Abstract: A control device of a processing machine controls a first drive source based on detection values from a first sensor so that a reference workpiece other than a workpiece is processed from a first direction by a tool into a prescribed target shape. The control device measures a shape of the reference workpiece based on a detection value from the first sensor at the time when contact in the first direction of a touch sensor with the processed reference workpiece by the touch sensor. The control device specifies a first deviation amount of a position of the tool in the X-direction based on a deviation amount in the first direction between the target shape and the measured shape, and corrects control for processing the workpiece based on the specified first deviation amount.

Abstract: A processing machine includes a drive source, a camera, an image processing device and a control device. The drive source makes a workpiece and a tool relatively move in a first direction. The camera captures the tool in the first direction to acquire an image. The image processing device identifies a position of the tool in the first direction based on clarity of the tool in the image. The control device controls the first drive source based on the position of the tool in the first direction identified by the image processing device.

Abstract: In a processing machine 1, an X-axis control unit 33X, in each control cycle Tc, controls the position of an X-axis table 9X in the X-direction by feedback. The Z-axis control unit 33Z, in each control cycle Tc, acquires an up-close detection value of the position of the Z-axis table 9Z in the Z-direction, computes a second deviation based on a difference between the acquired detection value and a target position, and controls a Z-axis drive source 23z so that the second deviation is reduced. The Z-axis control unit 33Z, in each control cycle Tc, acquires an up-close detection value of a first error comprised of a deviation of the X-axis table 9 in the Z-direction, and increases or reduces the second deviation based on the detection value of the first error so that at least a portion of an error in a relative position of a workpiece 103 and a tool 101 in the Z-direction originating from the first error is cancelled by movement of the Z-axis table 9Z in the Z-direction.

Abstract: A method for machining grooves in the surface of a workpiece in which a dummy groove is machined in the surface of the workpiece by moving a cutting tool relative to the workpiece in a first machining direction of the workpiece, then orienting the cutting tool 180 degrees as compared to the first machining, and subsequently second machining the dummy groove by moving the cutting tool in a second direction opposite to the first direction. A displacement of a cutting edge of the cutting tool, caused by the first and second machining of the dummy groove is measured. A groove is machined with the cutting tool in a forward stroke and then a return stoke with the cutting tool rotated 180 degrees between the strokes. A relative position between the workpiece and the cutting tool during the forward and return strokes is corrected so as to eliminate the displacement.

Abstract: A high-speed grooving method includes: a dummy machining step of machining a dummy groove in the surface of the workpiece by moving the cutting tool relative to the workpiece in a first direction, then turning the cutting tool 180 degrees, and subsequently further machining the dummy groove by moving the cutting tool in a second direction opposite to the first direction; a step of measuring a displacement of the cutting edge of the cutting tool, caused by the inversion of the cutting tool, from the dummy groove formed in the surface of the workpiece; a forward-stroke machining step of machining a groove with the cutting tool in the surface of the workpiece by moving the cutting tool relative to the workpiece in the first direction; a cutting tool inversion step of turning the cutting tool 180 degrees after completion of the forward-stroke machining step, thereby setting the direction of the cutting edge of the cutting tool to a direction opposite to the first direction so that the workpiece can be machined du

Abstract: The present invention provides a dicing method that achieves excellent dicing properties at low costs by removing a metal film through a metal processing operation with a diamond tool and then performing pulse laser beam irradiation. The dicing method is a method of dicing a substrate to be processed, devices being formed in the substrate to be processed, a metal film being formed on one surface of the substrate to be processed.

Abstract: The cutting-edge position detecting method includes the steps of: under a condition in which the cutting edge of the tool is positioned in an image that is taken by a camera, performing first sampling scanning operations for the image in a predetermined scanning direction at predetermined first intervals, and recognizing points on an upper edge line of the cutting edge of the tool and points on a lower edge line thereof, based on brightness changing points upon the first scanning operations; connecting the recognized points on the respective two edge lines, so as to obtain two first-level approximate linear lines by a least-squares method; performing second sampling scanning operations for the respective two first-level approximate linear lines in directions perpendicular thereto at predetermined second intervals, and newly recognizing points on the upper edge line of the cutting edge of the tool and points on the lower edge line thereof, based on brightness changing points upon the second scanning operations

Abstract: The invention relates to a grinding machine for grinding a workpiece, which has been set on a chuck top surface, by moving a rotating grinding wheel in relation to the workpiece. The grinding machine includes: a microscope configured to be vertically movable; a CCD camera configured to take an image viewed through the microscope; and an image processor configured to process the image taken by the CCD camera to measure a vertical distance between a reference plane of the microscope and an object of the microscope. The image processor is adapted to measure the vertical distance between the reference plane of the microscope and the object of the microscope based on sharpness of the image, which corresponds to how clear the microscope is focused.

