fukuda, Aurelie Kuroda, Timothee Blanquart, Takahiro Onuma
  • Publication number: 20230195022
    Abstract: An apparatus is configured to obtain operating information related to an operation amount of an image forming apparatus through the communication circuit, obtain another operating information related to another operation amount of another image forming apparatus located in a same installation location at which the image forming apparatus is located, determine, based on the operating information and the another operating information, a replacement timing for replacing a consumable component used in the image forming apparatus, and output the replacement timing.
    Type: Application
    Filed: December 9, 2022
    Publication date: June 22, 2023
    Inventors: KATSUHIDE KOGA, TAKAHIRO ONUMA
  • Publication number: 20220122841
    Abstract: Methods and systems for manufacturing a structure comprising a substrate are provided herein. In some embodiments, the substrate comprises a plurality of recesses. The recesses may be at least partially filled with a gap filling fluid. The gap filling fluid may comprise an Si—N bond.
    Type: Application
    Filed: October 18, 2021
    Publication date: April 21, 2022
    Inventors: Timothee Blanquart, Takahiro Onuma, Shinya Yoshimoto, Charles Dezelah, Jihee Jeon
  • Publication number: 20220119944
    Abstract: In accordance with some embodiments herein, methods and apparatuses for flowable deposition of thin films are described. Some embodiments herein relate to cyclical processes for gap-fill in which deposition is followed by a thermal anneal and repeated. In some embodiments, the deposition and thermal anneal are carried out in separate station. In some embodiments second module is heated to a higher temperature than the first station. In some embodiments, the thermal anneal comprises RTA.
    Type: Application
    Filed: October 18, 2021
    Publication date: April 21, 2022
    Inventors: Shinya Yoshimoto, Takahiro Onuma, Makoto Igarashi, Yukihiro Mori, Hideaki Fukuda, Rene Henricus Jozef Vervuurt, Timothee Blanquart
  • Patent number: 10793946
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Grant
    Filed: November 6, 2019
    Date of Patent: October 6, 2020
    Assignee: ASM IP Holding B.V.
    Inventors: Delphine Longrie, Antti Juhani Niskanen, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Publication number: 20200291511
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Application
    Filed: November 6, 2019
    Publication date: September 17, 2020
    Inventors: Delphine Longrie, Antti Juhani Niskanen, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Patent number: 10480064
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: November 19, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Delphine Longrie, Antti Juhani Niskanen, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Publication number: 20190055643
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Application
    Filed: July 20, 2018
    Publication date: February 21, 2019
    Inventors: Delphine Longrie, Antti Juhani Niskanen, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Patent number: 10041166
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: August 7, 2018
    Assignee: ASM IP Holding B.V.
    Inventors: Delphine Longrie, Antti Juhani Niskanen, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Patent number: 10014212
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Grant
    Filed: June 14, 2017
    Date of Patent: July 3, 2018
    Assignee: ASM IP HOLDING B.V.
    Inventors: Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Patent number: 9947582
    Abstract: Processes are provided herein for protecting metal thin films from oxidation when exposed to an oxidizing environment, such as the ambient atmosphere. The processes may comprise a protective treatment including exposing the metal thin film to a silicon-containing precursor at a temperature of about 200° C. or less in order to selectively adsorb a silicon-containing protective layer on the metal thin film. The silicon-containing protective layer may reduce or substantially prevent the underlying metal thin film from oxidation.
    Type: Grant
    Filed: June 2, 2017
    Date of Patent: April 17, 2018
    Assignee: ASM IP HOLDING B.V.
    Inventors: Aurélie Kuroda, Shang Chen, Takahiro Onuma, Dai Ishikawa
  • Publication number: 20180080121
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Application
    Filed: October 27, 2017
    Publication date: March 22, 2018
    Inventors: Delphine Longrie, Antti Juhani Niskanen, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Patent number: 9921431
    Abstract: According to one embodiment, a display device includes a mount portion, a first metal layer, a second metal layer, an interlayer insulating film which is thinner in a non-display area than in a display area, a plurality of lines, a first end, a second end, wherein at least one of the first and second ends comprises a slit formed therein along a second direction from a display area side thereof to a opposite side of the display area side.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: March 20, 2018
    Assignee: Japan Display Inc.
    Inventor: Takahiro Onuma
  • Publication number: 20170358482
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Application
    Filed: June 14, 2017
    Publication date: December 14, 2017
    Inventors: Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Patent number: 9803277
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: October 31, 2017
    Assignee: ASM IP HOLDING B.V.
    Inventors: Delphine Longrie, Antti Juhani Niskanen, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Patent number: 9805974
    Abstract: Metallic layers can be selectively deposited on one surface of a substrate relative to a second surface of the substrate. In some embodiments, the metallic layers are selectively deposited on a first metallic surface relative to a second surface comprising silicon. In some embodiments the reaction chamber in which the selective deposition occurs may optionally be passivated prior to carrying out the selective deposition process. In some embodiments selectivity of above about 50% or even about 90% is achieved.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: October 31, 2017
    Assignee: ASM IP HOLDING B.V.
    Inventors: Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba
  • Publication number: 20160187706
    Abstract: According to one embodiment, a display device includes a mount portion, a first metal layer, a second metal layer, an interlayer insulating film which is thinner in a non-display area than in a display area, a plurality of lines, a first end, a second end, wherein at least one of the first and second ends comprises a slit formed therein along a second direction from a display area side thereof to a opposite side of the display area side.
    Type: Application
    Filed: December 2, 2015
    Publication date: June 30, 2016
    Applicant: Japan Display Inc.
    Inventor: Takahiro ONUMA
  • Publication number: 20140225819
    Abstract: Data lines are connected to pixels arranged on both sides of the data lines respectively, a cth gate line and a (c+1)th gate line are connected respectively to pixels arranged between the cth gate line and the (c+1)th gate line alternately, in the case of displaying an image at a Nth frame, the first gate line driver circuit and the second gate line driver circuit supply the gate signal to the cth gate line and the (c+1)th gate line in this order, and in the case of displaying an image at a (N+1)th frame, the first gate line driver circuit and the second gate line driver circuit supply the gate signal to the (c+1)th gate line and the cth gate line in this order.
    Type: Application
    Filed: February 3, 2014
    Publication date: August 14, 2014
    Applicant: Japan Display Inc.
    Inventors: Takahiro ONUMA, Kenji Harada, Satoshi Maruyama