Abstract: A structure of a ratchet type one-way clutch that enables a reduction of the installation space along the direction of the center axis and high torque setting. The structure includes a securing member arranged on the center axis of a ratchet type one-way clutch and having a holding portion opposed to the ratchet type one-way clutch in the axial direction. The outer race of the ratchet type one-way clutch is provided with a first fit portion including a plurality of through holes. The holding portion is provided with a second fit portion including a plurality of projections that is in fitting engagement with the first fit portions, respectively.

Abstract: A transfer robot includes a supporting part, a moving part, a magnet unit, and a coil. The moving part is supported by the supporting part and movable along a predetermined travel path. The moving part is provided with a hand for carrying a workpiece. The magnet unit is disposed at the supporting part and extends longitudinally along the travel path. The magnetic unit generates magnetic flux that is at least partially perpendicular to the travel path. The coil is disposed at the moving part and intersects the magnetic flux. The magnetic flux varies or is different at positions along the travel path.

Abstract: A one-way clutch allows unlocking torque input to a movable retainer to be made low, thereby enabling downsizing of an external apparatus that inputs unlocking torque to the movable retainer. The one-way clutch includes an inner ring, an outer ring, first rollers used to transmit torque between the inner ring and the outer ring provided in an annular space between the inner ring and the outer ring, and fixed retaining portions of a fixed retainer and a movable retaining portions of a movable retainer that are arranged alternately. The one-way clutch also includes second rollers provided between the movable retaining portions and the first rollers adapted to transmit unlocking torque from the movable retaining portions to the first rollers and the inner ring as the movable retaining portions move in a clockwise direction.

Abstract: A transfer system is provided with a transfer apparatus that has an arm mechanism to transfer a workpiece, a control device that supplies electric power to the transfer apparatus and controls the motions of the transfer apparatus, and a power cable that connects between the control device and the transfer apparatus. The control device sends and receives a signal for controlling the transfer apparatus through the power cable. The transfer apparatus is provided with a plurality of motors for driving the transfer apparatus, a plurality of drive control sections for applying electric power supplied from the control device to the plurality of motors for driving the motor, and internal power lines that connect the plurality of drive control sections. The plurality of drive control sections each sends and receives the signal to and from the control device through the power cable and the internal power lines and drives the motor according to the signal.

Abstract: A transfer robot includes a supporting part, a moving part, a magnet unit, and a coil. The moving part is supported by the supporting part and movable along a predetermined travel path. The moving part is provided with a hand for carrying a workpiece. The magnet unit is disposed at the supporting part and extends longitudinally along the travel path. The magnetic unit generates magnetic flux that is at least partially perpendicular to the travel path. The coil is disposed at the moving part and intersects the magnetic flux. The magnetic flux varies or is different at positions along the travel path.

Abstract: Since one end of a spring is received by a planar portion of a spring seat provided on any one of an outer plate and an inner plate, it is possible to support the spring with a planar member without machining a bottom wall face of the outer plate into a planar shape. Since the spring seat has seat guide portions that contact the outer plate, it is possible to suppress the fluctuation of the spring seat and the fluctuation of the spring by the seat guide portions, so it is possible to reliably prevent interference of the spring with its peripheral portion. Therefore, a load on the spring is reduced, so it is possible to improve the durability of a one-way clutch.

Abstract: An object is to provide a one-way clutch that allows unlocking torque input to the movable retainer to be made low, thereby enabling downsizing of an external apparatus that inputs unlocking torque to the movable retainer. A one-way clutch 1 includes an inner ring 5, an outer ring 3, first rollers 19 used to transmit torque between the inner ring and the outer ring provided in an annular space A between the inner ring 5 and the outer ring 3, and fixed retaining portions 31 of a fixed retainer 27 and a movable retaining portions 37 of a movable retainer 33 that are arranged alternately. The one-way clutch 1 also includes second rollers 23 provided between the movable retaining portions 37 and the first rollers 19 adapted to transmit unlocking torque from the movable retaining portions 37 to the first rollers 19 and the inner ring 5 as the movable retaining portions 37 move in the clockwise direction.

Abstract: A two-way clutch includes an outer race having a cam section in an inner periphery, an inner race that is separated in an inside diameter direction with respect to the outer race, and is disposed concentrically to be relatively rotatable, a torque transmission member that is disposed between the outer race and the inner race, and transmits torque, a cage that is capable of engaging with the torque transmission member and is movable in a circumferential direction, a drag strip that is supported by the cage, and a switching mechanism that can cause the two-way clutch to take at least a state locked in two directions by causing the drag strip to slide onto the inner race.

Abstract: A workpiece detection mechanism may include a sensor part detecting the workpiece; a sensor amplifier part connected to the sensor part and processing a signal from the sensor part; a battery part supplying electric power to the sensor amplifier part; and a wireless transmitting part transmitting by wireless the signal from the sensor amplifier part to an outside of the vacuum chamber. The sensor part, the sensor amplifier part, the battery part and the wireless transmitting part may be provided in one end effector provided in the workpiece transfer mechanism and are not connected directly to any member other than the end effector.

Abstract: A workpiece conveying robot includes a base unit, a moving unit configured to move with respect to the base unit, a driving mechanism that drives the moving unit, and a detection unit. The moving unit includes a hand on which a workpiece is to be placed. The detection unit serves to detect information about the workpiece. Specifically, the detection unit includes a sensor provided at the hand, a base unit-side terminal provided at the base unit, and a moving unit-side terminal provided at the moving unit and electrically connected to the sensor. The base unit-side terminal and the moving unit-side terminal are brought into contact with each other when the moving unit is at a predetermined position.