Abstract: There is provided a roll surface machining method and apparatus for using a cutting tool to carry out ultra-precision machining in the surface of a roll with a reduced amount of data. The apparatus and method for roll surface machining includes setting a machining start position of a cutting tool with respect to the surface of the roll by C-axis indexing of the roll and positioning of the roll in the axial direction (Z-axis direction) both with respect to the cutting tool. Also the cutting tool and the roll are moved relative to each other in the axial direction of the roll by position control using C-Z axis interpolation, thereby forming a three-dimensional pattern in the surface of the roll.

Abstract: There is provided a roll surface machining method and apparatus for using a cutting tool to carry out ultra-precision machining in the surface of a roll with a reduced amount of data. The apparatus and method for roll surface machining includes setting a machining start position of a cutting tool with respect to the surface of the roll by C-axis indexing of the roll and positioning of the roll in the axial direction (Z-axis direction) both with respect to the cutting tool. Also the cutting tool and the roll are moved relative to each other in the axial direction of the roll by position control using C-Z axis interpolation, thereby forming a three-dimensional pattern in the surface of the roll.

Abstract: There is provided a precision roll turning lathe which can perform machining of fine grooves at a dramatically higher speed as compared to conventional roll turning lathes, thus significantly shortening time taken for machining one groove.

Abstract: There is provided a roll machining apparatus for machining the surface of a roll, which can accurately support a roll by hydrostatic bearings while absorbing thermal expansion of the roll in the length direction, thus enhancing the machining precision. The roll machining apparatus can include a first hydrostatic radial bearing for receiving the radial load of a first spindle and rotatably supporting the first spindle, a hydrostatic thrust bearing for receiving the thrust load of the first spindle and limiting axial movement of the first spindle, a second hydrostatic radial bearing for receiving the radial load of a second spindle and rotatably supporting the second spindle, and a floating thrust having a thrust bearing for receiving the thrust load of the second spindle. The floating thrust selectively limits and permits axial movement of the thrust bearing.

Abstract: There is provided a V-groove machining method and apparatus which, by measuring the depth of a V groove cut by a cutting tool and correcting the cutting depth of the cutting tool based on the measurement data, enables high precision machining of four-sided pyramids having vertices of a uniform height.

Abstract: The present invention provides a dicing method that achieves excellent dicing properties at low costs by removing a metal film through a metal processing operation with a diamond tool and then performing pulse laser beam irradiation. The dicing method is a method of dicing a substrate to be processed, devices being formed in the substrate to be processed, a metal film being formed on one surface of the substrate to be processed.

Abstract: A roll turning lathe is provided herein which can not only machine with high precision circumferential transverse grooves in the peripheral surface of a roll but can also machine with high precision longitudinal grooves in the peripheral surface. The precision roll turning lathe includes a fly cutter spindle device and a tool post having a plurality of cutting tools that are mounted on a tool swivel. By selectively using the tool post and the fly cutter spindle device, high-precision machining of transverse grooves and longitudinal grooves on a roll-shaped workpiece.

Abstract: There is provided a precision roll turning lathe which can machine with high precision a three-dimensional pattern of three-sided pyramids or four-sided pyramids in the surface of a roll.

Abstract: The invention relates to a grinding machine for grinding a workpiece, which has been set on a chuck top surface, by moving a rotating grinding wheel in relation to the workpiece. The grinding machine includes: a microscope configured to be vertically movable; a CCD camera configured to take an image viewed through the microscope; and an image processor configured to process the image taken by the CCD camera to measure a vertical distance between a reference plane of the microscope and an object of the microscope. The image processor is adapted to measure the vertical distance between the reference plane of the microscope and the object of the microscope based on sharpness of the image, which corresponds to how clear the microscope is focused.

Abstract: There is provided a roll surface machining method and apparatus for using a cutting tool to carry out ultra-precision machining in the surface of a roll with a reduced amount of data. The apparatus and method for roll surface machining includes setting a machining start position of a cutting tool with respect to the surface of the roll by C-axis indexing of the roll and positioning of the roll in the axial direction (Z-axis direction) both with respect to the cutting tool. Also the cutting tool and the roll are moved relative to each other in the axial direction of the roll by position control using C-Z axis interpolation, thereby forming a three-dimensional pattern in the surface of the roll.

Abstract: There is provided an apparatus for preventing displacement of a retainer in a rolling guide by making use of the property of the retainer of moving half the distance of a moving object, such as a table.

Abstract: The present invention provides a precision roll turning lathe which can form a pattern including three-dimensionally shaped portions, such as three-sided pyramids, on the surface of a roll, with high accuracy. Specifically, a tool post is provided with a tool turning axis (A axis) which is used to turn a tool such that, when forming a spiral groove cut through the roll, a cutting face of a tip of the tool is oriented perpendicular to a direction along which the spiral groove extends.