Abstract: An ozone generator is provided with a pulse generator (110) that at least includes pulse generation means for generating a pulse voltage and a magnetic switch (SI2) adjusting pulse width of the generated pulse voltage, and a discharge reactor that is provided with a plurality of electrodes to which the pulse voltage for which the pulse width has been adjusted is applied, and that generates a discharge between the plurality of electrodes as a result of the pulse voltage, for which the pulse width has been adjusted, being applied thereto, and also generates ozone as a result of a raw material gas containing oxygen being supplied from the outside to between the electrodes where the discharge has been generated.

Abstract: A pulse power source which can perform high repetition of pulse signals by enhancing the throughput of a pulse source is provided. The pulse power source includes: a charger; an initial-stage capacitor section which is provided with a capacitor charged by the charger; and a magnetic pulse compression circuit which performs magnetic pulse compression of a pulse current generated by discharging a charge from the capacitor at the initial-stage capacitor section and, thereafter, outputs the pulse current. An exposure device which includes the pulse power source is also provided. The pulse power source includes, between the initial-stage capacitor section and the magnetic pulse compression circuit, a transistor which controls timing of discharging a charge from the initial-stage capacitor section, an inductor which constitutes a resonance circuit together with the capacitor at the initial stage capacitor section, and a diode which rectifies the pulse current.

Abstract: A pulse generator is composed of switch means to switch supply of a first current through a circuit, a first condenser connected to the switch means in series and primary charged by the first current, voltage raising means having a primary winding serially connected to the first condenser and a secondary winding to obtain voltage output by the first current, magnetic switch means of current flow switchable having a primary winding serially connected to the secondary winding of the voltage raising means and a secondary winding, a second condenser connected to the secondary winding of the magnetic switch means and charged by the output therefrom, and discharging means connected to the second condenser to generate pulse discharge when charged voltage of the second condenser is applied thereto by switching the magnetic switch means.