Abstract: A hinge portion is formed on the base portion. An antenna portion is attached to the hinge portion so as to be pivotable thereabout. The hinge portion includes a hinge base having a first shaft formed on one end thereof, a second shaft formed on the other end thereof, and a first protrusion formed on an outer periphery of the second shaft, and a hinge bush rotatably mounted on the first shaft and engaged with the antenna portion. The antenna portion is formed with a hole surrounding the outer periphery of the second shaft. A projection is formed on an inner periphery of the hole. The first protrusion is brought into contact with the projection when the antenna portion is pivoted so as to define a predetermined angle with respect to the base portion.

Abstract: A hinge portion is formed on the base portion. An antenna portion is attached to the hinge portion so as to be pivotable thereabout. The hinge portion includes a hinge base having a first shaft formed on one end thereof, a second shaft formed on the other end thereof, and a first protrusion formed on an outer periphery of the second shaft, and a hinge bush rotatably mounted on the first shaft and engaged with the antenna portion. The antenna portion is formed with a hole surrounding the outer periphery of the second shaft. A projection is formed on an inner periphery of the hole. The first protrusion is brought into contact with the projection when the antenna portion is pivoted so as to define a predetermined angle with respect to the base portion.

Abstract: The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.

Abstract: A distributor arranged between a tuner module and an antenna, the tuner module including a first input portion and a second input portion for inputting a satellite broadcast signal transmitted from an artificial satellite and a ground broadcast signal transmitted from a ground base station respectively, and the antenna receiving either one of the broadcast signals. The distributor includes a first connector portion connected to the antenna; a second connector portion connected to the first input portion; a third connector portion connected to the second input portion; and a junction connecting portion distributing the signal inputted to the first connector portion to the second and the third connector portions. A drive voltage of the antenna inputted from the first input portion is outputted to the antenna. The voltage outputted to the antenna is fed back to the second input portion through the junction connecting portion and the third connector portion.

Abstract: An electron beam apparatus, in which an electron beam emitted from an electron gun having a cathode and an anode is focused and irradiated onto a sample, and secondary electrons emanated from the sample are directed into a detector, the apparatus further comprising means for optimizing irradiation of the electron beam emitted from the electron gun onto the sample, the optimizing means may be two-stage deflectors disposed in proximity to the electron gun which deflects and directs the electron beam emitted in a specific direction so as to be in alignment with the optical axis direction of the electron beam apparatus, the electron beam emitted in the specific direction being at a certain angle with respect to the optical axis due to the fact that, among the crystal orientations of said cathode, a specific crystal orientation allowing a higher level of electron beam emission out of alignment with the optical axis direction.

Abstract: An antenna apparatus includes: an antenna element; and a substrate on which a low noise amplifier is mounted and on which the antenna element is disposed, wherein the substrate comprises: an input unit for inputting an electric signal into the low noise amplifier from an output terminal formed at a lower part of the antenna element; an output unit for outputting the electric signal to a transmission unit connected to a signal processing unit for processing the electric signal from the antenna element; and a signal blocking unit provided between the input unit and the output unit.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder and an antenna pattern composed of a plurality of conductors formed on a peripheral surface of said hollow cylindrical member. A phase shifter pattern is formed on the peripheral surface of the hollow cylindrical member so as to be electrically connected to the antenna pattern. The antenna unit further comprises a hollow cylindrical cover case covering the hollow cylindrical member and a characteristic adjusting member for adjusting an antenna frequency characteristic.

Abstract: A circuit board has a first face and a second face opposite to the first face. A low noise amplifier is mounted on the second face. A pole-type antenna module is extending vertically along a central axis thereof A shield cover is attached to the second face of the circuit board so as to cover the low noise amplifier. The circuit board is formed with a through hole connecting the first face and the second face. The pole-type antenna module is inserted into the through hole so that a lower part thereof is accommodated in the shield cover and an upper part thereof is protruded from the first face of the circuit board.

Abstract: Disclosed is an antenna apparatus including: an antenna element including a receiving unit to receive an electric wave; a circuit substrate including a circuit surface on which a circuit amplifying an input from the antenna element is formed; a shield cover covering the circuit surface to shield the circuit substrate from a disturbing wave, the shield cover being grounded; a coaxial cable to supply driving power and GND potential to the circuit, and to output a signal from the circuit, the coaxial cable inserted into the shield cover, wherein the shield cover includes a base surface disposed in parallel with the circuit surface and a tongue flap extending to the coaxial cable, and the tongue flap includes a connecting piece formed by bending an end of the tongue flap at a side of the coaxial cable, the connecting piece being soldered to an outer conductor of the coaxial cable.

