Abstract: A nuclear fusion system comprises: a muon generation unit to generate negative muons including electron and positron accelerators for generating electron and positron beams; a gas supply unit to supply to circulate gaseous deuterium or gaseous deuterium-tritium mixture as raw material gas; a Laval nozzle to accelerate the raw material gas to supersonic velocity; and a shock wave cone connected to the Laval nozzle to introduce the raw material gas accelerated to supersonic velocity to generate an oblique shock wave, the raw material gas accelerated to supersonic velocity being introduced into the shock wave cone to generate the oblique shock wave, the oblique shock wave being decelerated to create a high-density gas target in an in-flight manner, the muons generated as a result of causing electrons and positrons to collide with each other being introduced into the high-density gas target thereby to cause a muon-catalyzed nuclear fusion reaction to occur.

Abstract: An air filter sheet comprising particles of a functional agent with an average particle diameter of 0.1 to 30 ?m and fibrils of a polytetrafluoroethylene resin with a number average molecular weight of 3,000,000 to 50,000,000, the ratio by weight of the functional agent to the fibrils of the polytetrafluoroethylene resin being from 1 to 99. According to the present invention, an air filter sheet comprising fibrils of polytetrafluoroethylene resin with a functional agent carried thereon, possessing excellent formability, and being free from a lubricant, a process for manufacturing the air filter sheet, and an air filter free from contamination of outgas with a lubricant are provided.

Abstract: A chemical filter obtained by fabricating a chemical filter material, the chemical filter material being a woven or nonwoven fabric formed from a hydroxyl group-containing organic fiber, the hydroxyl group-containing organic fiber containing cation exchange groups introduced by radiation graft polymerization, the chemical filter material having an ion-exchange capacity of 400 meq/m2 or more with respect to the cation exchange groups, and the chemical filter material having a tensile strength of 5 to 20 N/15 mm.

Abstract: A chemical filter is obtained by pleating a nonwoven fabric, the nonwoven fabric being a spunlace nonwoven fabric prepared by causing fibers to be entangled by a spunlace method, and ion-exchange groups being introduced into the fibers by radiation graft polymerization.

Abstract: An adsorption filter includes at least one thin plate honeycomb filtering medium carrying a gas-adsorbing medium thereon and a filter case housing the honeycomb filtering medium therein. The thin plate honeycomb filtering medium is disposed in the filter case in such a manner as to make a series of V configurations with respect to a ventilation direction.

Abstract: The chemical filter supporting an ion-exchange resin comprising a fiber supporting body containing ion-exchange fiber and ion-exchange resin powder which is supported on the fiber supporting body is provided. The chemical filter possesses a large ion-exchange capacity per unit volume and exhibits high initial performance of eliminating ionized gaseous pollutants and excellent durability of the elimination performance.

Abstract: A dehumidifying system supplies a gas free of organic substances. The dehumidifying system includes a holding case, and a rotor rotatably held in the holding case and bearing an adsorbent. The interior of the holding case is divided into an adsorbing zone and a regenerating zone by partition plates attached to the holding case. A process gas is supplied into the adsorbing zone. The process gas processed in the adsorbing zone is supplied into an objective space. A regenerating gas is supplied into the regenerating zone to eliminate moisture and organic substances adsorbed by the adsorbent in the adsorbing zone from the adsorbent.

Abstract: Two rotors 18a, 18b each housing a honeycomb structure 25 carrying an absorbent is driven for rotation by a common motor 19. Partitioning members 17 define an absorbing zone S and a recovery zone U in the rotor depending on the angular positional relationship between the partitioning members 17 and the rotor corresponding thereto. In the absorbing zone S, the absorbent removes moisture and organic matters from air passing therethrough. In the recovery zone U, recovery of the absorbent deteriorated by absorbing the moisture and the organic matters is preformed by using heated dry air. Air sucked from a transfer space 10 of the processing system sequentially passes through the absorbing zones of both the rotors via a circulation passage 20, thereafter returned to the transfer space. A part of clean dry air having passed through the absorbing zones of both the rotors is supplied into an exhaust passage 21, and is heated by a heater, and passes through the recovery zones of both the rotors.

Abstract: An air filter sheet comprising particles of a functional agent with an average particle diameter of 0.1 to 30 ?m and fibrils of a polytetrafluoroethylene resin with a number average molecular weight of 3,000,000 to 50,000,000, the ratio by weight of the functional agent to the fibrils of the polytetrafluoroethylene resin being from 1 to 99. According to the present invention, an air filter sheet comprising fibrils of polytetrafluoroethylene resin with a functional agent carried thereon, possessing excellent formability, and being free from a lubricant, a process for manufacturing the air filter sheet, and an air filter free from contamination of outgas with a lubricant are provided.

