Abstract: A light deflector includes: a drive element configured to rotate a movable part having a reflection surface, about a rotation axis; an upper lid superposed on an upper surface of the drive element; and a lower lid superposed on a lower surface of the drive element. The upper lid and the lower lid oppose the upper surface and the lower surface of the drive element, respectively, with gaps that permit specified rotational movement of the movable part.

Abstract: A piezoelectric drive element includes: a movable part; a pair of piezoelectric drive parts each connected at one end portion thereof to the movable part and configured to rotate the movable part about at least a rotation axis; and a fixing part to which end portions of the piezoelectric drive parts are connected. The pair of piezoelectric drive parts are aligned in a direction along the rotation axis with the movable part located therebetween, a width of the movable part is narrower than a width of each of the pair of piezoelectric drive parts in a plan view, and the fixing part is placed in a gap region that is outside the movable part and that is located between the pair of piezoelectric drive parts in a plan view.

Abstract: A driving element includes: a base; a movable part spaced apart from the base in a direction parallel to a rotation axis; a connection part connecting the base and the movable part; a pair of first arm parts extending in a first direction parallel to the rotation axis with the rotation axis located therebetween; a pair of second arm parts extending in a second direction opposite to the first direction, with the rotation axis located therebetween; a coupling part coupling the pair of first arm parts and the pair of second arm parts to the connection part; and a piezoelectric driver disposed on at least either the pair of first arm parts or the pair of second arm parts.

Abstract: A light control system includes an optical reflection element and a controller. The optical reflection element includes: a reflector; and a first swing portion and a second swing portion disposed at respective one of positions sandwiching the reflector. Each of the first swing portion and the second swing portion includes: a first connection portion coupled to the reflector; a first vibration portion; a second vibration portion; a first drive portion; a second drive portion; and a second connection portion that connects the first and second vibration portions to a base. The controller causes the first and second drive portions of the first swing portion to vibrate in the same phase, and causes the first and second drive portions of the second swing portion to vibrate in the same phase but in the opposite phase to the first swing portion.

Abstract: A reflective optical element includes a reflector configured to reflect light, a first connection part connected with the reflector, first and second transmission parts connected with of the first connection part, first and second vibrator parts connected with respective base ends of the first and second transmission parts, first and second driver parts connected with respective head ends of the first and second vibrator parts, a base, and a second connection part connecting the first and second vibrator parts vibratably with the base.

Abstract: An optical reflective element includes: a reflective body that rotationally oscillates about a first rotational axis; a first connector body that is coupled to the reflective body, and includes a groove portion provided in a position in which the first rotational axis is located; a first vibration body that is disposed in a direction intersecting the first rotational axis, and is coupled to a proximal end portion of the first connector body; a second vibration body that is disposed on a side opposite the first vibration body; a first driving body that causes the first vibration body to rotate; a second driving body that is coupled to the second vibration body; and a second connector body that connects the first vibration body and the second vibration body in a manner that allows the first vibration body and the second vibration body to vibrate.

Abstract: A reflective optical element includes a reflector configured to reflect light, a first connection part connected with the reflector, first and second transmission parts connected with of the first connection part, first and second vibrator parts connected with respective base ends of the first and second transmission parts, first and second driver parts connected with respective head ends of the first and second vibrator parts, a base, and a second connection part connecting the first and second vibrator parts vibratably with the base.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: An ink jet head includes an actuator and a structure body. The actuator includes a thin film portion, a pressure chamber layer, and a filter. The thin film portion is deformed by application of a voltage to apply a pressure to an ink. The pressure chamber layer is formed on a surface of the pressure chamber and has a recessed portion. The filter is integrally formed with the pressure chamber layer so as to be disposed in the recessed portion, the filter having an aperture smaller than a diameter of a nozzle. The actuator is stacked on an upper surface of the structure body and joined to the upper surface thereof. A pressure chamber is formed by the recessed portion and the upper surface of the structure body, and the filter is disposed in the pressure chamber.

Abstract: An angular velocity sensor includes a substrate, a lower electrode on the substrate, a piezoelectric body on the lower electrode, and an upper electrode on the piezoelectric body. The piezoelectric body includes a first portion and a second portion above the first portion. The first portion has a side surface connected to a lower surface of the piezoelectric body. The second portion has a side surface connected to an upper surface of the piezoelectric body. A supplementary angle of an angle formed between the upper surface and the side surface of the second portion of the piezoelectric body is smaller than an angle formed between the lower surface and the side surface of the first portion of the piezoelectric body. This angular velocity sensor can effectively prevent stress from concentrating to the piezoelectric body.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: A sensor includes an upper lid layer, a lower lid layer, and a sensor layer disposed between the upper lid layer and the lower lid layer. One of the upper lid layer and the lower lid layer includes an insulative region mainly made of glass, a via-electrode covered with the insulative region, and an outer circumferential region mainly made of silicon and provided at an outer circumference of the insulative region. This sensor allows reducing outer dimensions of a wafer, which is a material for the sensor.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: A sensor includes a circuit board, a wiring connection layer, a sensor element, and a conductive post. The circuit board has a first electrode. The wiring connection layer has second and third electrodes. The second electrode is connected to the first electrode. The sensor element has a fourth electrode. The conductive post connects the third electrode electrically with the fourth electrode. This sensor can be driven efficiently.

Abstract: An inertial force sensor includes a base, a connection electrode on the base; a flexible section supported by the base, a driving section on an upper surface of the flexible section, a detection section on the upper surface of the flexible section, an interlayer insulating layer on the upper surface of one of the driving section and the detection section, and a wiring electrically connecting another of the driving section and the detection section to a connection electrode via an upper surface of the interlayer insulating layer. This inertial force sensor can have improved sensitivity and a small size.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: A sensor includes a circuit board, a wiring connection layer, a sensor element, and a conductive post. The circuit board has a first electrode. The wiring connection layer has second and third electrodes. The second electrode is connected to the first electrode. The sensor element has a fourth electrode. The conductive post connects the third electrode electrically with the fourth electrode. This sensor can be driven efficiently.