Abstract: The vacuum seal unit of a workpiece transfer apparatus includes a plurality of seal rings and a cooling flow passage formed so as to circulate through inside a rotating shaft and a workpiece transfer mechanism. The seal rings adjacent to each other with a spacing therebetween, out of the plurality of seal rings, and the rotating shaft define a first space and a second space independent from each other and respectively surrounding the periphery of the rotating shaft. An end portion of the cooling flow passage communicates with the first space, and the other end of the cooling flow passage communicates with the second space. Even when the rotating shaft is rotating about the axial center, a coolant supplied to the second space can flow through the cooling flow passage and be supplied to the first space, thereby enabling cooling with high efficiency without restriction on the angle of rotation.

Abstract: An object is to provide a cooling unit which can reduce influence of radiation heat from a work piece having high temperature on members surrounding the work piece, prevent leak of coolant and vacuum leak, reduce cost, and prevent turning angle of a work piece conveying mechanism from being limited. The cooling unit is attached to the work piece conveying mechanism in the state that the outer wall part is in close contact with the to-be-cooled surface. The coolant stored in the lower space is evaporated by the heat transmitted from the to-be-cooled surface P via the outer wall part, and the to-be-cooled surface is cooled via the outer wall part by the heat of evaporation lost at the time of the evaporation of the coolant. The vapor in the lower space (coolant container) is discharged to the vacuum chamber by the vapor exhaust unit when the pressure of the vapor in the lower space reaches the fixed value or higher.

Abstract: A two-way clutch includes an outer race having a cam section in an inner periphery, an inner race that is separated in an inside diameter direction with respect to the outer race, and is disposed concentrically to be relatively rotatable, a torque transmission member that is disposed between the outer race and the inner race, and transmits torque, a cage that is capable of engaging with the torque transmission member and is movable in a circumferential direction, a drag strip that is supported by the cage, and a switching mechanism that can cause the two-way clutch to take at least a state locked in two directions by causing the drag strip to slide onto the inner race.

Abstract: A workpiece conveying robot includes a base unit, a moving unit configured to move with respect to the base unit, a driving mechanism that drives the moving unit, and a detection unit. The moving unit includes a hand on which a workpiece is to be placed. The detection unit serves to detect information about the workpiece. Specifically, the detection unit includes a sensor provided at the hand, a base unit-side terminal provided at the base unit, and a moving unit-side terminal provided at the moving unit and electrically connected to the sensor. The base unit-side terminal and the moving unit-side terminal are brought into contact with each other when the moving unit is at a predetermined position.

Abstract: An engine starter mechanism using a one way clutch includes a starter motor; a ring gear for receiving a driving force from the starter motor; the one way clutch including an outer race, an inner race disposed away from the outer race in a radially inner direction and relatively rotatably disposed concentrically with the outer race, and a torque transmitting section disposed between the outer race and the inner race to transmit a torque; and an oil seal for sealing the one way clutch, the ring gear is connected to the outer race of the one way clutch, and the oil seal is held between the ring gear and the outer race.

Abstract: A workpiece detection mechanism may include a sensor part detecting the workpiece; a sensor amplifier part connected to the sensor part and processing a signal from the sensor part; a battery part supplying electric power to the sensor amplifier part; and a wireless transmitting part transmitting by wireless the signal from the sensor amplifier part to an outside of the vacuum chamber. The sensor part, the sensor amplifier part, the battery part and the wireless transmitting part may be provided in one end effector provided in the workpiece transfer mechanism and are not connected directly to any member other than the end effector.

Abstract: The vacuum seal unit of a workpiece transfer apparatus includes a plurality of seal rings and a cooling flow passage formed so as to circulate through inside a rotating shaft and a workpiece transfer mechanism. The seal rings adjacent to each other with a spacing therebetween, out of the plurality of seal rings, and the rotating shaft define a first space and a second space independent from each other and respectively surrounding the periphery of the rotating shaft. An end portion of the cooling flow passage communicates with the first space, and the other end of the cooling flow passage communicates with the second space. Even when the rotating shaft is rotating about the axial center, a coolant supplied to the second space can flow through the cooling flow passage and be supplied to the first space, thereby enabling cooling with high efficiency without restriction on the angle of rotation.

Abstract: An object is to provide a cooling unit which can reduce influence of radiation heat from a work piece having high temperature on members surrounding the work piece, prevent leak of coolant and vacuum leak, reduce cost, and prevent turning angle of a work piece conveying mechanism from being limited. The cooling unit is attached to the work piece conveying mechanism in the state that the outer wall part is in close contact with the to-be-cooled surface. The coolant stored in the lower space is evaporated by the heat transmitted from the to-be-cooled surface P via the outer wall part, and the to-be-cooled surface is cooled via the outer wall part by the heat of evaporation lost at the time of the evaporation of the coolant. The vapor in the lower space (coolant container) is discharged to the vacuum chamber by the vapor exhaust unit when the pressure of the vapor in the lower space reaches the fixed value or higher.

Abstract: An engine starter mechanism using a one way clutch includes a starter motor; a ring gear for receiving a driving force from the starter motor; the one way clutch including an outer race, an inner race disposed away from the outer race in a radially inner direction and relatively rotatably disposed concentrically with the outer race, and a torque transmitting section disposed between the outer race and the inner race to transmit a torque; and an oil seal for sealing the one way clutch, the ring gear is connected to the outer race of the one way clutch, and the oil seal is held between the ring gear and the outer race.