Abstract: An antenna element includes: an antenna plate; an antenna probe formed monolithically with the antenna plate and extending in a vertical direction from the antenna plate; a ground plate disposed in parallel to the antenna plate at a distance; and a dielectric spacer disposed between the antenna plate and the ground plate, wherein the antenna probe is bent from an edge of the antenna plate toward a center thereof.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder and an antenna pattern composed of four conductors formed on an inner peripheral surface of the hollow cylindrical member. A phase shifter pattern is formed on the inner peripheral surface of the hollow cylindrical member so as to be electrically connected to the antenna pattern. The antenna unit further comprises a hollow cylindrical cover case covering the hollow cylindrical member and a shield member provided so as to cover the phase shifter pattern.

Abstract: An electron beam system wherein a shot noise of an electron beam can be reduced and a beam current can be made higher, and further a shaped beam is formed by a two-stage lenses so as to allow for an operation with high stability. In this electron beam system, an electron beam emitted from an electron gun is irradiated onto a sample and secondary electrons emanated from the sample are detected. The electron gun is a thermionic emission type and designed to operate in a space charge limited condition. A shaping aperture and a NA aperture are arranged in front locations of the electron gun. An image of the shaping aperture formed by an electron beam emitted from the thermionic emission electron gun is focused onto a surface of the sample through the two-stage lenses.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder. An antenna pattern composed of at least one conductor is formed at the hollow cylindrical member. The antenna unit further comprises a board mounted with a low-noise amplifier and a hollow cylindrical cover case covering the hollow cylindrical member and the board. In order to reduce the size in longitudinal direction, a part of the board is inserted into the inside of the hollow cylindrical member.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder, an antenna pattern composed of at least one conductor formed at the hollow cylindrical member, and a board mounted with a low-noise amplifier. A hollow cylindrical cover case covers the hollow cylindrical member and the board. A cable having one end is connected to the low-noise amplifier and extends downward from a lower end of the cover case. The antenna unit further comprises an undercap attached to the lower end of the cover case and a packing press-fitted into the undercap. The board is inserted in the packing.

Abstract: An object of the present invention is to provide a sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method, which can reduce an edge roughness in a repaired pattern and also can provide the repairing of a sample by applying an electron beam-assisted etching or an electron beam-assisted deposition. There is provided a sample repairing method comprising: (a) a step of focusing an electron beam by an objective lens to irradiate a sample: (b) a step of supplying a reactive gas onto an electron beam irradiated surface of said sample: (c) a step of selectively scanning a pattern to be repaired on said sample with the electron beam so as to repair said pattern by applying an etching or a deposition; and (d) a step of providing a continuous exhausting operation by means of a differential exhaust system arranged in said objective lens so as to prevent the reactive gas supplied onto said electron beam irradiated surface from flowing toward an electron gun side.

Abstract: An electron beam apparatus including an electron gun for directing a plurality of primary electron beams onto a sample, an objective lens for forming an electric filed to accelerate a plurality of secondary electron beams emitted from the sample, and a separator for separating the plurality of secondary electron beams from a primary optical system and for directing the plurality of secondary electron beams into a secondary optical system for guiding to a detector outputting a detection signal of the secondary electron beams. A deflector deflects the secondary electron beams in the secondary optical system. The deflector is controlled to deflect the plurality of secondary electron beams synchronously with scanning of the plurality of primary electron beams, thereby preventing the plurality of secondary electron beams from moving on the detector in response to the scanning of the plurality of primary electron beams.

Abstract: A hinge portion is formed on the base portion. An antenna portion is attached to the hinge portion so as to be pivotable thereabout. The hinge portion includes a hinge base having a first shaft formed on one end thereof, a second shaft formed on the other end thereof, and a first protrusion formed on an outer periphery of the second shaft, and a hinge bush rotatably mounted on the first shaft and engaged with the antenna portion. The antenna portion is formed with a hole surrounding the outer periphery of the second shaft. A projection is formed on an inner periphery of the hole. The first protrusion is brought into contact with the projection when the antenna portion is pivoted so as to define a predetermined angle with respect to the base portion.

Abstract: Provided is an electron beam apparatus in which an electron beam emitted from an electron gun is separated by a plurality of apertures, images of said apertures are reduced in more than two stages to form multi-beams on a sample surface and to scan said sample thereby, and secondary electrons from said sample are passed through an objective lens, where distances between said secondary electrons are extended, further through an E×B separator, where said secondary electrons are separated from the primary beam, and finally onto secondary electron detectors, where said secondary electrons are detected, wherein a lens defined in the second step for reducing said image of the aperture is composed of two stage lens and an enlarged image of the secondary electron is formed on a position between a first and a second lenses of said two stage lens, thereby reducing an aberration of the optical system for detecting the secondary electrons and allowing as many multi-beams as possible to be formed in the vicinity of a sing