Abstract: A pressure sensor module and a dispensing apparatus improving accuracy of pressure measurement are provided. A pressure sensor module includes: a flow channel substrate in which a flow channel and a branch channel are formed; and a distortion detection unit configured to detect a pressure. The branch channel is branched from the flow channel and is connected to the distortion detection unit at one end of the branch channel. The distortion detection unit is disposed at least partially via a bond layer to block the one end of the branch channel. A protrusion is provided to surround the one end of the branch channel.

Abstract: Provided is a highly reliable optical filtering device used as a spatial filter for an optical inspection apparatus and configured to prevent a shutter from sticking to a wall surface of a shutter opening. The optical filtering device includes the shutter openable and closeable by voltage control and a substrate having the shutter opening serving as a movable range of the shutter, in which the substrate includes a sticking prevention part configured to prevent the shutter from sticking to the wall surface of the shutter opening when the shutter is opened.

Abstract: Provided is a feature for highly precisely manufacturing a concave diffraction grating that has a uniform diffraction grating pattern. This method for manufacturing a concave diffraction grating includes: preparing a flat diffraction grating that has a lattice groove and that also has an elongated section, a thin-film section, or a low-friction section formed outside of a region for forming a mold for the concave diffraction grating; mounting the flat diffraction grating on a convex substrate and acquiring the mold for the concave diffraction grating; and transferring the lattice groove in the mold to the concave substrate.

Abstract: The present invention provides a concave diffraction grating and an optical device using the concave diffraction grating, the concave diffraction grating being capable of preventing deformation of a reflection film due to the influence of temperature, and preventing deterioration in optical characteristic due to temperature. This concave diffraction grating is provided with: a reflection film (22) having a plurality of grating grooves (21); a holding film (25) comprising metal and having one surface on which the reflection film (22) is provided; a concave substrate (24) having a concave surface (24a); and an affixing layer (23) provided between the concave surface (24a) and the other surface of the holding film (25), and affixing the holding film (25) and the reflection film (22) to the concave substrate (24).

Abstract: Easy and accurate mating of a groove interval of a groove pattern of a diffraction grating with a position on a convex fixing substrate is enabled. For this purpose, a concave diffraction grating is fabricated by: transferring a groove pattern formed on a plane diffraction grating and having unequal groove intervals onto a metal thin film; forming a first alignment mark on a convex surface of a fixing substrate having the convex surface to fix the metal thin film; mating a second alignment mark formed on an adhesive surface of the metal thin film with the first alignment mark to perform alignment; bonding the adhesive surface of the metal thin film and the convex surface of the fixing substrate to each other to fabricate a master; and transferring a groove pattern of a metal thin film of the master.

Abstract: The present invention provides a concave diffraction grating capable of improved diffraction efficiency by suppressing spherical aberration. The concave diffraction grating is a concave diffraction grating 2 for dispersing and focusing light and comprises sawtooth grating grooves 21 on a concave substrate 24, with the sawtooth grating grooves 21 being unequally spaced. The concave diffraction grating 2 for dispersing and focusing light is formed by preparing a planar diffraction grating with a sawtooth shape which is formed on a planar substrate by photo-lithography and etching or machining and which forms unequally spaced grating grooves 21, deforming and mounting the planar diffraction grating along a fixed convex substrate to obtain a mold of a concave diffraction grating, and transferring the mold of the concave diffraction grating to the surface of a metal or a resin.

Abstract: A spectrophotometer 300 includes a white light source 212, condenser lenses 242a, 242b that collect light emitted from the white light source 212, a slit 245 that diffracts the light collected by the condenser lenses 242a, 242b, a concave diffraction grating 246 that splits the light having passed through the slit 245, and a multi-wavelength detector 248 having a plurality of photodetection elements 304 that detect the light split by the concave diffraction grating 246, and each of the plurality of photodetection elements 304 included in the multi-wavelength detector 248 is arranged at an image position of the concave diffraction grating 246.

Abstract: A method for manufacturing a concave diffraction grating is provided. The method includes the steps of: positioning a flat mold and a concave substrate such that a pressing surface, having a groove pattern of a diffraction grating, of the flat mold faces a concave surface, coated with a resin, of the concave substrate; pressing the pressing surface against the resin coated over the concave surface by pressurizing the flat mold using a fluid; and curing the resin having the groove pattern transferred thereto by being pressed by the pressing surface. This makes it possible to improve load non-uniformity and manufacture a concave diffraction grating with high surface accuracy.

Abstract: The present invention provides a concave diffraction grating capable of improved diffraction efficiency by suppressing spherical aberration. The concave diffraction grating is a concave diffraction grating 2 for dispersing and focusing light and comprises sawtooth grating grooves 21 on a concave substrate 24, with the sawtooth grating grooves 21 being unequally spaced. The concave diffraction grating 2 for dispersing and focusing light is formed by preparing a planar diffraction grating with a sawtooth shape which is formed on a planar substrate by photo-lithography and etching or machining and which forms unequally spaced grating grooves 21, deforming and mounting the planar diffraction grating along a fixed convex substrate to obtain a mold of a concave diffraction grating, and transferring the mold of the concave diffraction grating to the surface of a metal or a resin.