Abstract: Two rotors 18a, 18b each housing a honeycomb structure 25 carrying an absorbent is driven for rotation by a common motor 19. Partitioning members 17 define an absorbing zone S and a recovery zone U in the rotor depending on the angular positional relationship between the partitioning members 17 and the rotor corresponding thereto. In the absorbing zone S, the absorbent removes moisture and organic matters from air passing therethrough. In the recovery zone U, recovery of the absorbent deteriorated by absorbing the moisture and the organic matters is preformed by using heated dry air. Air sucked from a transfer space 10 of the processing system sequentially passes through the absorbing zones of both the rotors via a circulation passage 20, thereafter returned to the transfer space. A part of clean dry air having passed through the absorbing zones of both the rotors is supplied into an exhaust passage 21, and is heated by a heater, and passes through the recovery zones of both the rotors.

Abstract: The present invention provides an adsorption filter, comprising: at least one thin plate honeycomb filtering medium carrying a gas-adsorbing medium thereon; and a filter case housing the honeycomb filtering medium therein, wherein the thin plate honeycomb filtering medium is disposed in the filter case in such a manner as to make a series of V configurations with respect to a ventilation direction. Also disclosed is a method for manufacturing the adsorption filter.

Abstract: The chemical filter supporting an ion-exchange resin comprising a fiber supporting body containing ion-exchange fiber and ion-exchange resin powder which is supported on the fiber supporting body is provided. The chemical filter possesses a large ion-exchange capacity per unit volume and exhibits high initial performance of eliminating ionized gaseous pollutants and excellent durability of the elimination performance.

Abstract: A method for manufacturing a chemical filter with a corrugated honeycomb structure is disclosed. The method comprises coating or impregnating a fibrous paper containing ion-exchange fiber with a slurry mixture of an ion-exchange resin powder and an adhesive to obtain a paper supporting ion-exchange resin powder and applying the paper supporting ion-exchange resin powder to a corrugating process.

Abstract: A dehumidifying system supplies a gas free of organic substances. The dehumidifying system includes a holding case, and a rotor rotatably held in the holding case and bearing an adsorbent. The interior of the holding case is divided into an adsorbing zone and a regenerating zone by partition plates attached to the holding case. A process gas is supplied into the adsorbing zone. The process gas processed in the adsorbing zone is supplied into an objective space. A regenerating gas is supplied into the regenerating zone to eliminate moisture and organic substances adsorbed by the adsorbent in the adsorbing zone from the adsorbent.

Abstract: When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.

Abstract: Quartz member such as a quartz tube for semiconductor manufacturing equipment capable of heat treating a substrate to be treated without causing contamination, a manufacturing method of such quartz member, thermal treatment equipment furnished with such quartz member, and an analysis method of metal in quartz member are provided. A quartz specimen is immersed in hydrofluoric acid to expose a layer to be analyzed located at a prescribed depth. On an exposed surface, a decomposition liquid such as hydrofluoric acid or nitric acid is dripped to decompose only an extremely thin layer to be analyzed, followed by recovering of the decomposition liquid. The decomposition liquid is quantitatively analyzed by use of atomic absorption spectroscopy (AAS) or the like to measure an amount of metal contained in the decomposition liquid. From a difference of thicknesses before and after the decomposition and an area of dripped decomposition liquid, a volume of a decomposed layer to be analyzed is obtained.

Abstract: When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.

Abstract: When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.

Abstract: A circulation duct with a blow fan and a shutter is provided to form gas flows in a transfer chamber below a heat treatment furnace, and a dust removing filter unit is provided in a blowout port of the circulation gas passage. Three, for example, gas supply pipes with a number of blowout holes are provided on the front side of the filter unit at set heights, and a clean air source is connected to the proximal end of the air supply pipes through an opening/closing valve. Clean gas is fed into the transfer chamber from the clean air source from the start of an unloading of the wafers to the time of the dismounting of the wafers from a wafer boat with the circulation of gas flows in the circulation gas passage stopped. A filter material of the dust removing filter is PTFE, which can reduce the amount of impurities scattered from the dust removing filter that attach on the wafers.

Abstract: An air cleaning apparatus includes an air passage chamber having a suction port, from which air is sucked, and a discharge port from which the air sucked from the suction port is discharged, an air blower, provided in the air passage chamber, for sucking the air from the suction port into the air passage chamber and discharging the sucked air from the discharge port, and a particle removing mechanism for removing particles contained in the air sucked from the suction port, the entire body of the particle removing mechanism being formed of a material which generates little impurity gas detrimental to processing in a processing space.