Abstract: A measurement probe of the present disclosure that scans a surface of a measurement object to measure a three-dimensional shape or the like of the surface of the measurement object includes a first movable portion having a stylus, a second movable portion that is connected to the first movable portion to be movable in a Z direction, a third movable portion that is connected to the second movable portion to be movable in the Z direction, a first position measurer that measures a first position of the first movable portion in the Z direction, a second position measurer that measures a second position of the second movable portion in the Z direction, and a third position measurer that measures a third position of the third movable portion in the Z direction. A first relative position is calculated based on the first position and the second position. A second relative position is calculated based on the first position and the third position.

Abstract: A measurement probe of the present disclosure that scans a surface of a measurement object to measure a three-dimensional shape or the like of the surface of the measurement object includes a first movable portion having a stylus, a second movable portion that is connected to the first movable portion to be movable in a Z direction, a third movable portion that is connected to the second movable portion to be movable in the Z direction, a first position measurer that measures a first position of the first movable portion in the Z direction, a second position measurer that measures a second position of the second movable portion in the Z direction, and a third position measurer that measures a third position of the third movable portion in the Z direction. A first relative position is calculated based on the first position and the second position. A second relative position is calculated based on the first position and the third position.

Abstract: There are provided a shape measurement device capable of measuring shapes irrespective of an inclined direction of a side surface without using a complex device configuration, and a shape measurement device probe arranged in the shape measurement device. In the shape measurement device probe, a connecting mechanism for connecting an attachment member and a swinging member includes a supporting point member arranged on the swinging member and a mounting platform arranged on the attachment member, and connects the swinging member to the attachment member so as to be inclinable in any direction. The attachment member and the swinging member are configured such that a movable side member arranged on the swinging member and a fixed side member arranged on the attachment member generate magnetic attraction force in a non-contacting state with respect to each other, where the arm of the swinging member is biased so as to be directed in the vertical direction by the magnetic attraction force.

Abstract: There are provided a shape measurement device capable of measuring shapes irrespective of an inclined direction of a side surface without using a complex device configuration, and a shape measurement device probe arranged in the shape measurement device. In the shape measurement device probe, a connecting mechanism for connecting an attachment member and a swinging member includes a supporting point member arranged on the swinging member and a mounting platform arranged on the attachment member, and connects the swinging member to the attachment member so as to be inclinable in any direction. The attachment member and the swinging member are configured such that a movable side member arranged on the swinging member and a fixed side member arranged on the attachment member generate magnetic attraction force in a non-contacting state with respect to each other, where the arm of the swinging member is biased so as to be directed in the vertical direction by the magnetic attraction force.

Abstract: A three-dimensional measurement probe that is less likely to break, that is of long lifespan, and that is of low cost, capable of measuring the shape and the like of a measuring object such as an aspheric lens with higher precision is realized. A magnetic force for preventing rotation and axial displacement of a small slidably moving shaft part is generated by constructing a magnetic circuit by a magnet attached to a small air bearing part, a yoke, and a magnetic pin attached to the small slidably moving shaft part. The three-dimensional measurement probe is able to perform measurement from below and from the side since the magnetic force is non-contacting.

Abstract: A three-dimensional measurement probe that is less likely to break, that is of long lifespan, and that is of low cost, capable of measuring the shape and the like of a measuring object such as an aspheric lens with higher precision is realized. A magnetic force for preventing rotation and axial displacement of a small slidably moving shaft part is generated by constructing a magnetic circuit by a magnet attached to a small air bearing part, a yoke, and a magnetic pin attached to the small slidably moving shaft part. The three-dimensional measurement probe is able to perform measurement from below and from the side since the magnetic force is non-contacting.

Abstract: A dust-free industrial robot of high performance includes an internal air space substantially closed by arms, articulation members, bearings or covers or a combination thereof in a manner to separate the rotating, sliding and contacting portions of structural elements such as the arms, articulation members, bearings and a drive source from the outside air. The air pressure in the internal air space is made lower than that of the outside air to prevent dust produced during the operation of the robot from being scattered to the outside air.