Abstract: Easy and accurate mating of a groove interval of a groove pattern of a diffraction grating with a position on a convex fixing substrate is enabled. For this purpose, a concave diffraction grating is fabricated by: transferring a groove pattern formed on a plane diffraction grating and having unequal groove intervals onto a metal thin film; forming a first alignment mark on a convex surface of a fixing substrate having the convex surface to fix the metal thin film; mating a second alignment mark formed on an adhesive surface of the metal thin film with the first alignment mark to perform alignment; bonding the adhesive surface of the metal thin film and the convex surface of the fixing substrate to each other to fabricate a master; and transferring a groove pattern of a metal thin film of the master.

Abstract: A scanning image display device is provided that can display high-quality images even with variation in environmental conditions at a place where the device is installed. The scanning image display device includes: a laser light source that emits laser light based on image information; a scanning mirror that scans the laser light emitted from the laser light source to project an image on a projection plane; a housing that holds the laser light source and the scanning mirror; and a container formed of a base and an outer cover that accommodates the housing and is internally sealed, wherein the outer cover has a thin-wall portion that is elastically deformed with variation in pressure within the container.

Abstract: A learning unit in learning mode generates a cluster from a cluster analysis of data formed from frequency constituent data and state data, obtained from a sensor unit. An abnormality calculation unit computes, as abnormalities, the minimum values among distances to surfaces of the clusters of the data formed from the frequency constituent data and the state data, obtained when in predictive fault indicator sensing mode. A predictive fault indicator determination unit determines a predictive fault indicator of an X-ray tube by comparing the abnormalities with a predetermined threshold.

Abstract: The present invention includes: an excitation light source; a probe light source; a filter that mutually multiplexes a probe light emitted from the probe light source and an excitation light emitted from the excitation light source to a same optical axis; a condenser lens that focuses the excitation light and the probe light; a sample cell that stores a sample; a reflection member that is disposed on an inner wall of the sample cell and reflects the probe light; and a detector that detects the probe light reflected at the reflection member.

Abstract: The laser projection display device includes a scanning mirror reflecting and two-dimensionally scanning a laser beam emitted from a laser light source and sensors detecting rotation angles of the scanning mirror, and controls driving of the scanning mirror on the basis of sensor signals output from the sensors. At this time, a temperature compensation unit compensates for temperature dependency of a transfer characteristic of a signal transmission line for transmitting the sensor signals according to a temperature measured by a thermometer arranged in the vicinity of the scanning mirror. In order to correct amplitudes and phases of the rotation angles of the scanning mirror obtained from the sensor signal, the temperature compensation unit includes a look-up table storing correction amounts for each temperature.

Abstract: A technique is provided which enables preparation of a curved grating having a desired curvature, by plastically deforming, along a curved substrate, a flat grating prepared by a semiconductor process on a silicon substrate, and which thus prepares a diffraction grating with high accuracy. A silicon flat grating prepared by a semiconductor process is transferred to an amorphous material, and the amorphous material substrate is curved and mounted on a curved fixed substrate, thus providing a curved grating having a crystalline material in which the generation of a dislocation line is restrained.

Abstract: A head mount display includes a display unit, a power source unit, a holding unit, and an adopter. The display unit displays a screen in a visibility direction of a user using the head mount display. The power source unit drives the display unit and includes a circuit board and a battery. The holding unit connects the display unit and the power source unit. The display is mounted on the head or a helmet of the user by the adopter. In the head mount display, the battery and the circuit board of the power source unit are disposed across a ventilation unit, and the ventilation unit is formed in an overhead direction of the user.

Abstract: A curved surface diffraction grating fabrication method for fabricating a curved surface diffraction grating having a desired curvature with high accuracy, includes: a step of forming a diffraction grating pattern on a flat-shaped silicon substrate; a step of curving the silicon substrate on which the diffraction grating pattern is formed, by pressing, in a heated state, a fixing substrate having a shape with a desired curved surface onto the silicon substrate and of fixing the silicon substrate on which the diffraction grating pattern is formed to the fixing substrate having the shape with the curved surface, to fabricate a curved surface diffraction grating cast; and a step of bringing a member having flexibility into contact with the curved surface diffraction grating cast, to transfer the diffraction grating pattern to the member.

Abstract: A learning unit in learning mode generates a cluster from a cluster analysis of data formed from frequency constituent data and state data, obtained from a sensor unit. An abnormality calculation unit computes, as abnormalities, the minimum values among distances to surfaces of the clusters of the data formed from the frequency constituent data and the state data, obtained when in predictive fault indicator sensing mode. A predictive fault indicator determination unit determines a predictive fault indicator of an X-ray tube by comparing the abnormalities with a predetermined threshold.

Abstract: A scanning image display device is provided that can display high-quality images even with variation in environmental conditions at a place where the device is installed. The scanning image display device includes: a laser light source that emits laser light based on image information; a scanning mirror that scans the laser light emitted from the laser light source to projecr an image on a projection plane; a housing that holds the laser light source and the scanning mirror; and a container formed of a base and an outer cover that accommodates the housing and is internally sealed, wherein the outer cover has a thin-wall portion that is elastically deformed with variation in pressure within the container.

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.