Patents by Inventor Takashi Souma

Takashi Souma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam exposure method
    Patent number: 4151422
    Abstract: An electron beam having a narrow rectangular cross section, shaped by two aperture plates and a deflector, is scanned over a workpiece or specimen. The length and width of the narrow rectangular cross section, relative to beam scanning, in accordance with the shape of the pattern being exposed.
    Type: Grant
    Filed: June 7, 1978
    Date of Patent: April 24, 1979
    Assignees: Rikagaku Kenkyusho, Nihon Denshi Kabushiki Kaisha
    Inventors: Eiichi Goto, Takashi Souma, Masanori Idesawa, Tetsuo Yuasa
  • Electron beam exposure system
    Patent number: 4117340
    Abstract: An electron beam with a cross-section shaped by two aperture plates and a deflector sequentially irradiates pattern areas within a plurality of unit squares on a workpiece in the X and Y directions. The workpiece is continuously shifted in the Y direction by a mechanical means, the amount of workpiece shift being detected to control the deflector and the shaping of said beam cross-section.
    Type: Grant
    Filed: May 31, 1977
    Date of Patent: September 26, 1978
    Assignees: Rikagaku Kenkyusho, Nihon Denshi Kabushiki Kaisha
    Inventors: Eiichi Goto, Takashi Souma, Masanori Idesawa, Kazumitsu Tanaka
  • Electron beam exposure system
    Patent number: RE31630
    Abstract: An electron beam with a cross-section shaped by two aperture plates and a deflector sequentially irradiates pattern areas within a plurality of unit squares on a workpiece in the X and Y directions. The workpiece is continuously shifted in the Y direction by a mechanical means, the amount of workpiece shift being detected to control the deflector and the shaping of said beam cross-section.
    Type: Grant
    Filed: July 6, 1982
    Date of Patent: July 17, 1984
    Assignees: Rikagaku Kenkyusho, Nihon Denshi Kabushiki Kaisha
    Inventors: Eiichi Goto, Takashi Souma, Masanori Idesawa, Kazumitsu Tanaka